会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明授权
    • Gas sensor and manufacturing method of the same
    • 气体传感器及其制造方法相同
    • US5605612A
    • 1997-02-25
    • US337065
    • 1994-11-10
    • Hyeon S. ParkKyu C. LeeChul H. KwonDong H. YunHyun W. ShinHyung K. Hong
    • Hyeon S. ParkKyu C. LeeChul H. KwonDong H. YunHyun W. ShinHyung K. Hong
    • G01N27/12G01N33/00G01N27/26
    • G01N27/12G01N33/0031
    • A thin-film gas sensor and manufacturing method of the same is disclosed which includes a silicon substrate; an insulating layer formed on the surface of the silicon substrate; a heater formed in zigzag on the surface of said insulating layer; a temperature sensor formed in zigzag on the surface of the insulating layer in parallel with the heater; an interlayer insulating layer for electrically insulating the heater and temperature sensor formed on the insulating layer; a plurality of electrodes formed on the interlayer insulating layer placed between the heater and temperature sensor; a plurality of pairs of gas sensing layers disposed in an array on the electrodes and for reacting on detected gas; and a plurality of gas shielding layers formed on one gas sensing layer out of the pair of gas sensing layers and for shielding the detected gas so that the gas sensing layers do not react on the detected gas.
    • 公开了一种薄膜气体传感器及其制造方法,其包括硅衬底; 形成在所述硅衬底的表面上的绝缘层; 在所述绝缘层的表面上以锯齿形形成的加热器; 绝缘层的表面上与加热器平行地以锯齿形形成的温度传感器; 用于使形成在绝缘层上的加热器和温度传感器电绝缘的层间绝缘层; 多个电极,形成在位于加热器和温度传感器之间的层间绝缘层上; 多个成对的气体感测层,阵列设置在电极上并用于对检测到的气体进行反应; 以及多个气体屏蔽层,形成在一对气体感测层之间的一个气体感测层上,并用于屏蔽检测到的气体,使得气体感测层不对检测到的气体起反应。