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1. 发明授权

US07199882B2 Method and system for high speed measuring of microscopic targets 失效
标题翻译：用于高速测量微观目标的方法和系统
公开(公告)号：US07199882B2
公开(公告)日：2007-04-03
申请号：US11102334
申请日：2005-04-08
申请人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
发明人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
IPC分类号： G01B11/24
CPC分类号： G01B11/2545 , G01B11/026 , G01B11/24 , G01B11/2518 , G01N21/9501 , G02B21/22
摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.
摘要翻译：包括基于共焦和三角测量的扫描仪或子系统的系统提供在控制算法的控制下获取和处理的数据，以获得关于可能是“非合作”的微观目标的尺寸信息。 “非协同”目标用诸如从第一方向入射的激光的电磁辐射扫描束照射。电磁辐射的共焦检测器被放置在第一位置，用于接收与入射的电磁辐射束基本上光学共线的反射辐射。该系统包括用于衰减背景能量的空间滤波器。基于三角测量的子系统还包括电磁辐射检测器，其被放置在相对于入射光束非共线的第二位置。该检测器具有位置敏感轴。数字数据源自由检测器产生的信号。以这种方式，来自至少一个基于三角测量的信道的数据被并行或顺序地与具有基于三角测量的传感器数据具有基本上完美的时间和空间配准的共焦图像数据的至少一个切片获取。这允许融合或进一步处理与预定测量算法一起使用的数据，从而获得关于目标的信息。

2. 发明授权

US06177998B1 Method and system for high speed measuring of microscopic targets 失效
公开(公告)号：US06177998B1
公开(公告)日：2001-01-23
申请号：US09420740
申请日：1999-10-20
申请人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
发明人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
IPC分类号： G01B1124
CPC分类号： G01B11/2545 , G01B11/026 , G01B11/24 , G01B11/2518 , G01N21/9501 , G02B21/22
摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.

3. 发明授权

US06249347B1 Method and system for high speed measuring of microscopic targets 失效
公开(公告)号：US06249347B1
公开(公告)日：2001-06-19
申请号：US09420935
申请日：1999-10-19
申请人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
发明人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
IPC分类号： G01B1124
CPC分类号： G01B11/2545 , G01B11/026 , G01B11/24 , G01B11/2518 , G01N21/9501 , G02B21/22
摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.

4. 发明授权

US06750974B2 Method and system for 3D imaging of target regions 失效
标题翻译：目标区域三维成像的方法和系统
公开(公告)号：US06750974B2
公开(公告)日：2004-06-15
申请号：US10244891
申请日：2002-09-16
申请人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
发明人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
IPC分类号： G01B1124
CPC分类号： G01N21/95684 , G01B11/2518 , G01B11/2545
摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.
摘要翻译：包括基于共焦和三角测量的扫描仪或子系统的系统提供在控制算法的控制下获取和处理的数据，以获得关于可能是“非合作”的微观目标的尺寸信息。 “非协同”目标用诸如从第一方向入射的激光的电磁辐射扫描束照射。电磁辐射的共焦检测器被放置在第一位置，用于接收与入射的电磁辐射束基本上光学共线的反射辐射。该系统包括用于衰减背景能量的空间滤波器。基于三角测量的子系统还包括电磁辐射检测器，其被放置在相对于入射光束非共线的第二位置。该检测器具有位置敏感轴。数字数据源自由检测器产生的信号。以这种方式，来自至少一个基于三角测量的信道的数据被并行或顺序地与具有基于三角测量的传感器数据具有基本上完美的时间和空间配准的共焦图像数据的至少一个切片获取。这允许融合或进一步处理与预定测量算法一起使用的数据，从而获得关于目标的信息。

5. 发明授权

US06366357B1 Method and system for high speed measuring of microscopic targets 失效
标题翻译：用于高速测量微观目标的方法和系统
公开(公告)号：US06366357B1
公开(公告)日：2002-04-02
申请号：US09035564
申请日：1998-03-05
申请人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
发明人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
IPC分类号： G01B1124
CPC分类号： G01B11/2545 , G01B11/026 , G01B11/24 , G01B11/2518 , G01N21/9501 , G02B21/22
摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.
摘要翻译：包括基于共焦和三角测量的扫描仪或子系统的系统提供在控制算法的控制下获取和处理的数据，以获得关于可能是“非合作”的微观目标的尺寸信息。 “非协同”目标用诸如从第一方向入射的激光的电磁辐射扫描束照射。电磁辐射的共焦检测器被放置在第一位置，用于接收与入射的电磁辐射束基本上光学共线的反射辐射。该系统包括用于衰减背景能量的空间滤波器。基于三角测量的子系统还包括电磁辐射检测器，其被放置在相对于入射光束非共线的第二位置。该检测器具有位置敏感轴。数字数据源自由检测器产生的信号。以这种方式，来自至少一个基于三角测量的信道的数据被并行或顺序地与具有基于三角测量的传感器数据具有基本上完美的时间和空间配准的共焦图像数据的至少一个切片获取。这允许融合或进一步处理与预定测量算法一起使用的数据，从而获得关于目标的信息。

6. 发明授权

US06181425B2 Method and system for high speed measuring of microscopic targets 失效
标题翻译：用于高速测量微观目标的方法和系统
公开(公告)号：US06181425B2
公开(公告)日：2001-01-30
申请号：US09419586
申请日：1999-10-18
申请人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
发明人： Donald J. Svetkoff , Donald B. T. Kilgus , Warren Lin , Jonathan S. Ehrmann
IPC分类号： G01B1124
CPC分类号： G01B11/2545 , G01B11/026 , G01B11/24 , G01B11/2518 , G01N21/9501 , G02B21/22
摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.
摘要翻译：包括基于共焦和三角测量的扫描仪或子系统的系统提供在控制算法的控制下获取和处理的数据，以获得关于可能是“非合作”的微观目标的尺寸信息。 “非协同”目标用诸如从第一方向入射的激光的电磁辐射扫描束照射。电磁辐射的共焦检测器被放置在第一位置，用于接收与入射的电磁辐射束基本上光学共线的反射辐射。该系统包括用于衰减背景能量的空间滤波器。基于三角测量的子系统还包括电磁辐射检测器，其被放置在相对于入射光束非共线的第二位置。该检测器具有位置敏感轴。数字数据源自由检测器产生的信号。以这种方式，来自至少一个基于三角测量的信道的数据被并行或顺序地与具有基于三角测量的传感器数据具有基本上完美的时间和空间配准的共焦图像数据的至少一个切片获取。这允许融合或进一步处理与预定测量算法一起使用的数据，从而获得关于目标的信息。

7. 发明授权

US06452686B1 Method and system for high speed measuring of microscopic targets 有权
标题翻译：用于高速测量微观目标的方法和系统
公开(公告)号：US06452686B1
公开(公告)日：2002-09-17
申请号：US10114750
申请日：2002-04-02
申请人： Donald J. Svetkoff , Donald B. T. Kilgus , Jonathan S. Ehrmann
发明人： Donald J. Svetkoff , Donald B. T. Kilgus , Jonathan S. Ehrmann
IPC分类号： G01B1124
CPC分类号： G01B11/2545 , G01B11/026 , G01B11/24 , G01B11/2518 , G01N21/9501 , G02B21/22
摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “noncooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.
摘要翻译：包括基于共焦和三角测量的扫描器或子系统的系统提供在控制算法的控制下获取和处理的数据，以获得关于可能是“非合作”的微观目标的尺寸信息。 “非协同”目标用诸如从第一方向入射的激光的电磁辐射扫描束照射。电磁辐射的共焦检测器被放置在第一位置，用于接收与入射的电磁辐射束基本上光学共线的反射辐射。该系统包括用于衰减背景能量的空间滤波器。基于三角测量的子系统还包括电磁辐射检测器，其被放置在相对于入射光束非共线的第二位置。该检测器具有位置敏感轴。数字数据源自由检测器产生的信号。以这种方式，来自至少一个基于三角测量的信道的数据被并行或顺序地与具有基于三角测量的传感器数据具有基本上完美的时间和空间配准的共焦图像数据的至少一个切片获取。这允许融合或进一步处理与预定测量算法一起使用的数据，从而获得关于目标的信息。

8. 发明授权

US07466466B2 Optical scanning method and system and method for correcting optical aberrations introduced into the system by a beam deflector 有权
标题翻译：光学扫描方法和用于校正通过光束偏转器引入到系统中的光学像差的系统和方法
公开(公告)号：US07466466B2
公开(公告)日：2008-12-16
申请号：US11410684
申请日：2006-04-25
申请人： Jonathan S. Ehrmann , Donald B. T. Kilgus
发明人： Jonathan S. Ehrmann , Donald B. T. Kilgus
IPC分类号： G02B26/08
CPC分类号： G02B27/0031 , G02F1/33
摘要： An optical scanning method and system and method for correcting optical aberrations introduced into the system by a beam deflector are provided. The optical scanning method and system utilize a tilt-corrected, off-axis beam deflector. The scanning system includes an off-axis acousto-optic beam deflector with a walk-off angle operated at high speed and post-scan optics used to focus the scanned beam. A tilted in-scan focus plane resulting from beam width variation through the scan and the cylindrical lens effect is corrected with one or more tilted lens elements within the post-scan optical train.
摘要翻译：提供了一种用于通过光束偏转器校正引入到系统中的光学像差的光学扫描方法和系统和方法。光学扫描方法和系统利用倾斜校正的离轴光束偏转器。扫描系统包括具有高速操作的离散角的离轴声光束偏转器和用于聚焦扫描光束的后扫描光学器件。通过扫描和柱面透镜效应的光束宽度变化产生的倾斜的扫描中的聚焦平面用后扫描光学列中的一个或多个倾斜透镜元件来校正。

9. 发明申请

US20130200050A1 LINK PROCESSING WITH HIGH SPEED BEAM DEFLECTION 审中-公开
公开(公告)号：US20130200050A1
公开(公告)日：2013-08-08
申请号：US13608454
申请日：2012-09-10
申请人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
发明人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
IPC分类号： B23K26/08 , B23K26/36
CPC分类号： B23K26/0869 , B23K26/0344 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/082 , B23K26/0853 , B23K26/361 , B23K26/40 , B23K2101/40 , B23K2103/16 , B23K2103/50 , H01L21/76894 , H01L23/5258 , H01L27/10844 , H01L2924/0002 , Y10T29/49156 , H01L2924/00
摘要： The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.

10. 发明授权

US08269137B2 Link processing with high speed beam deflection 有权
标题翻译：链接处理与高速光束偏转
公开(公告)号：US08269137B2
公开(公告)日：2012-09-18
申请号：US12233476
申请日：2008-09-18
申请人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
发明人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
IPC分类号： B23K26/36
CPC分类号： B23K26/0869 , B23K26/0344 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/082 , B23K26/0853 , B23K26/361 , B23K26/40 , B23K2101/40 , B23K2103/16 , B23K2103/50 , H01L21/76894 , H01L23/5258 , H01L27/10844 , H01L2924/0002 , Y10T29/49156 , H01L2924/00
摘要： The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.
摘要翻译：本发明涉及激光加工方法和系统的领域，具体涉及用于激光加工多材料装置的激光加工方法和系统。系统和方法可以利用高速偏转器来改善处理能量窗口和/或提高处理速度。在一些实施例中，偏转器用于束斑的非正交扫描。在一些实施例中，偏转器用于实现目标结构的非同步处理。

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