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1. 发明授权

US09079283B2 Method and apparatus for optically measuring by interferometry the thickness of an object 有权
标题翻译：用于通过干涉测量物体的厚度进行光学测量的方法和装置
公开(公告)号：US09079283B2
公开(公告)日：2015-07-14
申请号：US13643518
申请日：2011-05-17
申请人： Dino Galletti , Domenico Malpezzi
发明人： Dino Galletti , Domenico Malpezzi
IPC分类号： B24B1/00 , B24B7/22 , B24B37/013 , B24B49/12 , G01B11/06
CPC分类号： B24B7/228 , B24B37/013 , B24B49/12 , G01B11/0675 , G01B11/0683
摘要： Methods and apparatuses are used for optically measuring by interferometry the thickness (T) of an object (2) such as a slice of semiconductor material. Readings of the object thickness by optical interferometry are carried out, rough thickness values (RTW) are obtained and frequencies, indicating how often the rough thickness values occur, are evaluated. A limited set of adjacent rough thickness values whose frequency integration or summation represents an absolute maximum is identified, and the actual value of the thickness of the object is determined as a function of the rough thickness values belonging to said limited set of values. The rough thickness values can be divided up into classes (C) with corresponding frequencies (F), and in this case, a preponderant group (Gmax) of thickness classes is identified as the above-mentioned limited set of adjacent rough thickness. A lower reject threshold (Rmin) and a higher reject threshold (Rmax) that define a searching interval including the actual value of the object thickness are also determined, and all the rough thickness values that are outside the searching interval are eliminated from further processing. When measuring the object during a surface machining, the reject thresholds are progressively and automatically updated as a function of a gradual thickness reduction that the object undergoes.
摘要翻译：方法和装置用于通过干涉测量诸如半导体材料片的物体（2）的厚度（T）进行光学测量。通过光学干涉测量读取物体厚度，获得粗糙厚度值（RTW），并且评估表示粗糙厚度值出现频率的频率。识别频率积分或求和表示绝对最大值的有限的相邻粗糙厚度值集，并且确定物体的厚度的实际值作为属于所述有限值集合的粗糙厚度值的函数。粗糙度值可以分为具有相应频率（F）的类别（C），在这种情况下，厚度等级的优势组（Gmax）被识别为上述有限的相邻粗糙厚度集合。还确定定义包括对象厚度的实际值的搜索间隔的较低拒绝阈值（Rmin）和较高拒绝阈值（Rmax），并且从进一步处理中消除在搜索间隔之外的所有粗糙厚度值。当在表面加工期间测量物体时，拒绝阈值将随着物体经历的逐渐减小厚度而逐渐自动更新。

2. 发明申请

US20130045663A1 METHOD AND APPARATUS FOR OPTICALLY MEASURING BY INTERFEROMETRY THE THICKNESS OF AN OBJECT 有权
标题翻译：通过干涉测量物体的厚度进行光学测量的方法和装置
公开(公告)号：US20130045663A1
公开(公告)日：2013-02-21
申请号：US13643518
申请日：2011-05-17
申请人： Dino Galletti , Domenico Malpezzi
发明人： Dino Galletti , Domenico Malpezzi
IPC分类号： B24B49/12 , G01B11/06 , H01L21/463
CPC分类号： B24B7/228 , B24B37/013 , B24B49/12 , G01B11/0675 , G01B11/0683
摘要： Methods and apparatuses are used for optically measuring by interferometry the thickness (T) of an object (2) such as a slice of semiconductor material. Readings of the object thickness by optical interferometry are carried out, rough thickness values (RTW) are obtained and frequencies, indicating how often the rough thickness values occur, are evaluated. A limited set of adjacent rough thickness values whose frequency integration or summation represents an absolute maximum is identified, and the actual value of the thickness of the object is determined as a function of the rough thickness values belonging to said limited set of values. The rough thickness values can be divided up into classes (C) with corresponding frequencies (F), and in this case, a preponderant group (Gmax) of thickness classes is identified as the above-mentioned limited set of adjacent rough thickness. A lower reject threshold (Rmin) and a higher reject threshold (Rmax) that define a searching interval including the actual value of the object thickness are also determined, and all the rough thickness values that are outside the searching interval are eliminated from further processing. When measuring the object during a surface machining, the reject thresholds are progressively and automatically updated as a function of a gradual thickness reduction that the object undergoes.
摘要翻译：方法和装置用于通过干涉测量诸如半导体材料片的物体（2）的厚度（T）进行光学测量。通过光学干涉测量读取物体厚度，获得粗糙厚度值（RTW），并且评估表示粗糙厚度值出现频率的频率。识别频率积分或求和表示绝对最大值的有限的相邻粗糙厚度值集，并且确定物体的厚度的实际值作为属于所述有限值集合的粗糙厚度值的函数。粗糙度值可以分为具有相应频率（F）的类别（C），在这种情况下，厚度等级的优势组（Gmax）被识别为上述有限的相邻粗糙厚度集合。还确定定义包括对象厚度的实际值的搜索间隔的较低拒绝阈值（Rmin）和较高拒绝阈值（Rmax），并且从进一步处理中消除在搜索间隔之外的所有粗糙厚度值。当在表面加工期间测量物体时，拒绝阈值将随着物体经历的逐渐减小厚度而逐渐自动更新。

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