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1. 发明授权

US5674039A System for transferring articles between controlled environments 失效
标题翻译：在受控环境之间传送物品的系统
公开(公告)号：US5674039A
公开(公告)日：1997-10-07
申请号：US700997
申请日：1996-08-21
申请人： Delroy Walker , Joseph Zihmer , Danny Furches , Christopher J. Garmer
发明人： Delroy Walker , Joseph Zihmer , Danny Furches , Christopher J. Garmer
IPC分类号： B65G49/00 , B65G49/07 , H01L21/677 , B65G1/04
CPC分类号： H01L21/67772 , Y10S414/137 , Y10S414/139 , Y10S414/14
摘要： A SMIF system for transferring semiconductor wafers between two controlled environments, one being within a wafer cassette carrier and the other being within an enclosure around a wafer processing apparatus. In a carrier loading position, a carrier door rests on a port door which forms part of a platform for vertically fixing and horizontally moving the cassette within the enclosure. A carrier cover, when unlocked from the carrier door, is engageable by a port plate for vertical movement therewith as an elevator mechanism moves the port plate between down and up positions. In the down position, the port door closes an enclosure opening defined by the port plate. In the up position, the port plate raises the carrier cover to allow access to the wafers in the cassette by an article processing apparatus. External and internal panels carried by the port plate cause the controlled environment of the enclosure to be extended to include a compartment containing the uncovered cassette. The cassette platform also rotates to position the cassette relative to the article processing apparatus.
摘要翻译：一种用于在两个受控环境之间转移半导体晶片的SMIF系统，一个在晶片盒载体内，另一个位于晶片处理装置周围的外壳内。在承载装载位置，承载门搁置在形成用于垂直固定和水平移动盒中的盒的平台的一部分的端口门上。托架盖当从托架门解锁时可通过端口板与其垂直运动而接合，因为升降机构使端板在下降和向上位置之间移动。在下降位置，端口门关闭由端口板限定的外壳开口。在向上位置，端口板升起托架盖，以允许通过物品处理设备进入盒中的晶片。端口板承载的外部和内部面板导致外壳的受控环境被延伸，以包括一个包含未覆盖的磁带盒的隔间。盒式平台还旋转以使盒相对于物品处理装置定位。

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