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    • 1. 发明授权
    • Miniature thermoelectric power generator
    • 微型热电发电机
    • US09214618B2
    • 2015-12-15
    • US13061422
    • 2009-09-11
    • David Patrick ArnoldIsrael BonicheChristopher David MeyerSivaraman Masilamani
    • David Patrick ArnoldIsrael BonicheChristopher David MeyerSivaraman Masilamani
    • H01L35/34H01L35/28H01L35/32
    • H01L35/32
    • The subject invention pertains to thermoelectric power generation. According to certain embodiments, a stack of silicon-micromachined chips can be connected to form a cylindrical heat exchanger that enables a large, uniform temperature difference across a radially-oriented thermopile. Each layer in the stack can comprise two thermally-isolated concentric silicon rings connected by a polyimide membrane that supports patterned thermoelectric thin films. The polyimide membrane can be formed by selectively etching away the supporting silicon, resulting in thermally-isolated inner and outer rings. In operation, hot gas can flow through a finned central channel, and an external cross flow can enhance heat transfer to ambient to keep the outer surfaces cool. The resulting temperature gradient across the thermopile generates a voltage potential across the open ends due to the Seebeck effect. When connected to a load, current flows, and electrical power is supplied by the generated voltage potential caused by the temperature gradient.
    • 本发明涉及热电发电。 根据某些实施例,硅 - 微机械加工的芯片的堆叠可以连接以形成圆柱形换热器,其能够在径向定向的热电堆上实现大的均匀的温度差。 堆叠中的每个层可以包括由支撑图案化热电薄膜的聚酰亚胺膜连接的两个热隔离同心硅环。 聚酰亚胺膜可以通过选择性地蚀刻掉支撑硅而形成,从而产生热隔离的内环和外环。 在操作中,热气体可以流过翅片中心通道,并且外部横流可以增强对环境的热传递以保持外表面变冷。 由于塞贝克效应,热电堆上产生的温度梯度会在开口端产生一个电压电位。 当连接到负载时,电流流动,并且由由温度梯度引起的产生的电压电位提供电力。
    • 2. 发明申请
    • Miniature Thermoelectric Power Generator
    • 微型热电发电机
    • US20110155202A1
    • 2011-06-30
    • US13061422
    • 2009-09-11
    • David Patrick ArnoldIsrael BonicheChristopher David MeyerSivaraman Masilamani
    • David Patrick ArnoldIsrael BonicheChristopher David MeyerSivaraman Masilamani
    • H01L35/32H01L35/34
    • H01L35/32
    • The subject invention pertains to thermoelectric power generation. According to certain embodiments, a stack of silicon-micromachined chips can be connected to form a cylindrical heat exchanger that enables a large, uniform temperature difference across a radially-oriented thermopile. Each layer in the stack can comprise two thermally-isolated concentric silicon rings connected by a polyimide membrane that supports patterned thermoelectric thin films. The polyimide membrane can be formed by selectively etching away the supporting silicon, resulting in thermally-isolated inner and outer rings. In operation, hot gas can flow through a finned central channel, and an external cross flow can enhance heat transfer to ambient to keep the outer surfaces cool. The resulting temperature gradient across the thermopile generates a voltage potential across the open ends due to the Seebeck effect. When connected to a load, current flows, and electrical power is supplied by the generated voltage potential caused by the temperature gradient.
    • 本发明涉及热电发电。 根据某些实施例,硅 - 微机械加工的芯片的堆叠可以连接以形成圆柱形换热器,其能够在径向定向的热电堆上实现大的均匀的温度差。 堆叠中的每个层可以包括由支撑图案化热电薄膜的聚酰亚胺膜连接的两个热隔离同心硅环。 聚酰亚胺膜可以通过选择性地蚀刻掉支撑硅而形成,从而产生热隔离的内环和外环。 在操作中,热气体可以流过翅片中心通道,并且外部横流可以增强对环境的热传递以保持外表面变冷。 由于塞贝克效应,热电堆上产生的温度梯度会在开口端产生一个电压电位。 当连接到负载时,电流流动,并且由由温度梯度引起的产生的电压电位提供电力。