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    • 1. 发明授权
    • Method of forming a field effect transistor
    • 形成场效应晶体管的方法
    • US5933738A
    • 1999-08-03
    • US964779
    • 1997-11-05
    • David KaoYauh-Ching Liu
    • David KaoYauh-Ching Liu
    • H01L21/336H01L29/10H01L29/78H01L21/339
    • H01L29/66583H01L29/1033H01L29/66553H01L29/7833H01L29/66537
    • A semiconductor processing method of forming a field effect transistor includes, a) providing a first layer of material over a substrate; b) providing a first opening through the first layer, the first opening having a width and a base; c) providing a second layer of material over the first layer and to within the first opening to a thickness which is less than one half the first opening width to less than completely fill the first opening and define a narrower second opening; d) anisotropically etching the second layer of material from outwardly of the first layer and from the first opening base to effectively provide inner sidewall spacers within the first opening; e) providing a gate dielectric layer within the second opening; f) providing a layer of electrically conductive gate material over the first layer and to within the second opening over the gate dielectric layer to fill the second opening with conductive gate material; g) without masking, planarize etching the conductive gate material layer substantially selective relative to the first layer to define a transistor gate within the second opening; and h) providing opposing source and drain regions relative to the transistor gate.
    • 形成场效应晶体管的半导体处理方法包括:a)在衬底上提供第一层材料; b)提供穿过第一层的第一开口,第一开口具有宽度和底部; c)在所述第一层之上提供第二层材料,并且在所述第一开口内提供厚度小于所述第一开口宽度的一半,以小于完全填充所述第一开口并限定较窄的第二开口; d)从所述第一层的外部和所述第一开口底部各向异性地蚀刻所述第二层材料,以有效地在所述第一开口内提供内部侧壁间隔物; e)在所述第二开口内提供栅极电介质层; f)在所述第一层上提供导电栅极材料层,并且在所述栅极介电层上方的所述第二开口内提供导电栅极材料层,以用导电栅极材料填充所述第二开口; g)没有掩蔽,平坦化蚀刻相对于第一层基本上选择性的导电栅极材料层,以在第二开口内限定晶体管栅极; 以及h)相对于所述晶体管栅极提供相对的源极和漏极区域。
    • 2. 发明授权
    • Method of forming a field effect transistor
    • 形成场效应晶体管的方法
    • US5688700A
    • 1997-11-18
    • US552855
    • 1995-11-03
    • David KaoYauh-Ching Liu
    • David KaoYauh-Ching Liu
    • H01L21/336H01L29/10H01L29/78H01L21/265
    • H01L29/66583H01L29/1033H01L29/66553H01L29/7833H01L29/66537
    • A semiconductor processing method of forming a field effect transistor includes, a) providing a first layer of material over a substrate; b) providing a first opening through the first layer, the first opening having a width and a base; c) providing a second layer of material over the first layer and to within the first opening to a thickness which is less than one half the first opening width to less than completely fill the first opening and define a narrower second opening; d) anisotropically etching the second layer of material from outwardly of the first layer and from the first opening base to effectively provide inner sidewall spacers within the first opening; e) providing a gate dielectric layer within the second opening; f) providing a layer of electrically conductive gate material over the first layer and to within the second opening over the gate dielectric layer to fill the second opening with conductive gate material; g) without masking, planarize etching the conductive gate material layer substantially selective relative to the first layer to define a transistor gate within the second opening; and h) providing opposing source and drain regions relative to the transistor gate.
    • 形成场效应晶体管的半导体处理方法包括:a)在衬底上提供第一层材料; b)提供穿过第一层的第一开口,第一开口具有宽度和底部; c)在所述第一层之上提供第二层材料,并且在所述第一开口内提供厚度小于所述第一开口宽度的一半,以小于完全填充所述第一开口并限定较窄的第二开口; d)从所述第一层的外部和所述第一开口底部各向异性地蚀刻所述第二层材料,以有效地在所述第一开口内提供内部侧壁间隔物; e)在所述第二开口内提供栅极电介质层; f)在所述第一层上提供导电栅极材料层,并且在所述栅极介电层上方的所述第二开口内提供导电栅极材料层,以用导电栅极材料填充所述第二开口; g)没有掩蔽,平坦化蚀刻相对于第一层基本上选择性的导电栅极材料层,以在第二开口内限定晶体管栅极; 以及h)相对于所述晶体管栅极提供相对的源极和漏极区域。
    • 4. 发明授权
    • Transistors having controlled conductive spacers, uses of such
transistors and methods of making such transistors
    • 具有受控导电间隔物的晶体管,这种晶体管的使用以及制造这种晶体管的方法
    • US6005273A
    • 1999-12-21
    • US987819
    • 1997-12-10
    • Fernando GonzalezDavid Kao
    • Fernando GonzalezDavid Kao
    • H01L21/28H01L21/336H01L21/8234H01L27/088H01L27/108H01L29/49H01L29/78
    • H01L29/66484H01L21/28132H01L21/823468H01L27/088H01L27/108H01L29/4983H01L29/7831H01L21/28114
    • A transistor structure includes an insulated conductive gate spacer or a conductive layer under a nonconductive spacer, together forming a composite spacer, which contacted and driven separately from the conventional gate of the transistor. The gate spacer, conductive layer of a composite spacer or a portion or portions thereof serve as a control or controls for the transistors taking the form of a second gate or second and third gates for the transistors. The transistors may be used throughout an integrated circuit or it may be preferred to use the improved transistor only in critical speed paths of an integrated circuit. Delays within circuits including the improved transistors are reduced since the drain voltage can be higher than VCC and the BVDSS and subthreshold voltage are substantially higher than standard LDD transistors. When the improved transistors are used selectively within an integrated circuit, the remaining devices can be structured as standard LDD transistors, using the gate spacers in a conventional manner, and/or as conventional transistors.
    • 晶体管结构包括绝缘导电栅极间隔物或非导电间隔物下的导电层,一起形成与晶体管的常规栅极分开接触和驱动的复合间隔物。 复合间隔物的栅极间隔物,导电层或其部分或部分用作晶体管的控制或控制,晶体管采取晶体管的第二栅极或第二和第三栅极的形式。 晶体管可以在整个集成电路中使用,或者优选仅在集成电路的临界速度路径中使用改进的晶体管。 包括改进的晶体管在内的电路中的延迟减小,因为漏极电压可以高于VCC,并且BVDSS和亚阈值电压显着高于标准LDD晶体管。 当改进的晶体管被​​选择性地用于集成电路内时,其余的器件可以被构造为使用常规方式的栅极间隔物和/或常规晶体管的标准LDD晶体管。
    • 5. 发明申请
    • Selectively configurable circuit board
    • 可选配置的电路板
    • US20050258535A1
    • 2005-11-24
    • US11190350
    • 2005-07-26
    • Tongbi JiangDavid Kao
    • Tongbi JiangDavid Kao
    • H01L23/34H05K1/00H05K1/09
    • H05K1/0293H01L2924/0002H05K1/029H05K1/095H05K2201/0129H05K2201/0305H05K2201/10689H05K2203/107H05K2203/1105H05K2203/173H01L2924/00
    • Embodiments of the invention provide thermally actuatable switches and selectively configurable circuit boards which may employ such switches. A circuit board of one embodiment includes a substrate having board leads and a plurality of electrical connectors arranged adjacent a component site. Selectively configurable circuitry may be carried by the substrate and adapted to selectively couple selected ones of the electrical connectors to selected ones of the board leads. One or more trace may be associated with each of the electrical connectors and one or more of these traces may include a thermally actuatable switch that can be selectively closed. The thermally actuatable switch may comprise a gap between two conductive lengths of the conductive trace, an exposed switch surface, and a thermally responsive member that may wet the exposed switch surface when selectively heated above an activation temperature.
    • 本发明的实施例提供可热致动的开关和可以采用这种开关的选择性可配置的电路板。 一个实施例的电路板包括具有板引线和布置在部件部位附近的多个电连接器的基板。 可选配置的电路可以由衬底承载,并且适于选择性地将选定的电连接器耦合到选定的电路板引线。 一个或多个迹线可以与每个电连接器相关联,并且这些迹线中的一个或多个迹线可以包括可以选择性地闭合的热致动开关。 热致动开关可以包括在导电迹线的两个导电长度,暴露的开关表面和热响应部件之间的间隙,当选择性地加热到高于激活温度时,该热响应部件可以润湿暴露的开关表面。
    • 7. 发明授权
    • Non-volatile memory device with tunnel oxide
    • US06580640B2
    • 2003-06-17
    • US09801239
    • 2001-03-07
    • David Kao
    • David Kao
    • G11C1604
    • G11C16/3418
    • A method and apparatus invention that relates to the reduction of leakage current through a tunnel oxide layer of a memory cell to improve data retention. One method of operating a non-volatile memory cell comprises placing electrons on a floating gate of the memory cell and then placing positive charge on a control gate of the memory cell to improve data retention. The positive charge causes the electrons on the floating gate to migrate away from a tunnel oxide layer of the memory cell. In one embodiment, a Flash memory device comprises a memory array of multiple memory cells. Each memory cell comprises a control gate, a floating gate, an inter-gate dielectric layer positioned between the control gate and the floating gate, a substrate, and a tunnel oxide layer positioned between the floating gate and the substrate. Control circuitry is used to control memory operations and couple a positive charge to the control gate of the memory cell to attract electrons on the floating gate of the memory cell away from the tunnel oxide layer of the memory cell.
    • 9. 发明授权
    • On-die system and method for controlling termination impedance of memory device data bus terminals
    • 用于控制存储器件数据总线端子的终端阻抗的片上系统和方法
    • US07646213B2
    • 2010-01-12
    • US11804176
    • 2007-05-16
    • David Kao
    • David Kao
    • H03K19/003
    • H03K19/017545H04L25/0278H04L25/028
    • A system for controlling the termination impedance of memory device data bus terminals is fabricated on the same die as the memory device. The system includes a termination resistor connected to each data bus terminal, which is connected in parallel with several transistors that are selectively turned on to adjust the termination impedance. The transistors are controlled by a circuit that determines the resistance of the termination resistor and turns on the correct number of transistor to properly set the termination impedance. In one example, the resistance of the termination resistor is determined by directly measuring a resistor of the same type as the termination resistor. In another example, the resistance of the termination resistor is determined indirectly by measuring parameters that affect the resistance of the termination resistor. In either case, the system can maintain the termination impedance of the data bus terminals constant despite changes in the termination resistor.
    • 用于控制存储器件数据总线端子的端接阻抗的系统在与存储器件相同的芯片上制造。 该系统包括连接到每个数据总线端子的终端电阻器,其与选择性地导通的几个晶体管并联连接以调整终端阻抗。 晶体管由确定终端电阻的电阻的电路控制,并打开正确数量的晶体管以正确设置端接阻抗。 在一个示例中,终端电阻器的电阻通过直接测量与终端电阻器相同类型的电阻器来确定。 在另一个例子中,通过测量影响终端电阻电阻的参数间接确定终端电阻的电阻。 在任一种情况下,尽管端接电阻器发生变化,系统仍能保持数据总线端子的终端阻抗恒定。