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    • 1. 发明申请
    • CONVEYANCE SYSTEM INCLUDING OPPOSED FLUID DISTRIBUTION MANIFOLDS
    • 包括流体分配管理的输送系统
    • US20110097491A1
    • 2011-04-28
    • US12606234
    • 2009-10-27
    • David H. LevyRoger S. KerrTodd M. Spath
    • David H. LevyRoger S. KerrTodd M. Spath
    • C23C16/00B65G53/40
    • C23C16/54C23C16/45551C23C16/45565C23C16/45574C23C16/45589C23C16/545
    • A fluid conveyance system for thin film material deposition includes a first fluid distribution manifold and a second distribution manifold. The first fluid distribution manifold includes an output face that includes a plurality of elongated slots. The plurality of elongated slots includes a source slot and an exhaust slot. The second fluid distribution manifold includes an output face that includes a plurality of openings. The plurality of openings include a source opening and an exhaust opening. The second fluid distribution manifold is positioned spaced apart from and opposite the first fluid distribution manifold such that the source opening of the output face of the second fluid distribution manifold mirrors the source slot of the output face of the first fluid distribution manifold and the exhaust opening of the output face of the second fluid distribution manifold mirrors the exhaust slot of the output face of the first fluid distribution manifold.
    • 用于薄膜材料沉积的流体输送系统包括第一流体分配歧管和第二分配歧管。 第一流体分配歧管包括包括多个细长槽的输出面。 多个细长槽包括源槽和排气槽。 第二流体分配歧管包括包括多个开口的输出面。 多个开口包括源开口和排气口。 第二流体分配歧管与第一流体分配歧管间隔开并相对设置,使得第二流体分配歧管的输出面的源开口反映第一流体分配歧管的输出面的源槽和排气口 所述第二流体分配歧管的输出面与第一流体分配歧管的输出面的排气槽反映。