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1. 发明授权

US4733631A Apparatus for coating substrate devices 失效
标题翻译：用于涂覆基底装置的装置
公开(公告)号：US4733631A
公开(公告)日：1988-03-29
申请号：US913714
申请日：1986-09-30
申请人： David Boyarsky , Robert T. Vaughan
发明人： David Boyarsky , Robert T. Vaughan
IPC分类号： C23C14/56 , G11B7/26 , C23C16/00
CPC分类号： C23C14/566
摘要： The present apparatus has a movable table with apertures therein. In each aperture there is loaded a carrier device and each carrier holds a substrate to be coated. The carriers are advanced in a step-like fashion to a loading position under a vertical hollow cylinder. When a carrier is in the loading position, a piston is moved upward, passing through the aperture, pushing the carrier into the hollow cylinder. Each carrier has an O-ring on its periphery and the O-ring is squeezed against the cylinder wall to form a seal. Each carrier pushes against the one above it to advance a column of carriers upward in the hollow cylinder. In this way, the carriers, and the substrates they hold, pass through the hollow cylinder. Along the cylinder there are vacuum stations which act to pump down and degas the substrates. The degassed substrates eventually emerge from the upper end of the cylinder into a vacuum chamber, whereat they are coated by sputtering, or the like. The vacuum level in the coating chamber is not as low as the vacuum level at the vacuum stations along the cylinder. Accordingly, gasses in the coating chamber tend to try to escape into the vertical cylinder but are stopped by the O-ring seals on the carriers. Hence the coating chamber is not contaminated. The substrates are transmitted through the coating chamber, coated, and withdrawn therefrom through a second hollow cylinder.
摘要翻译：本装置具有在其中具有孔的活动台。在每个孔中装载载体装置，并且每个载体保持待涂覆的基底。载体以阶梯状方式前进到竖直中空圆筒下的装载位置。当载体处于装载位置时，活塞向上移动，穿过孔，将载体推入中空圆柱体。每个载体在其周边上具有O形环，并且O形环被压靠在气缸壁上以形成密封。每个载体推动其上方的一个以在空心圆柱体中向上推动一列载体。以这种方式，载体及其保持的基底通过中空圆筒。沿着气缸，有一些真空站用于泵送和脱气基板。脱气的基底最终从圆柱体的上端出现到真空室中，在其中它们通过溅射等涂覆。涂层室中的真空度不如沿着气缸的真空站的真空水平那么低。因此，涂覆室中的气体倾向于试图逃逸到垂直圆柱体中，而是由载体上的O形环密封件阻止。因此，涂层室不被污染。基板通过涂覆室传播，涂覆并通过第二中空圆柱体从中取出。

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