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    • 3. 发明授权
    • Method of fabricating high aspect ratio metal structures
    • 制造高纵横比金属结构的方法
    • US08034719B1
    • 2011-10-11
    • US11311584
    • 2005-12-08
    • Daniel L. JeanMichael DeedsAllen Keeney
    • Daniel L. JeanMichael DeedsAllen Keeney
    • H01L21/302
    • B81C1/00619B81B2203/0361B81B2207/056B81C2201/0188H01L21/76885
    • To fabricate high aspect ratio metal structures, a two-layer structure is provided on a conductive layer. The two-layer structure includes a first layer adjacent the conductive layer and a second layer adjacent the first layer where the second layer is etchable by a Deep Reactive Ion Etching (DRIE) process. Using the DRIE process, at least one selected region of the second layer is completely etched away with the selected region being at least partially aligned with a region of the conductive layer such that the first layer is then exposed thereover. The first layer so-exposed is then removed to expose the region of the conductive layer thereunder. Metal is electroplated onto the exposed conductive layer and any remaining portions of the two-layer structure are then removed.
    • 为了制造高纵横比金属结构,在导电层上提供两层结构。 两层结构包括邻近导电层的第一层和邻近第一层的第二层,其中第二层可通过深度反应离子蚀刻(DRIE)工艺进行蚀刻。 使用DRIE工艺,第二层的至少一个选定区域被完全蚀刻掉,所选择的区域至少部分地与导电层的区域对准,使得第一层然后暴露在其中。 然后去除暴露的第一层以暴露其下面的导电层的区域。 将金属电镀在暴露的导电层上,然后除去两层结构的任何剩余部分。
    • 4. 发明授权
    • MEMS resettable timer
    • MEMS复位定时器
    • US07398734B1
    • 2008-07-15
    • US11374482
    • 2006-03-09
    • Daniel L. Jean
    • Daniel L. Jean
    • F42C15/24
    • F42C15/24
    • A MEMS resettable timer including a primary inertial element and at least one secondary inertial element, which includes a camming surface. When the secondary inertial element moves, its camming surface engages the camming surface of a locking element to remove it from the notch of a subsequent inertial element. When the primary inertial element is released for movement it activates a resetting arrangement to place the secondary inertial element back to the initial position and prevent further movement of the primary inertial element. The cycle is repeatable to commence some predetermined action.
    • 一种MEMS可复位定时器,包括主惯性元件和至少一个辅助惯性元件,其包括凸轮表面。 当二次惯性元件移动时,其凸轮表面接合锁定元件的凸轮表面以将其从随后的惯性元件的凹口移除。 当主惯性元件被释放以便移动时,其启动复位装置以将次惯性元件放回到初始位置并防止主惯性元件的进一步移动。 循环是可重复的,以开始一些预定的动作。
    • 5. 发明授权
    • MEMS linear thermoelectric motor apparatus
    • MEMS线性热电电机装置
    • US07567011B1
    • 2009-07-28
    • US11701208
    • 2007-02-01
    • Daniel L. JeanEzra Chen
    • Daniel L. JeanEzra Chen
    • H02N10/00
    • H01L35/00F03G7/06
    • A thermoelectric actuator moves in a first direction and an opposite direction upon the application and removal of a current. An actuator means is driven by the thermoelectric actuator and includes a set of drive teeth. The drive teeth engage with a first set of teeth on a slider member to move it to a desired position. A spring biases the slider back to an initial position. A keeper arrangement, having teeth that engage a second set of teeth on the slider, maintains the slider in its advanced position and prevents it from going back to its initial position.
    • 在施加和去除电流时,热电致动器在第一方向和相反方向上移动。 致动器装置由热电致动器驱动并且包括一组驱动齿。 驱动齿与滑块构件上的第一组齿接合以将其移动到期望的位置。 弹簧将滑块偏置回初始位置。 具有啮合滑块上的第二组齿的齿的保持器装置将滑块保持在其前进位置并防止其回到其初始位置。