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    • 8. 发明申请
    • Method of photomask correction and its optimization using localized frequency analysis
    • 光掩模校正方法及其使用局部频率分析的优化
    • US20050076321A1
    • 2005-04-07
    • US10348031
    • 2003-01-21
    • Bruce Smith
    • Bruce Smith
    • G03F1/14G06F17/50
    • G03F1/36
    • A method of contact level assist feature OPC layout is described using frequency model-based approach. Through low-pass spatial frequency filtering of a contact mask function, the local influence of zero diffraction energy can be determined. By determining isofocal intensity threshold requirements of an imaging process, a contact mask equalizing function can be designed. This provides the basis for frequency model-based contact assist feature layout. By choosing contact assist feature parameters that meet the requirements of the equalizing function, through-pitch focus and dose matching is possible for large two dimensional contact mask fields. The concepts introduced also lead to additional contact assist feature options and design flexibility.
    • 使用基于频率模型的方法描述了接触电平辅助功能OPC布局的方法。 通过接触掩模功能的低通空间频率滤波,可以确定零衍射能的局部影响。 通过确定成像过程的等效强度阈值要求,可以设计接触掩模均衡功能。 这为基于频率模型的接触辅助功能布局提供了基础。 通过选择满足均衡功能要求的接触辅助功能参数,可以对大二维接触掩模场进行贯穿间距焦点和剂量匹配。 引入的概念还可以提供额外的联系人辅助功能选项和设计灵活性。
    • 9. 发明申请
    • Using exceptional changes in webgraph snapshots over time for internet entity marking
    • 随着时间的推移,使用网页快照的异常更改进行互联网实体标记
    • US20070198603A1
    • 2007-08-23
    • US11350967
    • 2006-02-08
    • Konstantinos TsioutsiouliklisBruce SmithDmitri PavlovskiAlexander Arsky
    • Konstantinos TsioutsiouliklisBruce SmithDmitri PavlovskiAlexander Arsky
    • G06F17/30
    • G06F17/30864
    • Techniques are provided through which “suspicious” web pages may be identified automatically. A “suspicious” web page possesses characteristics that indicate some manipulation to artificially inflate the position of the web page within ranked search results. Web pages may be represented as nodes within a graph. Links between web pages may be represented as directed edges between the nodes. “Snapshots” of the current state of a network of interlinked web pages may be automatically generated at different times. In the time interval between snapshots, the state of the network may change. By comparing an earlier snapshot to a later snapshot, such changes can be identified. Extreme changes, which are deemed to vary significantly from the normal range of expected changes, can be detected automatically. Web pages relative to which these extreme changes have occurred may be marked as suspicious web pages which may merit further investigation or action.
    • 提供了可以自动识别“可疑”网页的技术。 “可疑”网页具有指示一些操纵以在排名搜索结果内人为地膨胀网页位置的特征。 网页可以表示为图中的节点。 网页之间的链接可以表示为节点之间的有向边。 互联网页网络当前状态的“快照”可能会在不同时间自动生成。 在快照之间的时间间隔内,网络的状态可能会改变。 通过将较早的快照与稍后的快照进行比较,可以识别这些更改。 可以自动检测到与预期变化的正常范围有显着差异的极端变化。 发生这些极端变化的网页可能被标记为可疑的网页,这可能值得进一步调查或采取行动。
    • 10. 发明申请
    • Reduction Smith-Talbot interferometer prism for micropatterning
    • 用于微图案的Smith-Talbot干涉仪棱镜
    • US20050057735A1
    • 2005-03-17
    • US10898677
    • 2004-07-23
    • Bruce Smith
    • Bruce Smith
    • G03B27/52G03F7/20G06T20060101
    • G03F7/70233G03F7/70341G03F7/70408
    • Reduction Talbot interference imaging is carried out using a glass or fused silica prism, where at least two surfaces within the prism allow for an increase in the propagating ray angles at the image plane compared to the object (the photomask) plane. Furthermore, by adding a second orthogonal pair of surfaces, X and Y order recombination is made possible thus allowing for the imaging in an orthogonal direction with a two-order interference scheme as well as repeating checkerboard (island and hole) patterns with a four-order interference scheme. A benefit of the invention is the reduced requirements of the photo mask, allowing for diffraction limited imaging with UV wavelengths in a media with index of unity (air) or larger (an immersion fluid). The prism interferometer is known as a Smith-Talbot prism lens.
    • 还原Talbot干涉成像使用玻璃或熔融石英棱镜进行,其中棱镜内的至少两个表面允许在与物体(光掩模)平面相比在像面上传播的光线角度增加。 此外,通过添加第二正交对表面,可以实现X和Y阶复合,从而允许利用二阶干涉方案在正交方向上的成像,以及重复棋盘(岛和孔)图案, 订单干扰方案。 本发明的优点在于减少了光掩模的要求,允许在具有一维(空气)或更大的指数(浸液)的介质中的UV波长的衍射限制成像。 棱镜干涉仪被称为史密斯 - 塔尔博特棱镜。