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    • 5. 发明授权
    • MEMS-actuated color light modulator and methods
    • MEMS致动彩色光调制器及方法
    • US06825969B2
    • 2004-11-30
    • US10800326
    • 2004-03-11
    • Zhizhang ChenMichael A. PateHung Liao
    • Zhizhang ChenMichael A. PateHung Liao
    • G02B2600
    • G02B26/0866G02B26/0808G02B26/0833G02B26/0841
    • A light modulator has one or more gratings and one or more MEMS actuators operable to move the gratings for selectively modulating light from an input light source. Certain embodiments have a plurality of blazed gratings arranged parallel to a plane and movable linearly parallel to the plane by MEMS actuators. Each of the gratings is individually blazed for light of a selected color such as red, green or blue. Associated with the gratings may be portions providing black and/or white outputs. An aperture spaced apart from the plane allows color(s) selected from an input white-light source to be directed to an output. An array of MEMS-actuated modulation devices provides a color spatial light modulator. Other embodiments have a grating adapted to be tilted by a MEMS actuator, either continuously through a range of angles or to a selected angle of a set of predetermined discrete angles, to direct selected wavelengths diffracted by the grating toward collection optics for a modulated light output. Methods specially adapted for making and using such light modulators are disclosed.
    • 光调制器具有一个或多个光栅和一个或多个MEMS致动器,其可操作以移动光栅以选择性地调制来自输入光源的光。 某些实施例具有多个平行于平面布置的闪耀的光栅,并且可通过MEMS致动器线性平行于该平面移动。 每个光栅被单独地闪耀成所选颜色的光,例如红色,绿色或蓝色。 与光栅相关的可以是提供黑色和/或白色输出的部分。 与平面间隔开的孔允许从输入白光源选择的颜色被引导到输出。 MEMS致动调制装置的阵列提供了一种彩色空间光调制器。 其他实施例具有适于由MEMS致动器倾斜的光栅,连续地通过一定范围的角度或一组预定离散角度的选定角度,以将由光栅衍射的所选波长引导到用于调制光输出的收集光学器件 。 公开了专门用于制造和使用这种光调制器的方法。