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    • 7. 发明授权
    • Doping profiles in PN diode optical modulators
    • PN二极管光调制器中的掺杂谱
    • US07085443B1
    • 2006-08-01
    • US10916857
    • 2004-08-11
    • Lawrence C. Gunn, IIIRoger KoumansBing LiGuo Liang LiThierry J. Pinguet
    • Lawrence C. Gunn, IIIRoger KoumansBing LiGuo Liang LiThierry J. Pinguet
    • G02F1/035G02B6/12
    • G02F1/025G02F2202/06G02F2202/105
    • High speed optical modulators can be made of a lateral PN diode formed in a silicon optical waveguide, disposed on a SOI or other silicon based substrate. A PN junction is formed at the boundary of the P and N doped regions. The depletion region at the PN junction overlaps with the center of a guided optical mode propagating through the waveguide. Electrically modulating a lateral PN diode causes a phase shift in an optical wave propagating through the waveguide. Each of the doped regions can have a stepped or gradient doping profile within it or several doped sections with different doping concentrations. Forming the doped regions of a PN diode modulator with stepped or gradient doping profiles can optimize the trade off between the series resistance of the PN diode and the optical loss in the center of the waveguide due to the presence of dopants.
    • 高速光学调制器可以由形成在硅光波导中的横向PN二极管制成,设置在SOI或其它硅基衬底上。 在P和N掺杂区域的边界处形成PN结。 PN结的耗尽区与通过波导传播的引导光模的中心重叠。 横向PN二极管的电学调制引起在波导中传播的光波的相移。 每个掺杂区域可以在其内具有阶梯式或梯度掺杂分布,或者具有不同掺杂浓度的多个掺杂区。 形成具有阶梯式或梯度掺杂分布的PN二极管调制器的掺杂区域可以优化PN二极管的串联电阻与由于掺杂剂的存在引起的波导中心的光损耗之间的折衷。
    • 8. 发明授权
    • Doping profiles in PN diode optical modulators
    • PN二极管光调制器中的掺杂谱
    • US07251408B1
    • 2007-07-31
    • US11400163
    • 2006-04-05
    • Lawrence C. Gunn, IIIRoger KoumansBing LiGuo Liang LiThierry J. Pinguet
    • Lawrence C. Gunn, IIIRoger KoumansBing LiGuo Liang LiThierry J. Pinguet
    • G02B6/10G02B6/26G02F1/035
    • G02F1/025G02F2202/06G02F2202/105
    • High speed optical modulators can be made of a lateral PN diode formed in a silicon optical rib waveguide, disposed on a SOI or other silicon based substrate. A PN junction is formed at the boundary of the P and N doped regions. The depletion region at the PN junction overlaps with the center of a guided optical mode propagating through the waveguide. Electrically modulating a lateral PN diode causes a phase shift in an optical wave propagating through the waveguide. Each of the doped regions can have a stepped or gradient doping profile within it or several doped sections with different doping concentrations. Forming the doped regions of a PN diode modulator with stepped or gradient doping profiles can optimize the trade off between the series resistance of the PN diode and the optical loss in the center of the waveguide due to the presence of dopants.
    • 高速光学调制器可以由形成在硅光波导中的横向PN二极管制成,设置在SOI或其它硅基衬底上。 在P和N掺杂区域的边界处形成PN结。 PN结的耗尽区与通过波导传播的引导光模的中心重叠。 横向PN二极管的电学调制引起在波导中传播的光波的相移。 每个掺杂区域可以在其内具有阶梯式或梯度掺杂分布,或者具有不同掺杂浓度的多个掺杂区。 形成具有阶梯式或梯度掺杂分布的PN二极管调制器的掺杂区域可以优化PN二极管的串联电阻与由于掺杂剂的存在引起的波导中心的光损耗之间的折衷。