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    • 3. 发明申请
    • Capacitively coupled plasma reactor with magnetic plasma control
    • 具有磁等离子体控制的电容耦合等离子体反应器
    • US20050001556A1
    • 2005-01-06
    • US10841116
    • 2004-05-07
    • Daniel HoffmanMatthew MillerJang YangHeeyeop ChaeMichael BarnesTetsuya IshikawaYan Ye
    • Daniel HoffmanMatthew MillerJang YangHeeyeop ChaeMichael BarnesTetsuya IshikawaYan Ye
    • H01J37/32H01J7/24
    • H01J37/32091H01J37/3244H01J37/32623H01J37/3266
    • A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.
    • 等离子体反应器包括真空外壳,其包括限定真空室的侧壁和顶板,以及腔室内的工件支撑件,并面向天花板以支撑平面工件,工件支撑件和天花板一起限定了工件之间的加工区域 支持和天花板。 工艺气体入口将工艺气体提供到腔室中。 等离子体源功率电极连接到RF功率发生器,用于将等离子体源功率电容耦合到腔室中,以在腔室内维持等离子体。 反应器还包括至少第一架空螺线管电磁体,靠近天花板,架空螺线管电磁体,天花板,侧壁和工件支撑件沿着共同的对称轴线定位。 电流源连接到第一螺线管电磁体并且在第一螺线管电磁体中提供第一电流,从而在腔室内产生与第一电流有关的磁场,第一电流具有使得 磁场增加等离子体离子密度在工件支撑表面附近的对称轴的径向分布的均匀性。
    • 4. 发明申请
    • Capacitively coupled plasma reactor with magnetic plasma control
    • 具有磁等离子体控制的电容耦合等离子体反应器
    • US20060157201A1
    • 2006-07-20
    • US11360944
    • 2006-02-23
    • Daniel HoffmanMatthew MillerJang YangHeeyeop ChaeMichael BarnesTetsuya IshikawaYan Ye
    • Daniel HoffmanMatthew MillerJang YangHeeyeop ChaeMichael BarnesTetsuya IshikawaYan Ye
    • C23F1/00
    • H01J37/32091H01J37/3244H01J37/32623H01J37/3266
    • A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.
    • 等离子体反应器包括真空外壳,其包括限定真空室的侧壁和顶板,以及腔室内的工件支撑件,并面向天花板以支撑平面工件,工件支撑件和天花板一起限定了工件之间的加工区域 支持和天花板。 工艺气体入口将工艺气体提供到腔室中。 等离子体源功率电极连接到RF功率发生器,用于将等离子体源功率电容耦合到腔室中,以在腔室内维持等离子体。 反应器还包括至少第一架空螺线管电磁体,靠近天花板,架空螺线管电磁体,天花板,侧壁和工件支撑件沿着共同的对称轴线定位。 电流源连接到第一螺线管电磁体并且在第一螺线管电磁体中提供第一电流,从而在腔室内产生与第一电流有关的磁场,第一电流具有使得 磁场增加等离子体离子密度在工件支撑表面附近的对称轴的径向分布的均匀性。
    • 8. 发明申请
    • Topic and Time Based Media Affinity Estimation
    • 主题和基于时间的媒体亲和度估计
    • US20130018896A1
    • 2013-01-17
    • US13548901
    • 2012-07-13
    • Michael Ben FleischmanDeb Kumar RoyJeremy RishelAnjali MidhaMatthew Miller
    • Michael Ben FleischmanDeb Kumar RoyJeremy RishelAnjali MidhaMatthew Miller
    • G06F17/30
    • G06F17/30017G06F17/30029G06F17/30528G06Q30/0278G06Q50/01
    • An affinity server estimates an affinity between two different time based media events (e.g., TV, radio, social media content stream), between a time based media event and a specific topic, or between two different topics, where the affinity score represents an intersection between the populations of social media users who have authored social media content items regarding the two different events and/or topics. The affinity score represents an estimation of the real world affinity between the real world population of people who have an interest in both time based media events, both topics, or in a time based media event and a topic. One possible threshold for including a social media user in a population may be based on a confidence score that indicates the confidence that one or more social media content items authored by the social media user are relevant to the topic or event in question.
    • 亲和度服务器估计在基于时间的媒体事件和特定话题之间的两个不同的基于时间的媒体事件(例如,TV,无线电,社交媒体内容流)之间或两个不同主题之间的亲和度,其中亲和度分数表示交集 在两个不同的事件和/或主题之间创作社交媒体内容的社交媒体用户之间。 亲和度分数表示对现实世界中有时间的媒体事件,两个主题或基于时间的媒体事件和主题感兴趣的人之间的真实世界关系的估计。 将社交媒体用户包括在群体中的一个可能的阈值可以基于置信度得分,该置信度得分指示由社交媒体用户创作的一个或多个社交媒体内容项目与所讨论的主题或事件相关的置信度。
    • 9. 发明授权
    • Reconfigurable interface operable with multiple types of sensors and actuators
    • 可重构接口可与多种类型的传感器和执行器一起使用
    • US08149102B1
    • 2012-04-03
    • US12410746
    • 2009-03-25
    • Matthew MillerAlan S. Broad
    • Matthew MillerAlan S. Broad
    • G08B29/00
    • H04W4/38Y02D70/00
    • An interface is provided that configures itself dynamically based on sensor information received from a sensor assembly or actuator information received from an actuator assembly. The interface may be configured to interoperate with sensor assemblies including analog transducers, smart transducers providing digital outputs and various actuators. The sensor information or the actuator information may include information for managing power consumption associated with the operation of the sensor or the actuator. Using the sensor information or the actuator information, a power management scheme may be implemented to reduce power consumption and extend the operational time of a module. The sensor information also includes information about the sensor signal generated by the sensor. The information about the sensor signal allows the module to interoperate with more diverse types of sensors.
    • 提供了一种接口,其基于从传感器组件接收的传感器信息或从致动器组件接收的致动器信息动态地配置自身。 接口可以被配置为与传感器组件互操作,包括模拟换能器,提供数字输出的智能换能器和各种致动器。 传感器信息或致动器信息可以包括用于管理与传感器或致动器的操作相关联的功率消耗的信息。 使用传感器信息或致动器信息,可实施功率管理方案以降低功耗并延长模块的操作时间。 传感器信息还包括关于由传感器产生的传感器信号的信息。 关于传感器信号的信息允许模块与更多种类型的传感器进行互操作。