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    • 2. 发明授权
    • Method for purifying fluoride etching solution by using hydroxide compound and ion exchange resin absorption
    • 通过使用氢氧化物化合物和离子交换树脂吸收来净化氟化物蚀刻溶液的方法
    • US08721918B2
    • 2014-05-13
    • US13102549
    • 2011-05-06
    • Curtis Douglas DoveKehchyn Ho
    • Curtis Douglas DoveKehchyn Ho
    • C09K13/00
    • C09K13/00
    • A method for purifying fluoride etching solution is provided. The method begins with a reaction by hydroxide gas or solution to achieve a balance pH condition for the fluoride etching solution. Subsequently, the treated etching solution can be fed by constant velocity pump to a basic anion exchange resin column(s). The basic anion exchange resins remove various contaminants resulting in a saleable product to a wide range of industrial applications. The final solution is collected in a finished product storage tank. The degree of purification by basic anion exchange resin can be verified, if needed at all, thereby making ammonium fluoride (AF), ammonium bifluoride (ABF), anhydrous hydrogen fluoride (AHF) and fluoride mixture to meet the application of industries or different market's application. Further, the ion exchange resins can be regenerated as needed to extend the useful life and system capacity.
    • 提供氟化物蚀刻液的净化方法。 该方法开始于通过氢氧化物气体或溶液的反应以实现氟化物蚀刻溶液的平衡pH条件。 随后,经处理的蚀刻溶液可以通过恒速泵送入碱性阴离子交换树脂柱。 碱性阴离子交换树脂除去各种污染物,导致可广泛应用的产品。 最终的溶液被收集在成品储罐中。 如果需要,可以验证碱性阴离子交换树脂的纯化度,从而使氟化铵(AF),氟化铵(ABF),无水氟化氢(AHF)和氟化物混合物满足工业或不同市场的应用 应用。 此外,离子交换树脂可以根据需要再生,以延长使用寿命和系统容量。