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1. 发明授权

US06450619B1 CMOS/MEMS integrated ink jet print head with heater elements formed during CMOS processing and method of forming same 有权
公开(公告)号：US06450619B1
公开(公告)日：2002-09-17
申请号：US09792188
申请日：2001-02-22
申请人： Constantine N. Anagnostopoulos , John A. Lebens , Gilbert A. Hawkins , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
发明人： Constantine N. Anagnostopoulos , John A. Lebens , Gilbert A. Hawkins , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
IPC分类号： B41S205
CPC分类号： B41J2/02 , B41J2/03 , B41J2002/032 , B41J2202/13 , B41J2202/16
摘要： A continuous ink jet print head is formed of a silicon substrate that includes integrated circuits formed therein for controlling operation of the print head. An insulating layer or layers overlies the silicon substrate and has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening is formed in a recess in the insulating layer or layers by a material depletion process such as etching. The process of etching defines the nozzle openings at locations where heater elements are formed in the insulating layer or layers during a conventional CMOS processing of the integrated circuits. The print head structure thereby provides for minimal post processing of the print head after the completion of the CMOS processing.

2. 发明授权

US06491376B2 Continuous ink jet printhead with thin membrane nozzle plate 失效
标题翻译：连续喷墨打印头带薄膜喷嘴板
公开(公告)号：US06491376B2
公开(公告)日：2002-12-10
申请号：US09862953
申请日：2001-05-22
申请人： David P. Trauernicht , Constantine N. Anagnostopoulos , James M. Chwalek , Christopher N. Delametter , Gilbert A. Hawkins , John A. Lebens
发明人： David P. Trauernicht , Constantine N. Anagnostopoulos , James M. Chwalek , Christopher N. Delametter , Gilbert A. Hawkins , John A. Lebens
IPC分类号： B41J214
CPC分类号： B41J2/03 , B41J2/105 , B41J2002/032 , B41J2202/13 , B41J2202/16 , B41J2202/22
摘要： A continuous ink jet printhead has a nozzle bore formed from a thin membrane that comprises an overhang from a relief portion of the substrate. The thin membrane of thickness t overhangs a relief portion of the substrate with a dimension OH. The nozzle bore has a respective diameter dimension D. The dimensions are characterized in that OH>=½ D; and wherein t
摘要翻译：连续的喷墨打印头具有由薄膜形成的喷嘴孔，该薄膜包括从基板的浮雕部分伸出的突出部。厚度为薄的薄膜以尺寸OH突出到衬底的浮雕部分。喷嘴孔具有相应的直径尺寸D.尺寸的特征在于OH> =½D; 并且其中t <= 0.33D。

3. 发明授权

US06474794B1 Incorporation of silicon bridges in the ink channels of CMOS/MEMS integrated ink jet print head and method of forming same 有权
标题翻译：在CMOS / MEMS集成喷墨打印头的墨水通道中并入硅桥及其形成方法
公开(公告)号：US06474794B1
公开(公告)日：2002-11-05
申请号：US09751726
申请日：2000-12-29
申请人： Constantine N. Anagnostopoulos , Gilbert A. Hawkins , John A. Lebens , James M. Chwalek
发明人： Constantine N. Anagnostopoulos , Gilbert A. Hawkins , John A. Lebens , James M. Chwalek
IPC分类号： B41J202
CPC分类号： B41J2/03 , B41J2002/032 , B41J2202/13 , B41J2202/16 , B41J2202/22
摘要： An ink jet print head is formed of a silicon substrate that includes integrated circuits formed therein for controlling operation of the print head. The silicon substrate has a series of ink channels formed therein along the longitudinal direction of the nozzle array. An insulating layer or layers overlying the silicon substrate has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening communicates with a respective ink channel. A series of rib structures is formed in the silicon substrate transverse to the longitudinal direction of the nozzle array for providing strength to the final silicon ship comprising the print head.
摘要翻译：喷墨打印头由硅基板形成，该硅基板包括形成在其中的集成电路，用于控制打印头的操作。硅衬底沿着喷嘴阵列的纵向方向形成有一系列油墨通道。覆盖硅衬底的绝缘层或层沿着衬底的长度形成有一系列或一组喷嘴孔或孔，并且每个喷嘴开口与相应的油墨通道连通。在硅基板中横向于喷嘴阵列的纵向方向形成一系列肋结构，以为包括打印头的最终硅船提供强度。

4. 发明授权

US06502925B2 CMOS/MEMS integrated ink jet print head and method of operating same 失效
标题翻译： CMOS / MEMS集成喷墨打印头及其操作方法
公开(公告)号：US06502925B2
公开(公告)日：2003-01-07
申请号：US09792114
申请日：2001-02-22
申请人： Constantine N. Anagnostopoulos , John A. Lebens , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
发明人： Constantine N. Anagnostopoulos , John A. Lebens , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
IPC分类号： B41J205
CPC分类号： B41J2/03 , B41J2/105 , B41J2002/032 , B41J2202/13 , B41J2202/16 , B41J2202/22
摘要： An ink jet print head is formed of a silicon substrate that includes an integrated circuit formed therein for controlling operation of the print head. The silicon substrate has one or more ink channels formed therein along the longitudinal direction of the nozzle array. An insulating layer or layers overlie the silicon substrate and has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening communicates with an ink channel. The area comprising the nozzle openings forms a generally planar surface to facilitate maintenance of the printhead. A heater element is associated with each nozzle opening or bore for asymmetrically heating ink as ink passes through the nozzle opening or bore.
摘要翻译：喷墨打印头由硅基板形成，该硅基板包括形成在其中的集成电路，用于控制打印头的操作。硅基板沿着喷嘴阵列的纵向方向形成有一个或多个油墨通道。绝缘层或层叠在硅衬底上，并且沿着衬底的长度形成有一系列或阵列的喷嘴开口或孔，并且每个喷嘴开口与油墨通道连通。包括喷嘴开口的区域形成大致平坦的表面，以便于打印头的维护。当墨水通过喷嘴开口或孔时，加热器元件与每个喷嘴开口或孔相关联，用于不对称地加热墨。

5. 发明授权

US06943037B2 CMOS/MEMS integrated ink jet print head and method of forming same 有权
标题翻译： CMOS / MEMS集成喷墨打印头及其形成方法
公开(公告)号：US06943037B2
公开(公告)日：2005-09-13
申请号：US10242080
申请日：2002-09-12
申请人： Constantine N. Anagnostopoulos , John A. Lebens , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
发明人： Constantine N. Anagnostopoulos , John A. Lebens , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
IPC分类号： B41J2/03 , B41J2/105 , H01L21/00 , B41J2/045 , G11B5/127
CPC分类号： B41J2/03 , B41J2/105 , B41J2002/032 , B41J2202/13 , B41J2202/16 , B41J2202/22
摘要： An ink jet print head is formed of a silicon substrate that includes an integrated circuit formed therein for controlling operation of the print head. The silicon substrate has one or more ink channels formed therein along the longitudinal direction of the noble array. An insulating layer or layers overlie the silicon substrate and has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening communicates with an ink channel. The area comprising the nozzle openings forms a generally planar surface to facilitate maintenance of the printhead. A heater element is associated with each nozzle opening or bore for asymmetrically heating ink as ink passes through the nozzle opening or bore.
摘要翻译：喷墨打印头由硅基板形成，该硅基板包括形成在其中的集成电路，用于控制打印头的操作。硅衬底沿着贵族阵列的纵向方向形成有一个或多个墨通道。绝缘层或层叠在硅衬底上，并且沿着衬底的长度形成有一系列或阵列的喷嘴开口或孔，并且每个喷嘴开口与油墨通道连通。包括喷嘴开口的区域形成大致平坦的表面，以便于打印头的维护。当墨水通过喷嘴开口或孔时，加热器元件与每个喷嘴开口或孔相关联，用于不对称地加热墨。

6. 发明授权

US6065825A Printer having mechanically-assisted ink droplet separation and method of using same 失效
标题翻译：具有机械辅助墨滴分离的打印机及其使用方法
公开(公告)号：US6065825A
公开(公告)日：2000-05-23
申请号：US969299
申请日：1997-11-13
申请人： Constantine N. Anagnostopoulos , James M. Chwalek , John A. Lebens , Christopher N. Delametter , Walter S. Stevens
发明人： Constantine N. Anagnostopoulos , James M. Chwalek , John A. Lebens , Christopher N. Delametter , Walter S. Stevens
IPC分类号： B41J2/005 , B41J2/14 , G01D15/18
CPC分类号： B41J2/14451 , B41J2002/0055 , B41J2202/02
摘要： A printer having mechanically-assisted ink droplet separation and method of using same, for separating an ink meniscus from an ink nozzle orifice while clearing-away particulate matter from about the orifice. In a preferred embodiment of the invention, a heater surrounds an orifice formed by the nozzle, the orifice having an ink meniscus residing therein. As the heater heats the ink meniscus, surface tension of the ink meniscus decreases, thereby causing the ink meniscus to extend outwardly from the orifice to define an extended ink meniscus. A cutter, which is disposed near the orifice, includes a plate member disposed opposite an outside surface of the nozzle so as to define a passage between the outside surface and the plate member. The plate member has an opening aligned with the orifice and in communication with the passage. A gas pressure regulator in communication with the passage supplies pressurized gas into the passage, which gas flows along the passage an through the opening. As the gas flows through the opening, it impinges the extended ink meniscus to separate the extended ink meniscus from the orifice. As the extended ink meniscus separates from the orifice, it forms an ink droplet that travels to a receiver medium, so that an ink spot is placed onto the receiver medium. Moreover, as the gas flows through the opening, the gas clears-away particulate matter from about the orifice.
摘要翻译：一种具有机械辅助墨滴分离的打印机及其使用方法，用于从墨喷嘴孔口分离墨水弯月面，同时从孔口周围清除颗粒物质。在本发明的优选实施例中，加热器围绕由喷嘴形成的孔口，孔口具有驻留在其中的墨水弯月面。当加热器加热油墨弯月面时，油墨弯月面的表面张力减小，从而使油墨弯月面从孔口向外延伸以限定延伸的油墨弯液面。设置在孔口附近的切割器包括与喷嘴的外表面相对设置的板构件，以在外表面和板构件之间限定通道。板构件具有与孔口对准并与通道连通的开口。与通道连通的气体压力调节器将加压气体供应到通道中，该气体沿着通道A流过开口。当气体流过开口时，其撞击延伸的墨水弯液面以将延伸的墨水弯液面与孔口分离。随着延伸墨水弯月面与孔口分离，它形成一个墨滴，传送到接收介质，使得墨点被放置在接收介质上。此外，当气体流过开口时，气体从孔口周围清除颗粒物质。

7. 发明授权

US06238581B1 Process for manufacturing an electro-mechanical grating device 有权
标题翻译：制造机电光栅装置的方法
公开(公告)号：US06238581B1
公开(公告)日：2001-05-29
申请号：US09216202
申请日：1998-12-18
申请人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos
发明人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos
IPC分类号： B81B300
CPC分类号： G02B5/1828 , G02B26/0808
摘要： A method for manufacturing a mechanical grating device is presented. The device consists of a plurality of parallel-suspended ribbons that are deformed using, for example, an electrostatic force to actuate alternate ribbons. Actuation is a deformation of the ribbon resulting from an applied voltage to affect the height of the ribbons above a substrate. The method for manufacturing a mechanical gating device comprises the steps of: providing a spacer layer on top of a protective layer which covers a substrate; etching a channel entirely through the spacer layer; depositing a sacrificial layer at least as thick as the spacer layer; rendering the deposited sacrificial layer optically coplanar by chemical mechanical polishing; providing a tensile ribbon layer completely covering the area of the channel; providing a conductive layer patterned in the form of a grating; transferring the conductive layer pattern to the ribbon layer and etching entirely through the ribbon layer; and removing entirely the sacrificial layer from the channel.
摘要翻译：提出了一种制造机械光栅装置的方法。该装置由多个平行悬挂的带组成，其使用例如静电力来变形以致动交替色带。致动是由施加的电压产生的带状物的变形，以影响衬底上方的带的高度。用于制造机械门控装置的方法包括以下步骤：在覆盖衬底的保护层的顶部上设置间隔层;通过间隔层整体蚀刻通道;沉积至少与间隔层一样厚的牺牲层; 通过化学机械抛光使沉积的牺牲层光学共面;提供完全覆盖通道区域的拉伸带层;提供以光栅形式图案化的导电层;将导电层图案转移到带层并完全蚀刻色带层; 并从通道中完全移除牺牲层。

8. 发明授权

US06252697B1 Mechanical grating device 有权
标题翻译：机械光栅装置
公开(公告)号：US06252697B1
公开(公告)日：2001-06-26
申请号：US09216289
申请日：1998-12-18
申请人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz
发明人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz
IPC分类号： G02B2600
CPC分类号： G02B5/1828 , G02B26/0808
摘要： A mechanical grating device for diffracting an incident light beam has a base which defines a surface. A spacer layer is provided above the base, said spacer layer defining an upper surface of said spacer layer. A longitudinal channel is formed in said spacer layer, said channel having a first and second opposing side walls and a bottom. The side walls are substantially vertically disposed with respect to the bottom, and said channel having a constant cross section along the entire length of the mechanical grating device. A plurality of spaced apart deformable ribbon elements are disposed parallel to each other and span the channel. The deformable ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel.
摘要翻译：用于衍射入射光束的机械光栅装置具有限定表面的基部。间隔层设置在基底之上，所述间隔层限定所述间隔层的上表面。在所述间隔层中形成纵向通道，所述通道具有第一和第二相对的侧壁和底部。侧壁相对于底部基本上垂直设置，并且所述通道沿着机械光栅装置的整个长度具有恒定的横截面。多个间隔开的可变形的带状元件彼此平行设置并跨越通道。可变形的带状元件固定在通道的每一侧上的隔离层的上表面。

9. 发明授权

US06233087B1 Electro-mechanical grating device 有权
标题翻译：机电光栅装置
公开(公告)号：US06233087B1
公开(公告)日：2001-05-15
申请号：US09216374
申请日：1998-12-18
申请人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz , Marek W. Kowarz
发明人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz , Marek W. Kowarz
IPC分类号： G02B2600
CPC分类号： G02B26/0808 , G02B5/1828
摘要： An electro-mechanical grating device for diffracting an incident light beam has a base which defines a surface. A spacer layer is provided above the base, said spacer layer defining an upper surface of said spacer layer. A longitudinal channel is formed in said spacer layer. A plurality of spaced apart deformable ribbon elements are disposed parallel to each other and span the channel. The deformable ribbon elements define a ribbon structure which comprises at least one layer of a single material. The ribbon elements and the electro-mechanical grating device are formed so that charge build-up in layers of the electro-mechanical grating device can be avoided during operation of the device.
摘要翻译：用于衍射入射光束的机电光栅装置具有限定表面的基部。间隔层设置在基底之上，所述间隔层限定所述间隔层的上表面。在所述间隔层中形成纵向通道。多个间隔开的可变形的带状元件彼此平行设置并跨越通道。可变形的带元件限定了包括至少一层单一材料的带状结构。形成带状元件和电 - 机械光栅装置，使得可以在器件的操作期间避免电 - 机械光栅装置的层中的电荷积聚。

10. 发明授权

US06536882B1 Inkjet printhead having substrate feedthroughs for accommodating conductors 有权
标题翻译：喷墨打印头具有用于容纳导体的基板馈通
公开(公告)号：US06536882B1
公开(公告)日：2003-03-25
申请号：US09625536
申请日：2000-07-26
申请人： Gilbert A. Hawkins , Constantine N. Anagnostopoulos , John A. Lebens
发明人： Gilbert A. Hawkins , Constantine N. Anagnostopoulos , John A. Lebens
IPC分类号： B41J2105
CPC分类号： B41J2/03 , B41J2002/032 , B41J2202/18
摘要： An inkjet printhead for printing an image on a printing medium is provided that includes a substrate having an interior and a nozzle face, a plurality of nozzles having outlets in the nozzle face, an electronically-operated droplet deflector disposed adjacent to each of the nozzle outlets, and feedthroughs for connecting the droplet deflector to power and image data circuits through the substrate interior. The feedthroughs include bores disposed through the substrate for accommodating conductors connected between the droplet deflectors and power and image data control circuits of the printer. The feedthroughs may take the form of bores either coated or filled with electrically-conductive material. The use of feedthroughs through the printhead substrate avoids the manufacture of an undesirably high density of connectors and conductors on the nozzle face and facilitates the manufacture of smooth and flat nozzle faces which are easily cleaned during the printing operation by wiping mechanisms. The power feedthroughs may be easily manufactured via MEMS bulk micromachining technology at the same time the substrate ink channels are formed.
摘要翻译：提供一种用于在打印介质上打印图像的喷墨打印头，其包括具有内部和喷嘴面的基板，在喷嘴面中具有出口的多个喷嘴，与每个喷嘴出口相邻设置的电子操作的液滴偏转器以及用于通过衬底内部将液滴偏转器连接到功率和图像数据电路的馈通。馈通包括穿过基板布置的孔，用于容纳连接在液滴偏转器和打印机的电源和图像数据控制电路之间的导体。馈通可以采用涂覆或填充有导电材料的孔的形式。使用穿过打印头基板的穿通件避免了在喷嘴面上制造不希望的高密度的连接器和导体，并且有利于制造平滑和扁平的喷嘴面，这些喷嘴面在打印操作期间通过擦拭机构容易地清洁。电源馈通可以通过MEMS体积微加工技术容易地制造，同时形成衬底油墨通道。

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