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    • 2. 发明授权
    • Chemical method for producing smooth surfaces on silicon wafers
    • 在硅晶片上生产光滑表面的化学方法
    • US06514875B1
    • 2003-02-04
    • US08846196
    • 1997-04-28
    • Conrad Yu
    • Conrad Yu
    • H01L21302
    • H01L21/02019H01L21/30608
    • An improved method for producing optically smooth surfaces in silicon wafers during wet chemical etching involves a pre-treatment rinse of the wafers before etching and a post-etching rinse. The pre-treatment with an organic solvent provides a well-wetted surface that ensures uniform mass transfer during etching, which results in optically smooth surfaces. The post-etching treatment with an acetic acid solution stops the etching instantly, preventing any uneven etching that leads to surface roughness. This method can be used to etch silicon surfaces to a depth of 200 &mgr;m or more, while the finished surfaces have a surface roughness of only 15-50 Å (RMS).
    • 在湿化学蚀刻期间,用于在硅晶片中产生光学光滑表面的改进方法包括在蚀刻之前晶片的预处理漂洗和后蚀刻冲洗。 用有机溶剂进行预处理提供了良好润湿的表面,确保在蚀刻期间均匀的质量传递,这导致光学平滑的表面。 用乙酸溶液进行后蚀刻处理可立即停止蚀刻,防止导致表面粗糙度的任何不均匀蚀刻。 该方法可用于将硅表面蚀刻到200μm或更大的深度,而成品表面的表面粗糙度仅为15-50(RMS)。
    • 8. 发明授权
    • Micro-machined thermo-conductivity detector
    • 微加工热导率检测器
    • US06502983B2
    • 2003-01-07
    • US09281610
    • 1999-03-30
    • Conrad Yu
    • Conrad Yu
    • G01N2518
    • G01N30/66G01N30/6095
    • A micro-machined thermal conductivity detector for a portable gas chromatograph. The detector is highly sensitive and has fast response time to enable detection of the small size gas samples in a portable gas chromatograph which are in the order of nanoliters. The high sensitivity and fast response time are achieved through micro-machined devices composed of a nickel wire, for example, on a silicon nitride window formed in a silicon member and about a millimeter square in size. In addition to operating as a thermal conductivity detector, the silicon nitride window with a micro-machined wire therein of the device can be utilized for a fast response heater for PCR applications.
    • 用于便携式气相色谱仪的微加工热导率检测器。 检测器是高灵敏度的并且具有快速响应时间,以便检测便携式气相色谱仪中的小尺寸气体样品,其数量为纳升级。 高灵敏度和快速的响应时间通过由例如在硅构件形成的氮化硅窗口和大约毫米正方形的镍线构成的微加工装置来实现。 除了作为导热性检测器操作之外,具有该器件的微加工线的氮化硅窗口可用于PCR应用的快速响应加热器。