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1. 发明授权

US09528895B2 Microelectromechanical and/or nanoelectromechanical differential pressure measurement sensor 有权
标题翻译：微机电和/或纳米机电差压测量传感器
公开(公告)号：US09528895B2
公开(公告)日：2016-12-27
申请号：US14661430
申请日：2015-03-18
申请人： Commissariat à l'énergie atomique et aux énergies alternatives
发明人： Philippe Robert , Bernard Diem , Guillaume Jourdan
IPC分类号： G01L9/00 , G01L13/02 , B81B3/00
CPC分类号： G01L9/0072 , B81B3/0021 , B81B2201/0264 , B81B2203/0127 , B81B2203/0154 , G01L9/001 , G01L9/0019 , G01L9/0052 , G01L9/006 , G01L9/0073 , G01L9/0086 , G01L13/025
摘要： MEMS and/or NEMS differential pressure measurement sensor comprising at least one first membrane and at least one second membrane, each suspended from a substrate, the first membrane having a face subjected to a reference pressure and a second face subjected to a first pressure to be detected, the second membrane having a first face subjected to the reference pressure and a second face subjected to a second pressure to be detected, a rigid beam of longitudinal axis articulated with respect to the substrate by a pivot link around an axis, said beam being solidly connected by a first zone to the first membrane and by a second zone to the second membrane such that the pivot link is situated between the first zone and the second zone of the beam, a sensor of measuring the movement of the beam around the axis, said sensor being arranged at least in part on the substrate.
摘要翻译： MEMS和/或NEMS差压测量传感器包括至少一个第一膜和至少一个第二膜，每个第一膜和第二膜分别从基板悬挂，第一膜具有经受参考压力的表面和经受第一压力的第二面所述第二膜具有经受参考压力的第一面和经受待检测的第二压力的第二面，通过围绕轴线的枢转连杆相对于所述基板铰接的纵向轴的刚性梁，所述梁是通过第一区域牢固地连接到第一膜片，并且通过第二区域连接到第二膜片，使得枢转连杆位于梁的第一区域和第二区域之间，传感器测量梁围绕轴线的运动，所述传感器至少部分地布置在所述基板上。

2. 发明授权

US09417097B2 Device for measuring magnetic fields with Laplace force 有权
标题翻译：拉普拉斯力测量磁场的装置
公开(公告)号：US09417097B2
公开(公告)日：2016-08-16
申请号：US14423831
申请日：2013-08-29
申请人： Commissariat à l'énergie atomique et aux énergies alternatives
发明人： Philippe Robert , Dirk Ettelt , Arnaud Walther
IPC分类号： G01B7/30 , G01D5/14 , G01R33/028 , G01R33/038
CPC分类号： G01D5/14 , G01R33/0286 , G01R33/038
摘要： A device for measuring magnetic fields with Laplace force, comprising a substrate extending in a substrate plane, a first rigid frame in a first plane moveable relative to the substrate about a first rotation axis parallel to the substrate plane with a central through-recess. There is a fixed electrical conductor wound an axis perpendicular to the plane of the first frame. There a first hinge connecting the first rigid frame to the substrate with a first electrical track. There is a second hinge connected to the first rigid frame with a second electrical track. There is a first sensor for measuring of the angular displacement of the first rigid frame. The first hinge and the first electrical track are inside the central recess of the first rigid frame and the second hinge and the second electrical track are outside the central recess of the first rigid frame.
摘要翻译：一种利用拉普拉斯力测量磁场的装置，包括在基板平面中延伸的基板，第一平面中的第一刚性框架，所述第一平面可相对于基板围绕平行于基板平面的第一旋转轴线移动，并具有中心通孔。有一个固定的电导体缠绕在垂直于第一框架平面的轴上。在第一铰链处，第一铰链将第一刚性框架与第一电轨连接到基板。第二铰链连接到具有第二电轨的第一刚性框架。存在用于测量第一刚性框架的角位移的第一传感器。第一铰链和第一电气轨道位于第一刚性框架的中心凹部内，第二铰链和第二电气轨道位于第一刚性框架的中心凹部外。

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