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    • 3. 发明授权
    • Method to reduce STI HDP-CVD USG deposition induced defects
    • 降低STI HDP-CVD的方法USG沉积诱发缺陷
    • US06426272B1
    • 2002-07-30
    • US09960808
    • 2001-09-24
    • Chu-Yun FuLi-Jen Chen
    • Chu-Yun FuLi-Jen Chen
    • H01L2176
    • H01L21/823481H01L21/76224
    • A method for shallow trench isolation formation having a thick un-biased HDP USG liner layer to reduce HDP-CVD induced defects is described. Trenches are etched through an etch stop layer into a semiconductor substrate. The semiconductor substrate is thermally oxidized to form a thermal liner layer within the isolation trenches. The isolation trenches are filled using a high density plasma chemical vapor deposition process (HDP-CVD) having a deposition component and a sputtering component wherein the HDP-CVD process comprises: first depositing a first liner layer overlying the thermal liner layer wherein no bias power is supplied during the first depositing step and wherein the first liner layer has a thickness of between 200 and 400 Angstroms, second depositing a second liner layer using low bias power, and third depositing a gap filling layer overlying the second liner layer to fill the isolation trenches. The gap filling layer is polished back overlying the etch stop layer. The etch stop layer is removed to complete planarized shallow trench isolation regions in the manufacture of an integrated circuit device.
    • 描述了一种具有厚的未偏压HDP USG衬垫层以减少HDP-CVD诱导的缺陷的浅沟槽隔离形成方法。 通过蚀刻停止层将沟槽蚀刻成半导体衬底。 半导体衬底被热氧化以在隔离沟槽内形成热衬垫层。 使用具有沉积部件和溅射部件的高密度等离子体化学气相沉积工艺(HDP-CVD)填充隔离沟槽,其中HDP-CVD工艺包括:首先沉积覆盖热衬层的第一衬垫层,其中无偏压功率 在第一沉积步骤期间供应,并且其中第一衬里层具有200至400埃的厚度,使用低偏压功率沉积第二衬垫层,以及第三沉积覆盖第二衬里层的间隙填充层以填充隔离层 沟渠 间隙填充层被抛光回覆盖在蚀刻停止层上。 去除蚀刻停止层以在集成电路器件的制造中完成平坦化的浅沟槽隔离区域。
    • 4. 发明申请
    • SYSTEM AND METHOD FOR AUTOMATICALLY EXCHANGING LOGISTIC INFORMATION, AND STORAGE MEDIUM THEREOF
    • 自动交换物流信息的系统和方法及其存储介质
    • US20130007105A1
    • 2013-01-03
    • US13219149
    • 2011-08-26
    • Li-Jen Chen
    • Li-Jen Chen
    • G06F15/16
    • G06Q10/083H04L67/06
    • A system and method is provided for automatically exchanging a set of logistic information between information client stations. A central information server is used to retrieve a logistic message file from an origin information client station and transmit to a destination information client station. In the origin information client station, multiple digital logistic data corresponding to the logistic information are retrieved, serialized, encrypted and compressed to form the logistic message file. According to the origin-destination information of the logistic message file, the central information server builds a FTP (File Transfer Protocol), connection with the origin information client station, and the destination information client station respectively to retrieve and transmit the logistic message file. The destination information client station decompresses, decrypts, and parses the logistic message file into the digital logistic data corresponding to the logistic information.
    • 提供了一种用于在信息客户站之间自动交换一组逻辑信息的系统和方法。 中央信息服务器用于从原始信息客户端站检索逻辑消息文件,并发送到目的地信息客户端站。 在原始信息客户站中,对应于物流信息的多个数字逻辑数据被检索,序列化,加密和压缩以形成逻辑消息文件。 根据物流消息文件的起始目的地信息,中心信息服务器分别建立FTP(文件传输协议),与原始信息客户端站和目的地信息客户站的连接,以检索和发送物流消息文件。 目的地信息客户站将后勤消息文件解压缩,解密和解析成对应于物流信息的数字物流数据。