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    • 1. 发明授权
    • Micromachined relay and method of forming the relay
    • 微加工继电器和形成继电器的方法
    • US5627396A
    • 1997-05-06
    • US443456
    • 1995-05-18
    • Christopher D. JamesHenry S. Katzenstein
    • Christopher D. JamesHenry S. Katzenstein
    • H01L29/84H01H1/20H01H59/00H01L29/82
    • H01H59/0009H01H1/20H01H2001/0084H01H2059/0018Y10T307/878
    • A bridging member extending across a cavity in a semiconductor substrate (e.g. signal crystal silicon) has successive layers--a masking layer, an electrically conductive layer (e.g. polysilicon) and an insulating layer (e.g. SiO.sub.2). A first electrical contact (e.g. gold coated with ruthenium) extends on the insulating layer in a direction perpendicular to the extension of the bridging member across the cavity. A pair of bumps (e.g. gold) are on the insulating layer each between the contact and one of the cavity ends. Initially the bridging member and then the contact and the bumps are formed on the substrate and then the cavity is etched in the substrate through holes in the bridging member. A pair of second electrical contacts (e.g. gold coated with ruthenium) are on the surface of an insulating substrate (e.g. pyrex glass) adjacent the semiconductor substrate. The two substrates are bonded after the contacts are cleaned. The first contact is normally separated from the second contacts because the bumps engage the insulating substrate surface. When a voltage is applied between an electrically conductive layer on the insulating substrate surface and the polysilicon layer, the bridging member is deflected so that the first contact engages the second contacts. Electrical leads extend on the surface of the insulating substrate from the second contacts to bonding pads disposed adjacent a second cavity in the semiconductor substrate. The resultant relays on a wafer may be separated by sawing the semiconductor and insulating substrates at the position of the second cavity in each relay to expose the pads for electrical connections.
    • 延伸穿过半导体衬底(例如信号晶体硅)中的空腔的桥接构件具有连续的层 - 掩模层,导电层(例如多晶硅)和绝缘层(例如SiO 2)。 第一电接触件(例如镀有钌的金)在垂直于桥接构件的延伸方向的绝缘层上延伸穿过空腔。 一对凸起(例如金)在绝缘层上分别位于接触件和一个空腔端部之间。 最初,桥接构件,然后在衬底上形成接触和凸块,然后通过桥接构件中的孔在衬底中蚀刻空腔。 一对第二电触点(例如镀有钌的金)位于与半导体衬底相邻的绝缘衬底(例如耐热玻璃)的表面上。 触点清洁后,两个基板接合。 第一触点通常与第二触点分离,因为凸块与绝缘基板表面接合。 当在绝缘衬底表面上的导电层和多晶硅层之间施加电压时,桥接构件被偏转,使得第一触点接合第二触点。 电引线在绝缘基板的表面上从第二触点延伸到邻近半导体衬底中的第二腔的接合焊盘。 可以通过在每个继电器中的第二腔的位置处锯切半导体和绝缘基板来分离晶片上的所得继电器,以露出用于电连接的焊盘。
    • 2. 发明授权
    • Micromachined relay and method of forming the relay
    • 微加工继电器和形成继电器的方法
    • US5620933A
    • 1997-04-15
    • US445139
    • 1995-05-19
    • Christopher D. JamesHenry S. Katzenstein
    • Christopher D. JamesHenry S. Katzenstein
    • H01L29/84H01H1/20H01H59/00H01L21/461H01L21/465
    • H01H59/0009H01H1/20H01H2001/0084H01H2059/0018Y10T307/878
    • A bridging member extending across a cavity in a semiconductor substrate (e.g. single crystal silicon) has successive layers--a masking layer, an electrically conductive layer (e.g. polysilicon) and an insulating layer (e.g. SiO.sub.2). A first electrical contact (e.g. gold coated with ruthenium) extends on the insulating layer in a direction perpendicular to the extension of the bridging member across the cavity. A pair of bumps (e.g. gold) are on the insulating layer each between the contact and one of the cavity ends. Initially the bridging member and then the contact and the bumps are formed on the substrate and then the cavity is etched in the substrate through holes in the bridging member. A pair of second electrical contacts (e.g. gold coated with ruthenium) are on the surface of an insulating substrate (e.g. pyrex glass) adjacent the semiconductor substrate. The two substrates are bonded after the contacts are cleaned. The first contact is normally separated from the second contacts because the bumps engage the insulating substrate surface. When a voltage is applied between an electrically conductive layer on the insulating substrate surface and the polysilicon layer, the bridging member is deflected so that the first contact engages the second contacts. Electrical leads extend on the surface of the insulating substrate from the second contacts to bonding pads disposed adjacent a second cavity in the semiconductor substrate. The resultant relays on a wafer may be separated by sawing the semiconductor and insulating substrates at the position of the second cavity in each relay to expose the pads for electrical connections.
    • 延伸穿过半导体衬底(例如单晶硅)中的空腔的桥接构件具有连续的层 - 掩模层,导电层(例如多晶硅)和绝缘层(例如SiO 2)。 第一电接触件(例如镀有钌的金)在垂直于桥接构件的延伸方向的绝缘层上延伸穿过空腔。 一对凸起(例如金)在绝缘层上分别位于接触件和一个空腔端部之间。 最初,桥接构件,然后在衬底上形成接触和凸块,然后通过桥接构件中的孔在衬底中蚀刻空腔。 一对第二电触点(例如镀有钌的金)位于与半导体衬底相邻的绝缘衬底(例如耐热玻璃)的表面上。 触点清洁后,两个基板接合。 第一触点通常与第二触点分离,因为凸块与绝缘基板表面接合。 当在绝缘衬底表面上的导电层和多晶硅层之间施加电压时,桥接构件被偏转,使得第一触点接合第二触点。 电引线在绝缘基板的表面上从第二触点延伸到邻近半导体衬底中的第二腔的接合焊盘。 可以通过在每个继电器中的第二腔的位置处锯切半导体和绝缘基板来分离晶片上的所得继电器,以露出用于电连接的焊盘。
    • 3. 发明授权
    • Micromachined relay and method of forming the relay
    • 微加工继电器和形成继电器的方法
    • US5479042A
    • 1995-12-26
    • US12055
    • 1903-02-01
    • Christopher D. JamesHenry S. Katzenstein
    • Christopher D. JamesHenry S. Katzenstein
    • H01L29/84H01H1/20H01H59/00H01L29/66H01L29/96
    • H01H59/0009H01H1/20H01H2001/0084H01H2059/0018Y10T307/878
    • A bridging member extending across a cavity in a semiconductor substrate (e.g. single crystal silicon) has successive layers--a masking layer, an electrically conductive layer (e.g. polysilicon) and an insulating layer (e.g. SiO.sub.2). A first electrical contact (e.g. gold coated with ruthenium) extends on the insulating layer in a direction perpendicular to the extension of the bridging member across the cavity. A pair of bumps (e.g. gold) are on the insulating layer each between the contact and one of the cavity ends. Initially the bridging member and then the contact and the bumps are formed on the substrate and then the cavity is etched in the substrate through holes in the bridging member. A pair of second electrical contacts (e.g. gold coated with ruthenium) are on the surface of an insulating substrate (e.g. pyrex glass) adjacent the semiconductor substrate. The two substrates are bonded after the contacts are cleaned. The first contact is normally separated from the second contacts because the bumps engage the insulating substrate surface. When a voltage is applied between an electrically conductive layer on the insulating substrate surface and the polysilicon layer, the bridging member is deflected so that the first contact engages the second contacts. Electrical leads extend on the surface of the insulating substrate from the second contacts to bonding pads disposed adjacent a second cavity in the semiconductor substrate. The resultant relays on a wafer may be separated by sawing the semiconductor and insulating substrates at the position of the second cavity in each relay to expose the pads for electrical connections.
    • 延伸穿过半导体衬底(例如单晶硅)中的空腔的桥接构件具有连续的层 - 掩模层,导电层(例如多晶硅)和绝缘层(例如SiO 2)。 第一电接触件(例如镀有钌的金)在垂直于桥接构件的延伸方向的绝缘层上延伸穿过空腔。 一对凸起(例如金)在绝缘层上分别位于接触件和一个空腔端部之间。 最初,桥接构件,然后在衬底上形成接触和凸块,然后通过桥接构件中的孔在衬底中蚀刻空腔。 一对第二电触点(例如镀有钌的金)位于与半导体衬底相邻的绝缘衬底(例如耐热玻璃)的表面上。 触点清洁后,两个基板接合。 第一触点通常与第二触点分离,因为凸块与绝缘基板表面接合。 当在绝缘衬底表面上的导电层和多晶硅层之间施加电压时,桥接构件被偏转,使得第一触点接合第二触点。 电引线在绝缘基板的表面上从第二触点延伸到邻近半导体衬底中的第二腔的接合焊盘。 可以通过在每个继电器中的第二腔的位置处锯切半导体和绝缘基板来分离晶片上的所得继电器,以露出用于电连接的焊盘。
    • 4. 发明授权
    • Flash analog-to-digital converter with logarithmic/linear threshold
voltages
    • 具有对数/线性阈值电压的闪存模数转换器
    • US4928102A
    • 1990-05-22
    • US231100
    • 1988-08-11
    • Henry S. Katzenstein
    • Henry S. Katzenstein
    • H01L27/04H01L21/822H03M1/36
    • H03M1/365H03M1/367
    • A plurality of equally spaced terminals may be disposed at a side edge of a substantially uniformly resistive thin film. A reference potential (e.g. ground) may be applied to the second side of the film. An energizing voltage may be applied at the juncture between the first side edge and a particular one of the top and bottom edges of the film. In this way, the successive terminals receive voltages with a logarithmic relationship relative to the terminal positions. When a linear relationship of voltages is desired at successive terminals in a low range, no reference potential is applied to the second side edge of the thin film. Instead, the other one of the top and bottom edges may receive the reference voltage. Alternatively no reference voltage may be applied and terminals indicating the linear voltages may be disposed at such other edge. Each of a plurality of comparators providing an output indicative of the input voltage receives an input voltage and the voltage at an individual one of the successive terminals. The voltages in the logarithmic portion of the thin film may be calibrated by a circuit including a capacitance to indicate voltage deviations from the logarithmic relationship. The successive terminal voltages in the linear portion of the film may be calibrated by the capacitance circuit and a constant current source to indicate voltage deviations from the linear relationship.
    • 5. 发明授权
    • Identification system
    • 识别系统
    • US4752776A
    • 1988-06-21
    • US840318
    • 1986-03-14
    • Henry S. Katzenstein
    • Henry S. Katzenstein
    • G01N27/00G01D5/20G01N27/72G06K7/00G06K7/08G06K17/00G06K19/07G06T1/00H04Q7/00G08C19/00
    • G06K7/0008G01D5/20
    • A reader identifies information, such as the identity of an object at a transponder, provided in binary form by the transponder. The reader initially generates a pulse which activates the transponder into transmitting a series of signals, such as by magnetic induction, to the reader. Upon each count of a particular number of signals in the reader, the reader generates an additional pulse which causes the transponder to transmit a new series of signals to the reader. The generation of the pulses by the reader may occur through the charge and discharge of energy in a storage member such as a capacitance. The series of signals produced by the transponder may have either a first frequency or a second frequency. The signals may be generated in each sequence at the first and second frequencies in an order dependent upon (a) the binary code identifying the object at the transponder and (b) the polarity of the pulse produced by the transponder in such sequence. The reader then identifies the information by demodulating the signals received by it at the first and second frequencies. The reader is able to interrupt at any time the generation of the sequence of signals at the transponder when it does not receive the signals transmitted by the transponder. The reader then operates on a free running basis to generate pulses of opposite polarity at a relatively low frequency.
    • 读取器识别信息,例如应答器上的对象的身份,由转发器以二进制形式提供。 读取器最初产生脉冲,其激活应答器将诸如磁感应的一系列信号发送到读取器。 在读取器中每个计数特定数量的信号时,读取器产生附加的脉冲,其使得应答器向读取器传输新的一系列信号。 读取器产生的脉冲可以通过诸如电容的存储部件中的能量的充放电来发生。 由应答器产生的一系列信号可以具有第一频率或第二频率。 信号可以在第一和第二频率的每个序列中以依赖于(a)识别应答器上的对象的二进制代码的顺序生成,以及(b)以这种顺序产生的应答器的脉冲的极性。 然后,读取器通过解调其在第一和第二频率处接收的信号来识别信息。 读卡器能够随时中断发送应答器上的信号序列,当它不接收到应答器发送的信号时。 然后,读取器以自由运行为基础,以相对低的频率产生相反极性的脉冲。
    • 6. 发明授权
    • Current meter
    • 电流表
    • US4899103A
    • 1990-02-06
    • US74256
    • 1987-07-16
    • Henry S. Katzenstein
    • Henry S. Katzenstein
    • G01R15/18
    • G01R15/185
    • A variable electrical current in a first winding on a magnetizable core produces a magnetomotive force in the core. A second core winding produces an opposing magnetomotive force digitally adjustable periodically by a third core winding, a pair of switches and a flip-flop coupled to a center tap for alternately closing such switches when triggered to opposite states. The flip-flop is triggered between opposite states when the third winding current reaches a particular magnitude. In each cycle, the time differences for producing the particular magnitudes and the opposite polarities are dependent upon the remanent core flux. Such time differences are counted digitally upwardly and downwardly for opposite polarities. The second winding current is adjusted digitally in each cycle in a direction to minimize such count. The magnitudes of successive adjustments may be compared periodically by adaptive tracking techniques to control the magnitudes of subsequent adjustments. With large magnitudes of the variable current, the first winding on the core may receive a stepped-down current from a first winding on a second core having a second winding to receive the variable current. Windings on the first and second cores may be connected in a closed loop, or windings on a third core produce in the first core a magnetomotive force aiding the magnetomotive force from the current in the second winding on the second core to compensate for energy losses as a result of such current. The second core may be notched to prevent core becoming saturation.
    • 可磁化芯上的第一绕组中的可变电流在芯中产生磁动势。 第二芯线圈产生由第三芯线圈,一对开关和耦合到中心抽头的触发器周期性数字可调整的相对磁动势,用于当触发到相反状态时交替地闭合这样的开关。 当第三绕组电流达到特定幅度时,触发器在相反状态之间触发。 在每个周期中,用于产生特定幅度和相反极性的时间差取决于剩余磁芯通量。 这样的时间差异以相反的极性数字向上和向下计数。 第二绕组电流在每个周期中以一定方向进行数字调整,以使这种计数最小化。 可以通过自适应跟踪技术定期比较连续调整的幅度,以控制后续调整的幅度。 在具有可变电流的大幅度的情况下,芯上的第一绕组可以接收来自具有第二绕组的第二绕组上的第一绕组的降压电流以接收可变电流。 第一和第二芯上的绕组可以连接在闭环中,或者第三芯上的绕组在第一芯中产生磁动势,以促进来自第二绕组中的电流的磁动势,以补偿第二磁芯上的能量损耗 这样的结果。 第二个核心可能被缺口以防止核心饱和。
    • 7. 发明授权
    • Non-linear analog to digital converter
    • 非线性模数转换器
    • US5059980A
    • 1991-10-22
    • US597511
    • 1990-10-12
    • Henry S. Katzenstein
    • Henry S. Katzenstein
    • H03M1/36
    • H03M1/365H03M1/367
    • First terminals are equally spaced on a substantially uniformly resistive thin film at or near a first side edge of the film at progressive positions downwardly from the top of the film. Near the bottom of the film, second terminals are preferably equally spaced progressively inwardly from the first side edge of the film. An energizing potential is applied to the film either at the corner defined by the top and the first side edge of the film or in a curved pattern of positions near such corner. A reference potential (e.g. ground) is applied to the film near the otherside of the film and near the bottom edge of the film. Voltages are thus produced at the successive ones of the first terminals with an exponential relationship with respect to such terminal positions and at the successive ones of the second terminals with a linear relationship with respect to such terminal positions. The disposition of the second terminals may be compensated for deviations in a logarithmic response in an output member (e.g. an electron gun in a cathode ray tube) receiving the voltages on such terminals. Cuts may be provided from the other side edge of the resistive surface in a horizontal direction partially toward the first side edge of the resistive surface to decrease the width of the resistive surface. Each of a plurality of comparators receives an input voltage first and second and the voltage at an individual one of the terminals. The comparators provide an output indicative of magnitude of the input voltage.
    • 第一端子在薄膜的第一侧边缘处或附近的基本上均匀的电阻薄膜上等距离地从薄膜的顶部向下的渐进位置。 在薄膜的底部附近,优选地,第二端子从薄膜的第一侧边缘逐渐向内间隔开。 在由膜的顶部和第一侧边缘限定的角部或者在靠近该角部的位置的弯曲图案中,在膜上施加通电电位。 将参考电位(例如接地)施加到膜的另一侧附近的膜附近和膜的底部边缘附近。 因此,在相对于这种端子位置具有指数关系的第一端子中的连续的第一端子处以及相对于这种端子位置具有线性关系的连续的第二端子产生电压。 第二端子的配置可以补偿接收这些端子上的电压的输出构件(例如阴极射线管中的电子枪)的对数响应中的偏差。 切割可以从电阻表面的另一侧边缘沿水平方向部分地朝向电阻表面的第一侧边缘提供,以减小电阻表面的宽度。 多个比较器中的每一个接收第一和第二输入电压以及在个别的一个端子处的电压。 比较器提供表示输入电压大小的输出。
    • 8. 发明授权
    • Fluorometer
    • 荧光计
    • US4877965A
    • 1989-10-31
    • US751746
    • 1985-07-01
    • Walter B. DandlikerHoward S. BarrHenry S. KatzensteinKeith R. Watson
    • Walter B. DandlikerHoward S. BarrHenry S. KatzensteinKeith R. Watson
    • G01N21/64G02B21/16
    • G01N21/6408G02B21/16G01N21/6456G01N21/6458G01N2201/1087
    • A fluorometer for measuring a particular fluorescence emanating from a specimen and operating in accordance with the following method. Producing a burst of concentrated light energy and directing the concentrated light energy toward the specimen to produce a fluorescence from the specimen including the particular fluorescence. Preferably producing an image of the fluorescence. Detecting the fluorescence and producing a signal in accordance with the fluorescence. Controlling the passage of the image of the fluorescence for detecting within a particular time period so as to optimize the detection of the particular fluorescence. Timing the operation to sequence the detection of the fluorescence within the particular time period after the production of the burst of concentrated light energy. Scanning the fluorescence from the specimen for forming signals representative of the fluorescence from the specimen. Analyzing the signals to enhance the portion of the signal representing the particular fluorescence relative to the portion of the signal.
    • 一种荧光计,用于测量从样品发出的特定荧光并根据以下方法进行操作。 产生集中的光能的突发,并将集中的光能引导到样品以从包括特定荧光的样品产生荧光。 优选地产生荧光图像。 根据荧光检测荧光并产生信号。 控制在特定时间段内用于检测的荧光图像的通过,以便优化特定荧光的检测。 计算在产生聚集的光能的突发之后的特定时间段内对荧光的检测进行排序的操作。 扫描来自样品的荧光,以形成代表来自样品荧光的信号。 分析信号以增强表示相对于信号部分的特定荧光的信号部分。
    • 9. 发明授权
    • Apparatus for converting data between analog and digital values
    • 用于在模拟和数字值之间转换数据的装置
    • US4857929A
    • 1989-08-15
    • US724829
    • 1985-04-19
    • Henry S. Katzenstein
    • Henry S. Katzenstein
    • H03M1/00
    • H03M1/747
    • Sub-sets of switches are provided each having a number of switches directly related to an individual bit in a binary coded input word. Signals representing the individual bits are introduced to the switches in the different sub-sets to obtain switch conductivities in accordance with such binary bits. The switches are connected in a repetitive array to provide paths through the conductive ones of the switches. The switches are connected to output members and a line to introduce the current through the output members to the line in accordance with the pattern of switch conductivities. This provides for progressive increases in the number of the output members connected to the line, ad for a continued connection to the line of output members previously connected to the line, with progressive increases in the binary value. The cumulative current through the line is indicative of the analog value. Additional circuitry may provide an indication of the reduced binary values relative to the binary values represented by the switches. An interpolation line may be connected to the repetitive array to receive a current from the output member to be connected next to the line for increasing binary values. The interpolation line and the additional circuitry may be connected to provide a current from such circuitry in accordance with the reduced binary values and to introduce such current to the line to provide an output current on the line in representation of the analog value. The additional circuitry may constitute another repetitive array.
    • 提供开关子集,每个子​​组具有与二进制编码输入字中的单个位直接相关的多个开关。 将表示各个位的信号引入不同子集中的开关,以根据这样的二进制位获得开关电导率。 开关以重复的阵列连接,以提供通过开关中的导电开关的路径。 开关连接到输出构件和线,以根据开关电导率的模式将电流通过输出构件引入线。 这提供了连接到线路的输出成员的数量的逐渐增加,ad用于连续连接到先前连接到线路的输出部件的线路,二进制值逐渐增加。 通过该线路的累积电流表示模拟值。 附加电路可以提供相对于由开关表示的二进制值的减小的二进制值的指示。 内插线可以连接到重复阵列以接收来自输出构件的电流,以连接在线旁边以增加二进制值。 内插线和附加电路可以被连接以根据减小的二进制值从这样的电路提供电流,并且将这种电流引入线以在线上提供表示模拟值的输出电流。 附加电路可以构成另一个重复阵列。
    • 10. 再颁专利
    • Fluorometer
    • 荧光计
    • USRE34782E
    • 1994-11-08
    • US969794
    • 1992-10-12
    • Walter B. DandlikerHoward S. BarrHenry S. KatzensteinKeith R. Watson
    • Walter B. DandlikerHoward S. BarrHenry S. KatzensteinKeith R. Watson
    • G01N21/64G02B21/16
    • G01N21/6408G02B21/16G01N21/6456G01N21/6458G01N2201/1087
    • A fluorometer for measuring a particular fluorescence emanating from a specimen and operating in accordance with the following method. Producing a burst of concentrated light energy and directing the concentrated light energy toward the specimen to produce a fluorescence from the specimen including the particular fluorescence. Preferably producing an image of the fluorescence. Detecting the fluorescence and producing a signal in accordance with the fluorescence. Controlling the passage of the image of the fluorescence for detecting within a particular time period so as to optimize the detection of the particular fluorescence. Timing the operation to sequence the detection of the fluorescence within the particular time period after the production of the burst of concentrated light energy. Scanning the fluorescence from the specimen for forming signals representative of the fluorescence from the specimen. Analyzing the signals to enhance the portion of the signal representing the particular fluorescence relative to the portion of the signal.
    • 一种荧光计,用于测量从样品发出的特定荧光并根据以下方法进行操作。 产生集中的光能的突发,并将集中的光能引导到样品以从包括特定荧光的样品产生荧光。 优选地产生荧光图像。 根据荧光检测荧光并产生信号。 控制在特定时间段内用于检测的荧光图像的通过,以便优化特定荧光的检测。 计算在产生聚集的光能的突发之后的特定时间段内对荧光的检测进行排序的操作。 扫描来自样品的荧光,以形成代表来自样品荧光的信号。 分析信号以增强表示相对于信号部分的特定荧光的信号部分。