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    • 6. 发明授权
    • Capacitance devices for film thickness mapping, measurement methods using same
    • 电容器用于膜厚测绘,测量方法采用相同的方法
    • US06459280B1
    • 2002-10-01
    • US09619831
    • 2000-07-20
    • Bharat BhushanChristopher D. Hahm
    • Bharat BhushanChristopher D. Hahm
    • G01R2726
    • H02J1/10G11B2005/001
    • The present invention includes capacitive film thickness measurement devices and measurement systems. The invention also includes machines or instruments using those aspects of the invention. The present invention additionally includes methods and procedures using those devices of the present invention. The present invention discloses a capacitance measurement device and technique useful in determining lubricant film thickness on substrates such as magnetic thin-film rigid disks. Also disclosed is a device and technique for determining film thickness by suspending the film in a liquid dielectric. Using the present invention, variations in lubricant thickness on the Angstrom scale or less may be measured quickly and nondestructively.
    • 本发明包括电容膜厚度测量装置和测量系统。 本发明还包括使用本发明的这些方面的机器或仪器。 本发明另外包括使用本发明的那些装置的方法和程序。 本发明公开了一种用于确定诸如磁性薄膜刚性盘的衬底上的润滑剂膜厚度的电容测量装置和技术。 还公开了通过将膜悬浮在液体电介质中来确定膜厚度的装置和技术。 使用本发明,可以快速且非破坏性地测量润滑剂厚度在埃刻度或更小的变化。