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    • 1. 发明授权
    • Method and electronic device for a simplified integration of high precision thinfilm resistors
    • 方法和电子设备,用于简化高精度薄膜电阻的集成
    • US08470683B2
    • 2013-06-25
    • US13032426
    • 2011-02-22
    • Christoph DirneckerWolfgang Ploss
    • Christoph DirneckerWolfgang Ploss
    • H01L29/86H01L21/02
    • H01L28/20H01L21/76816H01L23/5228H01L27/016H01L28/24H01L2924/0002H01L2924/00
    • The invention relates to a method of manufacturing an integrated circuit. An electrically resistive layer of a material for serving as a thin film resistor (TFR) is deposited. A first electrically insulating layer is deposited on the electrically resistive layer of the TFR. An electrically conductive layer of an electrically conductive material is deposited. An area is left without the conductive layer and the area overlaps the electrically resistive layer of the TFR. A second electrically insulating layer is deposited on top of the conductive layer. A first VIA opening is etched through the second insulating layer, the area without the conductive layer adjacent to the electrically conductive layer and through the first insulating layer down to the electrically resistive layer of the TFR. A conductive material is deposited in the first VIA opening so as to electrically connect the conductive layer and the electrically resistive layer of the TFR.
    • 本发明涉及一种制造集成电路的方法。 沉积用作薄膜电阻器(TFR)的材料的电阻层。 第一电绝缘层沉积在TFR的电阻层上。 沉积导电材料的导电层。 没有导电层而没有区域与TFR的电阻层重叠。 第二电绝缘层沉积在导电层的顶部上。 通过第二绝缘层蚀刻第一VIA开口,没有导电层的区域与导电层相邻并且通过第一绝缘层直到TFR的电阻层。 在第一VIA开口中沉积导电材料,以电连接TFR的导电层和电阻层。