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    • 3. 发明申请
    • Vacuum turbomolecular pump
    • 真空涡轮分子泵
    • US20090136361A1
    • 2009-05-28
    • US11991346
    • 2006-08-17
    • Alois GrevenChristian Harig
    • Alois GrevenChristian Harig
    • F04D27/02H02P6/14F04D19/04
    • F04D19/04F04D27/0261F04D27/0292
    • A vacuum turbomolecular pump (10) is driven by a brushless direct-current drive motor (16) comprising stator coils and a permanent-magnetically excited motor rotor. When rotating, the motor rotor produces an electromotive force oriented counter to the direction of rotation. A motor controller (22) is connected to the stator coils and which generates a current from the supply voltage, this current being induced in the stator coils. In addition, a rotational frequency regulator (32) limits the rotational frequency (f) of the drive motor (16) to a nominal rotational frequency (fN). A power supply (20) is connected to the motor controller (22) and supplies a constant direct current voltage as a supply voltage (UV) for the motor controller (22). The power supply (20) is designed so that the constant supply voltage (UV) is low enough that, at a limit rotational frequency (fG), the electromotive force is equal to the drive force that can be maximally generated by the motor controller (22) and by the stator coils. The limit rotational frequency (fG) is less than 1.3 times the nominal rotational frequency (fN). As a result, the motor output is limited and the rotational frequency of the drive motor (16) is physically restricted to a limit rotational frequency (fG) in a reliable manner.
    • 真空涡轮分子泵(10)由包括定子线圈和永磁励磁马达转子的无刷直流驱动马达(16)驱动。 当旋转时,电机转子产生一个与旋转方向相反的电动势。 电动机控制器(22)连接到定子线圈并且从电源电压产生电流,该电流在定子线圈中感应。 此外,旋转频率调节器(32)将驱动电动机(16)的旋转频率(f)限制到额定转速(fN)。 电源(20)连接到电动机控制器(22),并提供恒定的直流电压作为电动机控制器(22)的电源电压(UV)。 电源(20)被设计成使得恒定电源电压(UV)足够低,使得在极限旋转频率(fG)下,电动势等于由电动机控制器最大程度产生的驱动力( 22)和定子线圈。 极限旋转频率(fG)小于额定旋转频率(fN)的1.3倍。 结果,马达输出受到限制,并且驱动马达(16)的旋转频率以可靠的方式物理地限制在极限旋转频率(fG)。
    • 4. 发明申请
    • VACUUM PUMP
    • 真空泵
    • US20110033317A1
    • 2011-02-10
    • US12988074
    • 2009-04-15
    • Alois GrevenChristian Beyer
    • Alois GrevenChristian Beyer
    • F04B49/00
    • F04D19/042F04D27/001F04D29/32H04Q9/00H04Q2209/47
    • A pump rotor (11) contains a transponder (14) that can be read out by a reader (12) of a pump stator (10). The pump rotor (11) also contains sensors (26) for determining operating data (BD), and a memory (27). The memory (27) stores either the history of the measured operating data (BD) or a service life characteristic (LDK). In this way, the rate of wear of the respective rotor is determined and stored in the rotor, and the rotor therefore contains all of the information relating to maintenance. The rotor-related information remains in the rotor even if the rotor is used in another vacuum pump.
    • 泵转子(11)包含可由泵定子(10)的读取器(12)读出的应答器(14)。 泵转子(11)还包含用于确定操作数据(BD)的传感器(26)和存储器(27)。 存储器(27)存储测量的操作数据(BD)的历史或者使用寿命特性(LDK)。 以这种方式,确定各个转子的磨损速度并将其存储在转子中,因此转子包含与维护有关的所有信息。 即使在另一个真空泵中使用转子,转子相关信息也保留在转子中。
    • 5. 发明申请
    • High rotational speed vacuum pump
    • 高转速真空泵
    • US20090202360A1
    • 2009-08-13
    • US11664888
    • 2005-10-06
    • Karl-Heinrich VölkerChristian BeyerAlois Greven
    • Karl-Heinrich VölkerChristian BeyerAlois Greven
    • F04D27/00
    • F04D19/04F04D27/0261F04D29/668
    • A high rotational speed vacuum pump (10) includes a compressor (12), a drive motor (14) for driving said compressor (12), and a motor control unit (16) for operating said drive motor (14) at a constant nominal rotational frequency. Depending on the basic conditions, undesirably strong oscillations may occur at the compressor (12) during compressor operation at the nominal rotational frequency. These undesirably strong oscillations cause the bearings to be excessively stressed. To reduce the oscillation stress of the compressor and/or the vacuum pump, an activatable rotational frequency correction device (18) is associated with the motor control unit (16). The correction device constantly corrects the nominal frequency by a rotational frequency correction value of max. 10% of the nominal rotational frequency when the rotational frequency correction device (18) is activated. This allows the rotational frequency of the drive motor (14) to be changed in a simple manner when strong natural oscillations of the compressor (12) and/or the vacuum pump (10) occur such that resonance effects and the like can be avoided.
    • 高转速真空泵(10)包括压缩机(12),用于驱动所述压缩机(12)的驱动马达(14)和马达控制单元(16),用于以恒定的额定值运行所述驱动马达(14) 转速。 根据基本条件,压缩机(12)在标称转速下的压缩机运行期间可能会发生不期望的强烈振荡。 这些不期望的强烈振荡导致轴承过度受力。 为了减小压缩机和/或真空泵的振荡应力,可激活的旋转频率校正装置(18)与电机控制单元(16)相关联。 校正装置通过最大旋转频率校正值不断校正标称频率。 旋转频率校正装置(18)被激活时的额定转动频率的10%。 这样当压缩机(12)和/或真空泵(10)发生强烈的自然振荡时,能够以简单的方式改变驱动马达(14)的旋转频率,从而可以避免共振效应等。
    • 6. 发明申请
    • VACUUM PUMP
    • 真空泵
    • US20100303640A1
    • 2010-12-02
    • US11991222
    • 2006-08-15
    • Alois GrevenThomas Longerich
    • Alois GrevenThomas Longerich
    • F04D15/00F04D19/04
    • F04D19/042F04D27/001
    • A vacuum pump (10) has a pump rotor (14) and a pump stator (12). The pump rotor (14) has an electrical measuring transducer (44), for example a temperature sensor. A transmitting antenna (40), which is connected with the measuring transducer (44), is provided on the pump rotor (14). A receiving antenna (30), which receives measurement values of the measuring transducer (44) from the transmitting antenna (40), is provided on the pump stator (12) so as to be situated opposite the transmitting antenna (40). In this way, accurate measurement values can be transmitted from the pump rotor (14) to the pump stator (12).
    • 真空泵(10)具有泵转子(14)和泵定子(12)。 泵转子(14)具有电测量传感器(44),例如温度传感器。 在泵转子(14)上设置与测量传感器(44)连接的发射天线(40)。 从发送天线(40)接收测量变换器(44)的测量值的接收天线(30)设置在泵定子(12)上,以便与发射天线(40)相对。 以这种方式,精确的测量值可以从泵转子(14)传递到泵定子(12)。