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    • 6. 发明授权
    • Thin film magnetic head with self-aligned pole tips
    • 薄膜磁头带自对准极尖
    • US06487040B1
    • 2002-11-26
    • US09448459
    • 1999-11-24
    • Yun-Lin HsiaoLien-Chang WangDurga I. RavipatiHugh C. HinerWilliam D. Jensen
    • Yun-Lin HsiaoLien-Chang WangDurga I. RavipatiHugh C. HinerWilliam D. Jensen
    • G11B5147
    • G11B5/3116G11B5/3106G11B5/3163Y10T29/49044
    • A magnetic head includes first and second pole tips separated by a nonmagnetic gap layer. The right side walls of the first and second pole tips are vertically aligned. Similarly, the left side walls of the first and second pole tips are vertically aligned. The side fringing flux is substantially reduced resulting in a magnetic head capable of writing data tracks with well defined boundaries. The fabrication of the magnetic head begins with forming a stack of layers on a substrate. The stack of layers includes a nonmagnetic layer sandwiched between the first pole tip layer and a sacrificial layer which is preferably made of a metal. A protective layer, such as alumina, is then deposited over and around the stack of layers. After planarization and ion milling, the sacrificial layer is exposed. The sacrificial layer is then etched away leaving a volume of space in the protective layer and above the gap layer. An inductive coil with associated dielectric layers are then deposited above the first pole layer. The second pole layer is thereafter deposited over the inductive coil and into the volume of space resulting in the first and second pole tips having vertically aligned side walls.
    • 磁头包括由非磁性间隙层分开的第一和第二极尖。 第一和第二极尖的右侧壁垂直对准。 类似地,第一和第二极尖的左侧壁垂直对齐。 侧面通量大大减小,导致能够以良好界定的边界写入数据轨迹的磁头。 磁头的制造开始于在衬底上形成一叠层。 层叠层包括夹在第一极尖端层和优选由金属制成的牺牲层之间的非磁性层。 然后将保护层(例如氧化铝)沉积在层叠层上和周围。 在平坦化和离子研磨之后,牺牲层被暴露。 然后蚀刻牺牲层,留下保护层中的空间的体积并且在间隙层上方。 然后在第一极层上方沉积具有相关电介质层的感应线圈。 然后,第二极层沉积在感应线圈上并进入空间体积,从而产生第一和第二极尖具有垂直排列的侧壁。
    • 8. 发明授权
    • Thin film magnetic head with self-aligned pole tips
    • 薄膜磁头带自对准极尖
    • US06173486B1
    • 2001-01-16
    • US08810862
    • 1997-03-04
    • Yun-Lin HsiaoLien-Chang WangDurga I. RavipatiHugh C. HinerWilliam D. Jensen
    • Yun-Lin HsiaoLien-Chang WangDurga I. RavipatiHugh C. HinerWilliam D. Jensen
    • G11B5127
    • G11B5/3116G11B5/3106G11B5/3163Y10T29/49044
    • A magnetic head includes first and second pole tips separated by a nonmagnetic gap layer. The right side walls of the first and second pole tips are vertically aligned. Similarly, the left side walls of the first and second pole tips are vertically aligned. The side fringing flux is substantially reduced resulting in a magnetic head capable of writing data tracks with well defined boundaries. The fabrication of the magnetic head begins with forming a stack of layers on a substrate. The stack of layers includes a nonmagnetic layer sandwiched between the first pole tip layer and a sacrificial layer which is preferably made of a metal. A protective layer, such as alumina, is then deposited over and around the stack of layers. After planarization and ion milling, the sacrificial layer is exposed. The sacrificial layer is then etched away leaving a volume of space in the protective layer and above the gap layer. An inductive coil with associated dielectric layers are then deposited above the first pole layer. The second pole layer is thereafter deposited over the inductive coil and into the volume of space resulting in the first and second pole tips having vertically aligned side walls.
    • 磁头包括由非磁性间隙层分开的第一和第二极尖。 第一和第二极尖的右侧壁垂直对准。 类似地,第一和第二极尖的左侧壁垂直对齐。 侧面通量大大减小,导致能够以良好界定的边界写入数据轨迹的磁头。 磁头的制造开始于在衬底上形成一叠层。 层叠层包括夹在第一极尖端层和优选由金属制成的牺牲层之间的非磁性层。 然后将保护层(例如氧化铝)沉积在层叠层上和周围。 在平坦化和离子研磨之后,牺牲层被暴露。 然后蚀刻牺牲层,留下保护层中的空间的体积并且在间隙层上方。 然后在第一极层上方沉积具有相关电介质层的感应线圈。 然后,第二极层沉积在感应线圈上并进入空间体积,从而产生第一和第二极尖具有垂直排列的侧壁。