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2. 发明授权

US06852358B1 Process for preparing an optical waveguide component from acrylate/titanium alkoxide composite material and the prepared optical waveguide component 失效
标题翻译：从丙烯酸酯/烷氧基钛复合材料制备光波导部件的方法和制备的光波导部件
公开(公告)号：US06852358B1
公开(公告)日：2005-02-08
申请号：US10649676
申请日：2003-08-28
申请人： Wen Chang Chen , Long Hua Lee
发明人： Wen Chang Chen , Long Hua Lee
IPC分类号： G02B6/122 , B05D5/06 , G02B6/10
CPC分类号： G02B6/1221
摘要： The present invention relates to a process for preparing an optical waveguide component from acrylate/titanium alkoxide composite material, which is characterized by using an acid-free sol-gel process to prepare a precursor solution of acrylate/titanium alkoxide composite film, then coating the precursor solution on a silicon wafer then drying, and producing the optical waveguide component having channels by using a lithography process. The present invention also relates to an optical waveguide component of acrylate/titanium alkoxide composite material, the material has excellent transparency and its refractive index varies with the amount of titanium alkoxide contained therein. When an optical waveguide component is prepared from the composite the reduction of near-infrared ray is less than 0.7 dB/cm and therefore the waveguide component is advantageous for use as an optical communication element.
摘要翻译：本发明涉及一种由丙烯酸酯/钛醇盐复合材料制备光波导部件的方法，其特征在于使用无酸溶胶 - 凝胶法制备丙烯酸酯/钛醇盐复合膜的前体溶液，然后涂布然后干燥，并通过使用光刻工艺制造具有通道的光波导部件。本发明还涉及丙烯酸酯/钛醇盐复合材料的光波导部件，该材料具有优异的透明度，其折射率随其中所含的烷氧基钛的量而变化。当从复合材料制备光波导部件时，近红外线的减少小于0.7dB / cm，因此波导部件有利于用作光通信元件。

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