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1. 发明申请

US20050199969A1 Pressure sensor 审中-公开
标题翻译：压力传感器
公开(公告)号：US20050199969A1
公开(公告)日：2005-09-15
申请号：US10507366
申请日：2003-03-27
申请人： Chiaki Kobayashi , Daisuke Sumi , Hiroshi Inamura , Togo Morifumi , Koji Yoshida , Masaki Endo , Sayaka Hiura , Takao Yamauchi
发明人： Chiaki Kobayashi , Daisuke Sumi , Hiroshi Inamura , Togo Morifumi , Koji Yoshida , Masaki Endo , Sayaka Hiura , Takao Yamauchi
IPC分类号： H01L27/14
CPC分类号： G01L1/146
摘要： A pressure sensor comprising a plurality of sensor parts arranged in matrix. A first electrode being connected with first wiring and a second electrode being connected with second wiring are disposed oppositely through a cavity part in the sensor part. The second electrode bends to the first electrode side in response to a pressure from a specimen and touches the first electrode upon application of a pressure of a specified level or above. When the specimen is pressed against a pressure detecting region, both electrodes touch each other at a sensor part corresponding to a protrusion of the specimen and are separated at a sensor part corresponding to a recess. When a scanning signal is fed from a scanning circuit to one wiring and presence of a signal flowing through the second wiring is detected by a sensing circuit, a pressure being applied to each sensor part can be detected. Furthermore, the shape is detected by feeding the scanning signal from the scanning circuit to each first wiring sequentially and scanning the pressure detecting region generally.
摘要翻译：一种压力传感器，包括排列成矩阵的多个传感器部件。与第一布线连接的第一电极和与第二布线连接的第二电极相对设置在传感器部分中的空腔部分中。第二电极响应于来自试样的压力而弯曲到第一电极侧，并且在施加指定水平或更高的压力时接触第一电极。当样本被压在压力检测区域上时，两个电极在对应于样本的突起的传感器部分处彼此接触并且在对应于凹部的传感器部分分离。当扫描信号从扫描电路馈送到一个布线并且通过感测电路检测到流过第二布线的信号的存在时，可以检测施加到每个传感器部分的压力。此外，通过将扫描电路的扫描信号顺序地馈送到每个第一布线来检测形状，并且一般扫描压力检测区域。

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