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1. 发明授权

US08340328B2 Acoustics transducer 有权
标题翻译：声学传感器
公开(公告)号：US08340328B2
公开(公告)日：2012-12-25
申请号：US12767658
申请日：2010-04-26
申请人： Di-Bao Wang , Chin-Fu Kuo , Chia-Yu Wu , Jien-Ming Chen
发明人： Di-Bao Wang , Chin-Fu Kuo , Chia-Yu Wu , Jien-Ming Chen
IPC分类号： H04R25/00
CPC分类号： H04R19/005
摘要： According to an embodiment of the disclosure, an acoustics transducer is provided, which includes a support substrate having an upper surface and a lower surface, the upper surface including a first portion and a second portion surrounding the first portion, a recess extending from the upper surface towards the lower surface, the recess is between the first portion and the second portion of the upper surface, a vibratable membrane disposed directly on the recess, the vibratable membrane including a fixed portion fixed on the support substrate and a suspended portion, and a back plate disposed on the support substrate and opposite to the vibratable membrane. The suspended portion has an edge extending substantially along with an edge of an opening of the recess. The suspended portion is separated from the first portion and the second portion of the upper surface by an inner interval and an outer interval, respectively.
摘要翻译：根据本公开的实施例，提供了一种声学换能器，其包括具有上表面和下表面的支撑基底，所述上表面包括第一部分和围绕所述第一部分的第二部分，从所述上表面延伸的凹部表面朝向下表面，凹部位于上表面的第一部分和第二部分之间，直接设置在凹部上的可振动膜，可振动膜包括固定在支撑基板上的固定部分和悬挂部分，以及背板设置在支撑基板上并与可振动膜相对。悬挂部分具有基本上与凹部的开口的边缘一起延伸的边缘。悬挂部分分别与上表面的第一部分和第二部分分开内部间隔和外部间隔。

2. 发明申请

US20110123053A1 ACOUSTICS TRANSDUCER 有权
标题翻译：声学传感器
公开(公告)号：US20110123053A1
公开(公告)日：2011-05-26
申请号：US12767658
申请日：2010-04-26
申请人： Di-Bao Wang , Chin-Fu Kuo , Chia-Yu Wu , Jien-Ming Chen
发明人： Di-Bao Wang , Chin-Fu Kuo , Chia-Yu Wu , Jien-Ming Chen
IPC分类号： H04R1/00
CPC分类号： H04R19/005
摘要： According to an embodiment of the disclosure, an acoustics transducer is provided, which includes a support substrate having an upper surface and a lower surface, the upper surface including a first portion and a second portion surrounding the first portion, a recess extending from the upper surface towards the lower surface, the recess is between the first portion and the second portion of the upper surface, a vibratable membrane disposed directly on the recess, the vibratable membrane including a fixed portion fixed on the support substrate and a suspended portion, and a back plate disposed on the support substrate and opposite to the vibratable membrane. The suspended portion has an edge extending substantially along with an edge of an opening of the recess. The suspended portion is separated from the first portion and the second portion of the upper surface by an inner interval and an outer interval, respectively.
摘要翻译：根据本公开的实施例，提供了一种声学换能器，其包括具有上表面和下表面的支撑基底，所述上表面包括第一部分和围绕所述第一部分的第二部分，从所述上表面延伸的凹部表面朝向下表面，凹部位于上表面的第一部分和第二部分之间，直接设置在凹部上的可振动膜，可振动膜包括固定在支撑基板上的固定部分和悬挂部分，以及背板设置在支撑基板上并与可振动膜相对。悬挂部分具有基本上与凹部的开口的边缘一起延伸的边缘。悬挂部分分别与上表面的第一部分和第二部分分开内部间隔和外部间隔。

3. 发明申请

US20100148287A1 TRUSS STRUCTURE AND MANUFACTURING METHOD THEREOF 有权
标题翻译： TRUSS结构及其制造方法
公开(公告)号：US20100148287A1
公开(公告)日：2010-06-17
申请号：US12469079
申请日：2009-05-20
申请人： PIN CHANG , Chin-Hung Wang , Chia-Yu Wu , Jien-Ming Chen
发明人： PIN CHANG , Chin-Hung Wang , Chia-Yu Wu , Jien-Ming Chen
IPC分类号： H01L29/84 , H01L21/3205
CPC分类号： B81C1/00126 , B81B3/0072 , B81B2203/0127
摘要： A truss structure is provided. The truss structure comprises a substrate; and plural sub-truss groups disposed on the substrate, wherein each sub-truss group comprises plural VIAs; and plural metal layers interlaced with the plural VIAs, wherein the plural sub-truss groups are piled up on each other to form a 3-D corrugate structure.
摘要翻译：提供桁架结构。桁架结构包括基底; 以及设置在所述基板上的多个子桁架组，其中每个子桁架组包括多个ⅥA; 以及与多个VIA交织的多个金属层，其中多个子桁架组彼此堆叠以形成3-D波纹结构。

4. 发明授权

US08242570B2 Truss structure and manufacturing method thereof 有权
标题翻译：桁架结构及其制造方法
公开(公告)号：US08242570B2
公开(公告)日：2012-08-14
申请号：US12469079
申请日：2009-05-20
申请人： Pin Chang , Chin-Hung Wang , Chia-Yu Wu , Jien-Ming Chen
发明人： Pin Chang , Chin-Hung Wang , Chia-Yu Wu , Jien-Ming Chen
IPC分类号： G01L9/00
CPC分类号： B81C1/00126 , B81B3/0072 , B81B2203/0127
摘要： A truss structure is provided. The truss structure comprises a substrate; and plural sub-truss groups disposed on the substrate, wherein each sub-truss group comprises plural VIAs; and plural metal layers interlaced with the plural VIAs, wherein the plural sub-truss groups are piled up on each other to form a 3-D corrugate structure.
摘要翻译：提供桁架结构。桁架结构包括基底; 以及设置在所述基板上的多个子桁架组，其中每个子桁架组包括多个ⅥA; 以及与多个VIA交织的多个金属层，其中多个子桁架组彼此堆叠以形成3-D波纹结构。

5. 发明授权

US07839052B2 Sensing membrane with stress releasing structure and micro-electro-mechanical system device using the same 有权
标题翻译：具有应力释放结构的感应膜和使用其的微机电系统装置
公开(公告)号：US07839052B2
公开(公告)日：2010-11-23
申请号：US12131961
申请日：2008-06-03
申请人： Chia-Yu Wu , Jien-Ming Chen
发明人： Chia-Yu Wu , Jien-Ming Chen
IPC分类号： H01L21/00 , H04R19/00
CPC分类号： H04R19/005 , B81B3/0072 , B81B2201/0257 , G01L9/0042
摘要： A sensing membrane applied to a micro-electro-mechanical system (MEMS) device includes a body, a stress releasing structure and a connecting portion. The stress releasing structure for releasing a membrane residual stress surrounds the body. The stress releasing structure has several first perforations and several second perforations. The first perforations are located between the body and the second perforations. The connecting portion connects the stress releasing structure and a substrate of the MEMS device.
摘要翻译：应用于微电子机械系统（MEMS）装置的感测膜包括主体，应力释放结构和连接部分。用于释放膜残余应力的应力释放结构围绕身体。应力释放结构具有几个第一穿孔和几个第二穿孔。第一穿孔位于身体和第二穿孔之间。连接部分连接应力释放结构和MEMS装置的基板。

6. 发明申请

US20090151455A1 SENSING MEMBRANE AND MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE USING THE SAME 有权
标题翻译：感光膜和微电子机械系统装置
公开(公告)号：US20090151455A1
公开(公告)日：2009-06-18
申请号：US12131961
申请日：2008-06-03
申请人： Chia-Yu Wu , Jien-Ming Chen
发明人： Chia-Yu Wu , Jien-Ming Chen
IPC分类号： G01N29/00
CPC分类号： H04R19/005 , B81B3/0072 , B81B2201/0257 , G01L9/0042
摘要： A sensing membrane applied to a micro-electro-mechanical system (MEMS) device includes a body, a stress releasing structure and a connecting portion. The stress releasing structure for releasing a membrane residual stress surrounds the body. The stress releasing structure has several first perforations and several second perforations. The first perforations are located between the body and the second perforations. The connecting portion connects the stress releasing structure and a substrate of the MEMS device.
摘要翻译：应用于微电子机械系统（MEMS）装置的感测膜包括主体，应力释放结构和连接部分。用于释放膜残余应力的应力释放结构围绕身体。应力释放结构具有几个第一穿孔和几个第二穿孔。第一穿孔位于身体和第二穿孔之间。连接部分连接应力释放结构和MEMS装置的基板。

7. 发明申请

US20130160554A1 CAPACITIVE TRANSDUCER MANUFACTURING METHOD, AND MULTI-FUNCTION DEVICE 有权
标题翻译：电容式传感器制造方法及多功能装置
公开(公告)号：US20130160554A1
公开(公告)日：2013-06-27
申请号：US13456206
申请日：2012-04-25
申请人： Jien-Ming Chen , Chin-Wen Huang , Chin-Hung Wang , Hsin-Li Lee
发明人： Jien-Ming Chen , Chin-Wen Huang , Chin-Hung Wang , Hsin-Li Lee
IPC分类号： G01N29/04 , G01L9/12 , H01R43/00 , G01R27/26
CPC分类号： H04R19/04 , B06B1/0292 , B81B3/0072 , B81B2201/0257 , G01D5/2417 , H04R19/00 , H04R2201/003 , Y10T29/49117
摘要： A capacitive transducer and manufacturing method thereof is provided. A multifunction device including a plurality of the capacitive transducers is also provided, where the capacitive transducers are disposed on a substrate and include at least one microphone and at least one pressure sensor or ultrasonic device.
摘要翻译：提供一种电容式换能器及其制造方法。还提供了包括多个电容换能器的多功能装置，其中电容换能器设置在基板上并且包括至少一个麦克风和至少一个压力传感器或超声波装置。

8. 发明授权

US09154886B2 Capacitive transducer manufacturing method, and multi-function device 有权
标题翻译：电容式传感器制造方法及多功能装置
公开(公告)号：US09154886B2
公开(公告)日：2015-10-06
申请号：US13456206
申请日：2012-04-25
申请人： Jien-Ming Chen , Chin-Wen Huang , Chin-Hung Wang , Hsin-Li Lee
发明人： Jien-Ming Chen , Chin-Wen Huang , Chin-Hung Wang , Hsin-Li Lee
IPC分类号： G01L9/00 , H04R19/04 , G01D5/241 , B81B3/00 , B06B1/02 , H04R19/00
CPC分类号： H04R19/04 , B06B1/0292 , B81B3/0072 , B81B2201/0257 , G01D5/2417 , H04R19/00 , H04R2201/003 , Y10T29/49117
摘要： A capacitive transducer and manufacturing method thereof is provided. A multifunction device including a plurality of the capacitive transducers is also provided, where the capacitive transducers are disposed on a substrate and include at least one microphone and at least one pressure sensor or ultrasonic device.
摘要翻译：提供一种电容式换能器及其制造方法。还提供了包括多个电容换能器的多功能装置，其中电容换能器设置在基板上并且包括至少一个麦克风和至少一个压力传感器或超声波装置。

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