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    • 1. 发明授权
    • Gated-varactors
    • 门控变容二极管
    • US08273616B2
    • 2012-09-25
    • US12708603
    • 2010-02-19
    • Chia-Chung ChenChewn-Pu JouChin-Wei KuoSally Liu
    • Chia-Chung ChenChewn-Pu JouChin-Wei KuoSally Liu
    • H01L21/00
    • H01L29/93H01L29/7391H01L29/94
    • Various embodiments of the invention provide a varactor structure that, depends on configurations, can provide a C-V characteristic based on one or a combination of a reverse bias junction capacitor, a channel capacitor, and an oxide capacitor. The junction capacitor is formed by reverse biasing the P+ source region and the N-well. The channel capacitance is formed between the P+ source region and the N+ drain region, and the oxide capacitor is formed in the gate oxide area. Depending on biasing one or a combination of the gate voltage VG, the source voltage VS, and the drain voltage VD, embodiments can utilize one or a combination of the above capacitors. Other embodiments using the varactors in a Voltage-Controlled Oscillator (VCO) are also disclosed.
    • 本发明的各种实施例提供了一种变容二极管结构,其取决于配置,可以提供基于反向偏置结电容器,沟道电容器和氧化物电容器中的一个或其组合的C-V特性。 结电容器通过反向偏置P +源极区域和N阱来形成。 在P +源极区域和N +漏极区域之间形成沟道电容,并且在栅极氧化物区域形成氧化物电容器。 取决于偏压栅极电压VG,源极电压VS和漏极电压VD的一个或组合,实施例可以利用上述电容器中的一个或组合。 还公开了在压控振荡器(VCO)中使用变容二极管的其它实施例。
    • 9. 发明授权
    • Integrated circuits and methods of forming the same
    • 集成电路及其形成方法
    • US08362591B2
    • 2013-01-29
    • US12795734
    • 2010-06-08
    • Hsiao-Tsung YenHsien-Pin HuJhe-Ching LuChin-Wei KuoMing-Fa ChenSally Liu
    • Hsiao-Tsung YenHsien-Pin HuJhe-Ching LuChin-Wei KuoMing-Fa ChenSally Liu
    • H01L29/93
    • H01L27/016H01L29/93
    • A three-dimensional integrated circuit includes a semiconductor substrate where the substrate has an opening extending through a first surface and a second surface of the substrate and where the first surface and the second surface are opposite surfaces of the substrate. A conductive material substantially fills the opening of the substrate to form a conductive through-substrate-via (TSV). An active circuit is disposed on the first surface of the substrate, an inductor is disposed on the second surface of the substrate and the TSV is electrically coupled to the active circuit and the inductor. The three-dimensional integrated circuit may include a varactor formed from a dielectric layer formed in the opening of the substrate such that the conductive material is disposed adjacent the dielectric layer and an impurity implanted region disposed surrounding the TSV such that the dielectric layer is formed between the impurity implanted region and the TSV.
    • 三维集成电路包括半导体衬底,其中衬底具有延伸穿过衬底的第一表面和第二表面的开口,并且其中第一表面和第二表面是与衬底相对的表面。 导电材料基本上填充衬底的开口以形成导电的通过衬底通孔(TSV)。 有源电路设置在衬底的第一表面上,电感器设置在衬底的第二表面上,并且TSV电耦合到有源电路和电感器。 三维集成电路可以包括由形成在基板的开口中的电介质层形成的变容二极管,使得导电材料邻近介电层设置,以及设置在TSV周围的杂质注入区域,使得介电层形成在 杂质注入区和TSV。