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1. 发明授权

US06577431B2 System of angular displacement control for micro-mirrors 失效
公开(公告)号：US06577431B2
公开(公告)日：2003-06-10
申请号：US09880813
申请日：2001-06-15
申请人： Cheng-Tang Pan , Shin-Chou Chen , Gwo-Bin Lee , Hsien-Min Yang , Chen-Sho Shey
发明人： Cheng-Tang Pan , Shin-Chou Chen , Gwo-Bin Lee , Hsien-Min Yang , Chen-Sho Shey
IPC分类号： G02F109
CPC分类号： B81B3/0062 , G02B26/0833 , G02B26/0841 , G02B26/085 , G02B26/0866 , H01H50/005
摘要： A system of angular displacement control for micro mirrors includes a stationary vertical element, a stationary horizontal element and an interference eliminator. Alternatively, the stationary horizontal element holds micro mirrors in place during transportation for avoiding vibration and collision. The stationary vertical element orientates the micro mirrors in the vertical position. The interference eliminator eliminates magnetic interference that could affect the operation of the micro mirrors. The micro mirrors having interference eliminators are capable of remaining unaffected by operations of other micro mirrors.

2. 发明授权

US06414803B1 Micro magneto-controlled optical path-guiding platform 失效
标题翻译：微磁控光路引导平台
公开(公告)号：US06414803B1
公开(公告)日：2002-07-02
申请号：US09917754
申请日：2001-07-31
申请人： Cheng-Tang Pan , Min-Chieh Chou , Sheng-Chih Shen , Kun-Lung Lin , Yu-Hsi Chao
发明人： Cheng-Tang Pan , Min-Chieh Chou , Sheng-Chih Shen , Kun-Lung Lin , Yu-Hsi Chao
IPC分类号： G02B504
CPC分类号： G02F1/3137 , G02B6/266 , G02B6/3528 , G02B6/3546 , G02F1/095
摘要： A method of making a micro magneto-controlled optical path-guiding platform comprises an optical path-guiding platform, couples of the optical routes, a micro magneto-flux prism located at the intersection of the optical route on the topside of the platform, and a magnetic field generator oppositely mounted under the location of the micro magneto-flux prism of the platform bottom side respectively. Therefore, the reflection ratio and refraction ratio to the incident optical signal traveling through this designed micro magneto-flux prism will be completely manipulated by adjusting the magnetic field intensity that is generated by the magnetic generator. Conclusively, this invention can be used to change the traveling orientation of the optical route or control the optical energy intensity as desired.
摘要翻译：一种制造微型磁控光路引导平台的方法，包括光路引导平台，光路的耦合，位于平台顶部光路上交叉点的微磁通量棱镜，以及分别相对地安装在平台底侧的微磁通量棱镜的位置下的磁场发生器。因此，通过调整由磁性发生器产生的磁场强度，将完全控制通过该设计的微磁通量棱镜传播的入射光信号的反射率和折射率。最后，本发明可用于改变光路的行进方向或者根据需要控制光能强度。

3. 发明授权

US06621955B2 Method for fabricating integrated micro spherical lens for optical fiber switch and the device made therefrom 失效
公开(公告)号：US06621955B2
公开(公告)日：2003-09-16
申请号：US09878396
申请日：2001-06-12
申请人： Ynh-Sheng Lin , Yu-Hsi Chao , Cheng-Tang Pan , Kun-Lung Lin
发明人： Ynh-Sheng Lin , Yu-Hsi Chao , Cheng-Tang Pan , Kun-Lung Lin
IPC分类号： G02B632
CPC分类号： G02B6/3582 , G02B6/12004 , G02B6/32 , G02B6/3512 , G02B6/3538 , G02B6/3546 , G02B6/3584
摘要： The present invention provides a fabrication process for making an integrated micro spherical lens for an optical switch. Through a semiconductor micro imaging process and a wet-etching process of micro electromechanical working, a plurality of V-shape grooves and mesas are formed on the surface of a base. A further micro imaging process, an etching process and a heat tempering process are used to form a micro spherical lens on the mesa, so that an integrated micro spherical lens and fiber array can be precisely arranged.

4. 发明授权

US06746823B2 Fabricating process of non-gap 3-D microstructure array mold core 有权
标题翻译：非间隙3-D微结构阵列模芯的制造工艺
公开(公告)号：US06746823B2
公开(公告)日：2004-06-08
申请号：US10161421
申请日：2002-06-01
申请人： Kun-Lung Lin , Min-Chieh Chou , Cheng-Tang Pan
发明人： Kun-Lung Lin , Min-Chieh Chou , Cheng-Tang Pan
IPC分类号： G03F900
CPC分类号： G03F7/0017 , C23C26/02 , G03F7/0005 , G03F7/40 , Y10T428/24612
摘要： A process of fabricating a non-gap 3-D microstructure array mold core comprises a first step in which a buffer layer is coated on a substrate. A photomask layer is then coated of the buffer layer. A pattern is subsequently formed on the photomask by photo-lithography. The patterned photomask layer is subjected to a reflow by which a microstructure array is formed on the photomask layer. The microstructure array is coated with a metal conductive layer. The microgaps of the microstructure array are eliminated by an electrocasting layer which is coated on the microstructure array. The non-gap microstructure array mold core so fabricated is made into a metal molding tool by microinjection molding or microthermo-pressure molding.
摘要翻译：制造非间隙3-D微结构阵列模芯的工艺包括第一步骤，其中将缓冲层涂覆在基底上。然后将光掩模层涂覆在缓冲层上。随后通过光刻法在光掩模上形成图案。对图案化的光掩模层进行回流处理，在光掩模层上形成微结构阵列。微结构阵列涂覆有金属导电层。通过涂覆在微结构阵列上的电铸层消除了微结构阵列的微小间隙。如此制造的非间隙微结构阵列模芯通过显微注射成型或微量热压成型制成金属成型工具。

5. 发明授权

US06656668B2 Process method of using excimer laser for forming micro spherical and non-spherical polymeric structure array 有权
公开(公告)号：US06656668B2
公开(公告)日：2003-12-02
申请号：US09934654
申请日：2001-08-23
申请人： Hung-Yin Tsai , Cheng-Tang Pan , Min-Chieh Chou , Shih-Chou Chen , Yuh-Sheng Lin
发明人： Hung-Yin Tsai , Cheng-Tang Pan , Min-Chieh Chou , Shih-Chou Chen , Yuh-Sheng Lin
IPC分类号： G03F700
CPC分类号： G03F7/0005 , G03F1/50 , Y10S430/146
摘要： A process method of using excimer laser for forming micro spherical and non-spherical polymeric structure array includes a photomask which has a selected curved pattern formed thereon. The curved pattern has non-constant widths along a straight line direction. An excimer laser beam source is deployed to project through the photomask on a substrate coated with a polymeric material while the substrate is moving in a direction normal to the straight line direction for the polymeric material to receive laser beam projection with different time period. The polymeric material thus may be etched to different depth to form a three dimensional pattern desired. By projecting and etching the polymeric material two times at different directions or through different photomask patterns, a sphere like or non-sphere like surface of micro array structure may be obtained.

6. 发明授权

US06251565B1 Method of making molds for manufacturing multiple-lead microstructures 有权
标题翻译：制造多铅微结构的模具的方法
公开(公告)号：US06251565B1
公开(公告)日：2001-06-26
申请号：US09376665
申请日：1999-08-16
申请人： Hsi-Harng Yang , Min-Chieh Chou , Cheng-Tang Pan , Chuan-Kang Mu
发明人： Hsi-Harng Yang , Min-Chieh Chou , Cheng-Tang Pan , Chuan-Kang Mu
IPC分类号： C25D110
CPC分类号： C25D1/10 , B81C99/009 , G03F7/0035 , Y10S430/168
摘要： A method of making molds for use in manufacturing high precision and high density multiple-lead microstructures. If employs microphoto etching process used in semiconductor manufacturing process to project X-ray and ultraviolet light on a photoresist layer through a X-ray co-mask and a generally used mask to produce exposing process. Through etching and electroplating processes, a plurality of identical punch molds may be made. The punch molds are aligned stacked up one upon the other until a desired height is reached. The stacked up punch molds are electroplated to form a lead punch die for producing microparts desired.
摘要翻译：一种制造用于制造高精度和高密度多铅微结构的模具的方法。如果使用半导体制造工艺中使用的微照片蚀刻工艺通过X射线辅助掩模和通常使用的掩模将X射线和紫外光投影在光致抗蚀剂层上以产生曝光过程。通过蚀刻和电镀工艺，可以制成多个相同的冲模。冲压模具一个一个地堆叠在一起直到达到所需的高度。堆叠的冲压模具被电镀以形成用于生产所需的微孔的铅冲模。

7. 发明授权

US06861676B2 Fabricating process for forming flexible substrate 有权
标题翻译：用于形成柔性基板的制造工艺
公开(公告)号：US06861676B2
公开(公告)日：2005-03-01
申请号：US09983827
申请日：2001-10-26
申请人： Cheng-Tang Pan , Hung-Yi Lin , Wu-Tung Chuan
发明人： Cheng-Tang Pan , Hung-Yi Lin , Wu-Tung Chuan
IPC分类号： H01L27/32 , H01L51/56 , H01L39/227
CPC分类号： H01L51/56 , H01L27/3281
摘要： The present invention provides a fabricating process for forming a flexible substrate, including the steps of: providing the substrate which is composed of a top plate and a bottom plate, and then a positive electrode layer and a organic electro-luminescence (EL) are formed in sequence on the bottom plate; after that, a same axial downward patterned template is pressed onto the bottom plate for “micro-patterning”, and thus the positive electrode layer and the organic electro-luminescence (EL) layer on the bottom plate are patterned in the same axial; providing a top plate, on which a metal layer as a negative electrode is formed; similarly, a same axial upper patterned template is pressed onto the top plate for “micro-patterning”, and thus the metal layer on the top plate is patterned in the same axial; finally, superimposing the top plate on the bottom plate so that the axis of patterned positive electrode layer and patterned organic EL layer crisscross with the axis of patterned metal layer to construct a chessboard-like structure.
摘要翻译：本发明提供一种用于形成柔性基板的制造方法，包括以下步骤：提供由顶板和底板构成的基板，然后形成正极层和有机电致发光（EL）顺序在底板上; 之后，将相同的轴向向下图案化的模板压在底板上进行“微图案化”，从而将底板上的正电极层和有机电致发光（EL）层在同一轴向上图案化; 提供顶板，其上形成作为负极的金属层; 类似地，将相同的轴向上部图案化模板压在顶板上用于“微图案化”，因此顶板上的金属层以相同的轴向图案化; 最后，将顶板叠加在底板上，使得图案化的正极层和图案化的有机EL层的轴线与图案化金属层的轴线交叉以构成棋盘状结构。

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