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    • 7. 发明申请
    • METHOD FOR CONFIGURING AN OPTICAL MODULATOR
    • 用于配置光学调制器的方法
    • US20160306256A1
    • 2016-10-20
    • US14848707
    • 2015-09-09
    • Chen-Kuo Sun
    • Chen-Kuo SunDingbo Chen
    • G02F1/313G02B6/138G02B6/136
    • G02F1/3133G02B6/12004G02B6/136G02B6/138G02B2006/12061G02F1/065G02F2001/3135
    • A method for manufacturing an electro-optically coupled switch in accordance with the present invention requires a sequential reconfiguration of a layer of semiconductor material. To begin, a base member is created wherein the semiconductor layer is positioned on a layer of insulator material with the insulator material positioned between the semiconductor layer and a semiconductor substrate. In sequence, with a first etch, the semiconductor layer is etched to create waveguides on opposite sides of a slot. In a second etch, the slot is deepened to expose the layer of insulator material in the slot. With a third contact pad doping process, pads can be positioned on top of the layer of insulator material for electrical contact with the respective waveguides. Metal contacts can then be placed on the contact pads, the slot can be filled with an electro-optical polymer and, if needed, the polymer can be poled.
    • 根据本发明的用于制造电光耦合开关的方法需要半导体材料层的顺序重新配置。 首先,制造基底构件,其中半导体层位于绝缘体材料层上,绝缘材料位于半导体层和半导体衬底之间。 顺序地,通过第一蚀刻,蚀刻半导体层以在槽的相对侧上产生波导。 在第二蚀刻中,加深槽以暴露槽中的绝缘体材料层。 利用第三接触焊盘掺杂工艺,焊盘可以位于绝缘体材料层的顶部,用于与各个波导电接触。 然后可以将金属触点放置在接触垫上,插槽可以用电光聚合物填充,并且如果需要,聚合物可以被极化。