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    • 6. 发明授权
    • Planar sensor and a method for measuring the temperature of same
    • 平面传感器和测量温度的方法
    • US07279133B2
    • 2007-10-09
    • US10029049
    • 2001-12-20
    • David K. ChenDavid P. WallaceDa Yu WangWalter T. SymonsPaul C. KikuchiYingjie LinLora ThrunMark A. ShostJoseph G. Ralph
    • David K. ChenDavid P. WallaceDa Yu WangWalter T. SymonsPaul C. KikuchiYingjie LinLora ThrunMark A. ShostJoseph G. Ralph
    • B32B5/02B32B27/12B32B27/04G01N27/00G01N27/26
    • G01K7/223G01N27/419Y10T436/207497
    • In a planar oxygen sensor having a pump cell, a reference cell, a sensor chamber and a heating device, a ground plane electrode is provided and includes a sensing portion having a first sense lead and a second sense lead and a measuring portion having a first measuring lead and a second measuring lead, wherein the first measuring lead and the second measuring lead have increased surface area relative to said sensing portion such that the resistance between the first measuring lead and the second measuring lead is reduced and wherein the first measuring lead is disposed so as to be communicated with the first sense lead and the second measuring lead is disposed so as to be communicated with the second sense lead. Also, in a planar oxygen sensor having a pump cell, a reference cell, a sensor chamber, a heating device and a ground plane electrode that includes a sensing portion having a first sense lead and a second sense lead and a measuring portion having a first measuring lead and a second measuring lead, a method for measuring the temperature of the planar oxygen sensor is provided and includes obtaining a temperature measurement device, communicating the temperature measurement device with the first measuring lead and the second measuring lead, operating the planar oxygen sensor so as to cause the heating device to heat the planar oxygen sensor, and measuring the resistance between the first measuring lead and the second measuring lead.
    • 在具有泵电池,参考电池,传感器室和加热装置的平面氧传感器中,提供接地平面电极,并且包括具有第一感测引线和第二感测引线的感测部分和具有第一 测量引线和第二测量引线,其中所述第一测量引线和所述第二测量引线相对于所述感测部分具有增加的表面积,使得所述第一测量引线和所述第二测量引线之间的电阻减小,并且其中所述第一测量引线为 被布置成与第一感测引线连通,并且第二测量引线被设置成与第二感测引线连通。 此外,在具有泵电池,参考电池,传感器室,加热装置和接地平面电极的平面氧传感器中,包括具有第一感测引线和第二感测引线的感测部分和具有第一感测引线的测量部分 测量引线和第二测量引线,提供了一种用于测量平面氧传感器的温度的方法,包括获得温度测量装置,将温度测量装置与第一测量引线和第二测量引线连通,操作平面氧传感器 以使加热装置加热平面氧传感器,并测量第一测量引线和第二测量引线之间的电阻。
    • 7. 发明授权
    • Lapping carrier, apparatus for lapping a wafer and method of fabricating a lapping carrier
    • 研磨载体,用于研磨晶片的装置和制造研磨载体的方法
    • US07196009B2
    • 2007-03-27
    • US10434772
    • 2003-05-09
    • Brian L. BexDavid K. Chen
    • Brian L. BexDavid K. Chen
    • H01L21/302
    • B24B37/28
    • A method of fabricating a lapping carrier is provided that includes the steps of defining at least one opening extending through a workpiece that is sized to receive a wafer, and cryogenically tempering the workpiece to produce a lapping carrier. By cryogenically tempering the workpiece, the conversion of the crystalline structure of the workpiece to a martensite crystalline structure is enhanced, thereby improving the hardness of the lapping carrier. A lapping carrier is also provided that has a crystalline structure, of which at least 70% is a martensite crystalline structure. An apparatus for lapping a wafer is further provided that includes a hardened lapping carrier and at least one lapping plate proximate the lapping carrier for lapping wafer(s) disposed within the at least one opening defined by the lapping carrier.
    • 提供了一种制造研磨载体的方法,其包括以下步骤:限定延伸穿过工件的至少一个开口,其尺寸设计成接收晶片,并对工件进行低温回火以产生研磨载体。 通过对工件进行低温回火,提高了工件的晶体结构转变为马氏体晶体结构,从而提高了研磨载体的硬度。 还提供了具有晶体结构的研磨载体,其中至少70%是马氏体晶体结构。 还提供了一种用于研磨晶片的装置,其包括硬化的研磨载体和靠近研磨载体的至少一个研磨板,用于研磨设置在由研磨载体限定的至少一个开口内的晶片。
    • 10. 发明授权
    • Hydrogen sensing process
    • 氢感测过程
    • US06638416B2
    • 2003-10-28
    • US09961661
    • 2001-09-24
    • Da Yu WangDavid K. ChenKaius K. PolikarpusWalter T. Symons
    • Da Yu WangDavid K. ChenKaius K. PolikarpusWalter T. Symons
    • G01N27407
    • G01N27/4072G01N33/005
    • A hydrogen sensor and process for measuring hydrogen gas concentrations includes a pump cell and a measuring cell. The pump cell includes a first conducting electrolyte layer having a top and a bottom surface, and an electrode disposed on the top and bottom surfaces, wherein the top electrode is in communication with an unknown concentration of hydrogen gas. The measuring cell includes a second conducting electrolyte layer having a top and a bottom surface, and an electrode disposed on the top and bottom surfaces, wherein the bottom electrode is in communication with a reference gas source. A diffusion-limiting barrier is disposed between the pump cell bottom electrode and the measuring cell top electrode, wherein hydrogen diffusion through the diffusion-limiting barrier is controlled by a Knudsen diffusion mechanism at hydrogen concentrations greater than about 40%.
    • 氢传感器和用于测量氢气浓度的方法包括泵浦单元和测量单元。 泵电池包括具有顶表面和底表面的第一导电电解质层和设置在顶表面和底表面上的电极,其中顶电极与未知浓度的氢气连通。 测量单元包括具有顶表面和底表面的第二导电电解质层和设置在顶表面和底表面上的电极,其中底电极与参考气体源连通。 扩散限制屏障设置在泵电池底部电极和测量池顶部电极之间,其中通过扩散限制屏障的氢气扩散通过克氏扩散机构在大于约40%的氢浓度下控制。