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1. 发明授权

US08913884B2 Heater block for a rapid thermal processing apparatus 有权
标题翻译：加热器块用于快速热处理设备
公开(公告)号：US08913884B2
公开(公告)日：2014-12-16
申请号：US13391410
申请日：2010-08-04
申请人： Chang Kyo Kim , Tae Jong Ki , Choul Soo Kim , Ki Nam Kim
发明人： Chang Kyo Kim , Tae Jong Ki , Choul Soo Kim , Ki Nam Kim
IPC分类号： F26B3/30 , H05B3/74
CPC分类号： H05B3/744
摘要： The present invention relates to a heater block for a rapid thermal processing apparatus, and more particularly, to a heater block in which heating lamps are densely arranged in a tessellation. The tessellation has a structure such that the plurality of heating lamps are arranged at right angles to form a zigzag line, and the thus-formed zigzagged line is repeated such that the zigzagged line is combined with the adjacent zigzagged line. According to the present invention, a temperature gradient caused by a void between heating lamps is prevented, and heating lamps are densely arranged to increase heat density for a heat radiation area as opposed to conventional heater blocks, thus achieving improved heat treatment efficiency using less energy. In addition, fully uniform temperature control is enabled, in terms of sector allocated temperature control, even when the area to be independently controlled is enlarged as opposed to conventional heater blocks, thereby simplifying the configuration of a temperature control circuit.
摘要翻译：本发明涉及一种用于快速热处理装置的加热器块，更具体地说，涉及一种加热块，其中加热灯密集地布置成镶嵌。该细分具有这样的结构，使得多个加热灯以直角排列以形成之字形线，并且重复如此形成的之字形线，使得之字形线与相邻之字形线组合。根据本发明，防止了由加热灯之间的空隙引起的温度梯度，与传统的加热器块相比，加热灯密集地布置成增加了散热面积的热密度，从而使用更少的能量来实现提高的热处理效率。此外，就扇区分配的温度控制而言，即使独立控制的区域与常规的加热器块相反，也能够进行完全均匀的温度控制，从而简化了温度控制电路的结构。

2. 发明申请

US20120207456A1 HEATER BLOCK FOR A RAPID THERMAL PROCESSING APPARATUS 有权
标题翻译：用于快速热处理装置的加热器块
公开(公告)号：US20120207456A1
公开(公告)日：2012-08-16
申请号：US13391410
申请日：2010-08-04
申请人： Chang Kyo Kim , Tae Jong Ki , Choul Soo Kim , Ki Nam Kim
发明人： Chang Kyo Kim , Tae Jong Ki , Choul Soo Kim , Ki Nam Kim
IPC分类号： F27D11/12
CPC分类号： H05B3/744
摘要： The present invention relates to a heater block for a rapid thermal processing apparatus, and more particularly, to a heater block in which heating lamps are densely arranged in a tessellation. The tessellation has a structure such that the plurality of heating lamps are arranged at right angles to form a zigzag line, and the thus-formed zigzagged line is repeated such that the zigzagged line is combined with the adjacent zigzagged line. According to the present invention, a temperature gradient caused by a void between heating lamps is prevented, and heating lamps are densely arranged to increase heat density for a heat radiation area as opposed to conventional heater blocks, thus achieving improved heat treatment efficiency using less energy. In addition, fully uniform temperature control is enabled, in terms of sector allocated temperature control, even when the area to be independently controlled is enlarged as opposed to conventional heater blocks, thereby simplifying the configuration of a temperature control circuit.
摘要翻译：本发明涉及一种用于快速热处理装置的加热器块，更具体地说，涉及一种加热块，其中加热灯密集地布置成镶嵌。该细分具有这样的结构，使得多个加热灯以直角排列以形成之字形线，并且重复如此形成的之字形线，使得之字形线与相邻之字形线组合。根据本发明，防止了由加热灯之间的空隙引起的温度梯度，与传统的加热器块相比，加热灯密集地布置成增加了散热面积的热密度，从而使用更少的能量来实现提高的热处理效率。此外，就扇区分配的温度控制而言，即使独立控制的区域与常规的加热器块相反，也能够进行完全均匀的温度控制，从而简化了温度控制电路的结构。

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