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    • 1. 发明申请
    • Tunable-wavelength optical filter and method of manufacturing the same
    • 可调谐波长光学滤波器及其制造方法
    • US20050157392A1
    • 2005-07-21
    • US11045554
    • 2005-01-27
    • Chang ChoiMyung LeeChang KimChi JunYoun Kim
    • Chang ChoiMyung LeeChang KimChi JunYoun Kim
    • G02B5/20G02B1/10G02B5/08G02B26/00H01S3/10
    • G02B26/001G01J3/26G02B5/0833G02B6/29361G02B6/29389G02B6/29395
    • An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
    • 公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。 一种可调波长滤光器,包括下反射镜,其中硅膜和氧化物膜顺次层叠在多层中,并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。 由此,通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜,可以有选择地发射透射光相对于入射光的波长。
    • 4. 发明申请
    • Wavelength tunable optical filter
    • 波长可调滤光片
    • US20050135736A1
    • 2005-06-23
    • US10923838
    • 2004-08-24
    • Chang KimMyung LeeChi JunChang ChoiYun Kim
    • Chang KimMyung LeeChi JunChang ChoiYun Kim
    • G02B6/12G02B6/34G02B26/00G02B6/28
    • G02B26/001G02B2006/12109
    • Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.
    • 提供了一种法布里 - 珀罗型波长可调谐滤光器,包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体,并且其两端通过间隔件固定到所述第一反射镜; 多个电极,各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置,每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体,其将所述杆结构与所述多个固定装置连接并用作旋转轴线。 并且当由作为电热膨胀,电磁力或外力产生翘曲时,作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。 从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。
    • 5. 发明申请
    • Thermally actuated wavelength tunable optical filter
    • 热致振动波长可调滤光片
    • US20050105849A1
    • 2005-05-19
    • US10819271
    • 2004-04-07
    • Chang KimMyung LeeChang ChoiChi JunYun Kim
    • Chang KimMyung LeeChang ChoiChi JunYun Kim
    • G02B26/00G02B6/34G02B6/26G02B6/32G02B6/42
    • G02B6/29358G02B6/29395
    • Provided is a wavelength tunable optical filter of a micro-electro-mechanical system (MEMS). The wavelength tunable optical filter comprises two optical fibers or optical waveguides having their optical axes aligned to each other, two lens for collimating light at leading ends of the optical fibers or optical waveguides, two or more mirrors formed on a substrate, thermal actuators supporting at least one of the mirrors, wherein one of the mirrors is actuated by thermal expansion of the actuator. Because all mirrors are formed on a substrate, a manufacturing process is simple and an initial resonance wavelength can be precisely adjusted. Since the thermal expansion is generated by the electrical current directly flowing through the thermal actuators, it can be actuated by a low consumption power. Also, since an electrostatic force is not used to move the mirrors, a sticking phenomenon between the mirrors does not occur, and the wavelength can be tunable in a wide range. Since the planar mirrors are arranged in parallel, the light alignment is easily performed, the line width is constant and the insertion loss is low.
    • 提供了微机电系统(MEMS)的波长可调光滤波器。 波长可调光滤波器包括两个光纤或光波导,其光轴彼此对准,用于准直光纤​​或光波导前端的光的两个透镜,形成在基板上的两个或更多个反射镜,支持在 至少一个反射镜,其中一个反射镜由致动器的热膨胀致动。 因为所有的反射镜都形成在基板上,所以制造工艺简单,可以精确调节初始共振波长。 由于热膨胀是由直接流过热致动器的电流产生的,因此可以通过低功耗来致动。 此外,由于不使用静电力来移动反射镜,所以不会发生反射镜之间的粘附现象,并且波长可以在宽范围内可调。 由于平面镜平行配置,因此容易进行光对准,线宽恒定,插入损耗低。