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    • 2. 发明授权
    • Method of making contact posts for a microelectromechanical device
    • 制造微机电装置接触柱的方法
    • US09343242B2
    • 2016-05-17
    • US11767413
    • 2007-06-22
    • Lianjun Liu
    • Lianjun Liu
    • H01H1/00B81C1/00H01H1/06H01H1/20H01H11/04
    • H01H1/0036B81B2201/016B81C1/00103H01H1/06H01H1/20H01H11/04Y10T29/49105Y10T29/49174
    • A device 20 includes a substrate 22 coupled with a substrate 24 such that a volume 32 is formed between the substrates 22, 24. Contact posts 48, 50 on the substrate 22 and a cantilever beam structure 36 on the substrate 24 are located within the volume 32. The cantilever beam structure has a conductive trace 38 that is selectively contactable with the contact posts 48, 50 to yield a microelectromechanical (MEMS) switch within the volume 32. Fabrication methodology for making the contact posts 48, 50 entails forming post protrusions 68, 70 on the substrate 22 and shaping post protrusions 68, 70 so that they acquire a rounded shape. Input and output signal lines 42, 44 are constructed such that respective portions of input and output signal lines 42, 44 overly corresponding post protrusions 68, 70 and take on the shape of post protrusions 68, 70.
    • 器件20包括与衬底24耦合的衬底22,使得在衬底22,24之间形成体积32.衬底22上的接触柱48,50和衬底24上的悬臂梁结构36位于体积 悬臂梁结构具有能够与接触柱48,50选择性地接触的导电迹线38,以在体积32内产生微机电(MEMS)开关。用于制造接触柱48,50的制造方法需要形成后突起68 ,70在基板22上,并且成形柱突起68,70,使得它们获得圆形。 输入和输出信号线42,44被构造成使得输入和输出信号线42,44的相应部分过度对应的柱形突起68,70并且呈立柱形突起68,70的形状。
    • 8. 发明申请
    • MEMS CAPACITIVE DEVICE AND METHOD OF FORMING SAME
    • MEMS电容器及其形成方法
    • US20100214716A1
    • 2010-08-26
    • US12391083
    • 2009-02-23
    • Lianjun LiuMelvy F. Miller
    • Lianjun LiuMelvy F. Miller
    • H01G5/16H01L21/20H01L21/02
    • H01G5/011B81B3/0072B81B2201/0221H01G5/18H01L28/40H01L41/0973Y10T29/435
    • A MEMS capacitive device (90) includes a fixed capacitor plate (104) formed on a surface (102) of a substrate (100). A movable capacitor plate (114) is suspended above the fixed capacitor plate (104) by compliant members (116) anchored to the surface (102). A movable element (120) is positioned in spaced apart relationship from the movable capacitor plate (104) and has an actuator (130) formed thereon. Actuation of the actuator (130) causes abutment of a portion of the movable element (120) against a contact surface (136) of the movable plate (114). The abutment moves the movable plate (114) toward the fixed plate (104) to alter a capacitance (112) between the plates (104, 114). Another substrate (118) may be coupled to the substrate (100) such that a surface (126) of the substrate (118) faces the surface (102) of the substrate (100). The movable element (120) may be formed on the surface (126).
    • MEMS电容器件(90)包括形成在衬底(100)的表面(102)上的固定电容器板(104)。 可移动电容器板(114)通过锚固到表面(102)的柔性构件(116)悬置在固定电容器板(104)的上方。 可移动元件(120)与可移动电容器板(104)间隔开并且具有形成在其上的致动器(130)。 致动器(130)的致动导致可移动元件(120)的一部分抵靠可动板(114)的接触表面(136)。 抵靠将可移动板(114)移向固定板(104)以改变板(104,114)之间的电容(112)。 衬底(118)可以耦合到衬底(100),使得衬底(118)的表面(126)面向衬底(100)的表面(102)。 可移动元件(120)可以形成在表面(126)上。