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    • 2. 发明授权
    • Lateral PIN diode and method for processing same
    • 侧面PIN二极管及其加工方法
    • US06972469B2
    • 2005-12-06
    • US10730636
    • 2003-12-08
    • Raimund PeichlPhilipp Seng
    • Raimund PeichlPhilipp Seng
    • H01L29/868H01L31/058
    • H01L29/868
    • A PIN diode includes a first p-area, an n-area, and in between an intermediate area on a first surface of a substrate, wherein a doping concentration of the intermediate area is lower than a doping concentration of the p-area and lower than a doping concentration of the n-area. Further, the PIN diode includes a first electrically conductive member, which is arranged on a side of the p-area, which faces away from the intermediate area, and a second electrically conductive member, which is arranged on a side of the n-area, which faces away from the intermediate area. The PIN diode is preferably separated from the substrate by an insulating layer, covered by a further insulating layer on the surface, which faces away from the substrate, and laterally surrounded by a trench filled with an insulating material, such that it is essentially fully insulated and encapsulated.
    • PIN二极管包括第一p区域,n区域,并且在衬底的第一表面上的中间区域之间,其中中间区域的掺杂浓度低于p区域的掺杂浓度和较低 比n区域的掺杂浓度高。 此外,PIN二极管包括布置在p区域的背离中间区域的一侧的第一导电构件和布置在n区域的一侧上的第二导电构件 ,其面向远离中间区域。 PIN二极管优选通过绝缘层与衬底分离,绝缘层被表面上远离衬底的另一绝缘层覆盖,并且被填充有绝缘材料的沟槽横向围绕,使得其基本上完全绝缘 并封装。