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    • 3. 发明申请
    • METHOD OF MANUFACTURING LIQUID EJECTION HEAD
    • 制造液体喷射头的方法
    • US20130266901A1
    • 2013-10-10
    • US13796000
    • 2013-03-12
    • CANON KABUSHIKI KAISHA
    • Ken IkegameIsamu HoriuchiHyo TakahashiTakuma KodoiYasunori TakeiKenji Yabe
    • G03F7/20
    • G03F7/20G03F7/0037G03F7/2022
    • The manufacturing method includes forming, on a surface of a negative photosensitive resin layer formed on a substrate, a hollow having inclinations at both sides in a cross section taken along a plane perpendicular to a row direction of the ejection orifice, and then forming a latent image in the hollow, thereby forming the ejection orifice so that an angle between a side surface portion thereof and a normal to the outer opening in a cross section of the ejection orifice taken along a plane which passes through a center of the ejection orifice and is perpendicular to the row direction is larger than an angle between the side surface portion and the normal to the outer opening in a cross section of the ejection orifice taken along a plane which includes a center line of the ejection orifice in the row direction and is perpendicular to a substrate surface.
    • 该制造方法包括在形成于基板上的负型感光性树脂层的表面上形成有沿着与排出口的行方向垂直的平面截取的截面的两侧倾斜的中空部,然后形成潜在的 从而形成喷射口,使得其喷射口的横截面中的侧表面部分与外部开口的法线之间的角度沿着通过喷射孔的中心的平面截取并且是 沿着排列方向的垂直于垂直于喷射口的中心线的平面截取的喷射口的横截面中的垂直于行方向的角度大于侧表面部分和外部开口的法线之间的角度,并且垂直于 到基底表面。