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    • 5. 发明授权
    • Method for manufacturing liquid discharge head
    • 液体排放头的制造方法
    • US09315026B2
    • 2016-04-19
    • US14824954
    • 2015-08-12
    • CANON KABUSHIKI KAISHA
    • Takanobu ManabeYoshinori TagawaHiroyuki MurayamaShuhei Oya
    • B41J2/16G03F7/20
    • B41J2/1631B41J2/1603B41J2/162G03F7/203
    • A method for manufacturing a liquid discharge head. The method includes a first step of forming a telecentric measurement pattern A by exposure, the telecentric measurement pattern A being part of a measurement pattern that allows determination of inclination of a principal ray caused by an off-axis telecentric degree occurring in a projection exposing device, and a second step of forming a telecentric measurement pattern B by exposure under an exposure condition defocused from an exposure condition in the first step, the telecentric measurement pattern B being another part of the measurement pattern, which allows the determination of the inclination of the principal ray caused by the off-axis telecentric degree occurring in the projection exposing device. The off-axis telecentric degree is determined from an amount of misalignment between relative forming positions of the telecentric measurement patterns A and B and an amount of defocusing.
    • 一种液体排出头的制造方法。 该方法包括通过曝光形成远心测量图案A的第一步骤,作为测量图案的一部分的远心测量图案A,其允许确定由投影曝光装置中出现的偏轴远心度引起的主光线的倾斜度 以及第二步骤,通过在第一步骤中从曝光条件散焦的曝光条件下曝光来形成远心测量图案B,远心测量图案B是测量图案的另一部分,其允许确定 在投影曝光装置中产生的离轴远心度引起的主光线。 离轴远心度由远心测量图案A和B的相对成形位置与散焦量之间的未对准量确定。