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1. 发明申请

US20150262807A1 MASS SPECTROMETER 有权
标题翻译：质谱仪
公开(公告)号：US20150262807A1
公开(公告)日：2015-09-17
申请号：US14722868
申请日：2015-05-27
申请人： CANON ANELVA CORPORATION
发明人： Megumi NAKAMURA , Masayuki SUGIYAMA , Lei CHEN , Yoshiyuki TAKIZAWA
IPC分类号： H01J49/42 , H01J49/24 , H01J49/14
CPC分类号： H01J49/4215 , H01J49/025 , H01J49/147 , H01J49/24
摘要： An object of the present invention is to provide a mass spectrometer having a simple structure and being capable of precisely measuring a total pressure and performing mass spectrometry with high precision. A mass spectrometer according to one embodiment includes a quadrupole configured to selectively pass therethrough an ion of a target gas having a predetermined mass-to-charge ratio among components of a measurement gas ionized by an ion source, an ion detector configured to detect an ion current value based on the ion of the target gas that passes through the quadrupole, a total pressure measurer configured to detect a photoelectric current value based on vacuum ultraviolet light generated when the ion source ionizes the measurement gas, and an arithmetic unit configured to calculate a partial pressure of the target gas by using the photoelectric current value and the ion current value.
摘要翻译：本发明的目的是提供一种结构简单且能够精确地测量总压力并以高精度进行质谱的质谱仪。根据一个实施方案的质谱仪包括四极，其构造成选择性地通过离子源离子化的测量气体的组分中具有预定质量比的目标气体的离子，被配置为检测离子的离子检测器基于通过四极杆的目标气体的离子的当前值，基于当离子源电离测量气体时产生的真空紫外光检测光电流值的总压力测量器，以及运算单元，被配置为计算通过使用光电流值和离子电流值对目标气体的分压。

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