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1. 发明申请

US20070256301A1 METHOD OF MANUFACTURING INKJET PRINTHEAD USING CROSSLINKED POLYMER 审中-公开
标题翻译：使用交联聚合物制造喷嘴的方法
公开(公告)号：US20070256301A1
公开(公告)日：2007-11-08
申请号：US11772541
申请日：2007-07-02
申请人： Byung-ha PARK , Young-ung Ha , Sung-joon Park , Jae-sik Min , Kyong-il Kim
发明人： Byung-ha PARK , Young-ung Ha , Sung-joon Park , Jae-sik Min , Kyong-il Kim
IPC分类号： B21D53/78
CPC分类号： B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49401
摘要： Provided is a method of manufacturing an inkjet printhead. The method includes: preparing a substrate having thereon a heater for heating ink and an electrode for supplying current to the heater; applying a negative photoresist composition to the substrate having thereon the heater and the electrode and patterning the same to form a passage forming layer that surrounds an ink passage; patterning the substrate having thereon the passage forming layer by photolithography at least twice to form a sacrificial layer having a planarized upper surface in a space surrounded by the passage forming layer; applying the negative photoresist composition to the passage forming layer and the sacrificial layer and patterning the same to form a nozzle layer having a nozzle; etching the substrate from the rear surface thereof to be perforated to form an ink supply hole; and removing the sacrificial layer, wherein the negative photoresist composition includes a prepolymer that has a glycidyl ether functional group or a ring-opened glycidyl ether functional group on monomer repeating units thereof and a phenolic novolak resin-based backbone, a bisphenol A-based backbone, or an alicyclic-based backbone. The sacrificial layer may be planarized using a chemical mechanical polishing process. Therefore, an upper surface of the sacrificial layer can be planarized, and thus, it is possible to easily control a shape and dimension of an ink passage, thereby improving uniformity of the ink passage.
摘要翻译：提供一种制造喷墨打印头的方法。该方法包括：制备其上具有用于加热油墨的加热器和用于向加热器供应电流的电极的基板; 在其上具有加热器和电极的基板上施加负性光致抗蚀剂组合物并将其图案化，以形成围绕墨水通道的通道形成层; 通过光刻将其上具有通道形成层的基板图案化至少两次，以在由通道形成层包围的空间中形成具有平坦化的上表面的牺牲层; 将所述负性光致抗蚀剂组合物施加到所述通道形成层和所述牺牲层并且将其图案化以形成具有喷嘴的喷嘴层; 从其背面蚀刻基板以进行穿孔以形成供墨孔; 并且除去牺牲层，其中负性光致抗蚀剂组合物包含在其单体重复单元上具有缩水甘油醚官能团或开环缩水甘油醚官能团的预聚物和酚醛清漆树脂基骨架，双酚A基骨架，或脂环族骨架。牺牲层可以使用化学机械抛光工艺进行平面化。因此，可以使牺牲层的上表面平坦化，从而可以容易地控制墨通道的形状和尺寸，从而提高墨通道的均匀性。

2. 发明申请

US20060044362A1 Inkjet printer head and method of fabricating the same 审中-公开
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US20060044362A1
公开(公告)日：2006-03-02
申请号：US11059501
申请日：2005-02-17
申请人： Kyong-il Kim , Myong-jong Kwon , Kwang-ryul Kim , Nam-kyun Kim , Byung-ha Park , Yong-shik Park , Eun-bong Han , Young-ung Ha , Sung-joon Park , Jae-Sik Min
发明人： Kyong-il Kim , Myong-jong Kwon , Kwang-ryul Kim , Nam-kyun Kim , Byung-ha Park , Yong-shik Park , Eun-bong Han , Young-ung Ha , Sung-joon Park , Jae-Sik Min
IPC分类号： B41J2/05
CPC分类号： B41J2/1631 , B41J2/14112 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1639 , B41J2/1642 , B41J2/1646
摘要： An inkjet printer head and method of fabricating the same includes a substrate having an ink-feed hole formed at a bottom surface of the substrate, a lower chamber formed at a top surface of the substrate, and a restrictor to fluid communicate between the ink-feed hole and the lower chamber, an oxide layer formed on the substrate, a heater formed on the oxide layer and disposed parallel to the surface of the substrate to cross the lower chamber, a lead electrically connected to the heater, and a nozzle layer disposed on the heater to configure an ink channel together with the lower chamber and having a nozzle at an upper portion of the nozzle layer. The inkjet printer head is capable of improving a thermal efficiency by heating the ink using both surfaces of the heater since the heater is disposed at a center of the ink chamber, and improving characteristics of the heater by making a current density and a current flow uniform since the heater is formed in a straight line without any bent or curved portion.
摘要翻译：喷墨打印机头及其制造方法包括：基板，其具有形成在基板的底面的供墨孔，形成在基板的顶面的下室，以及限流器，供给孔和下室，形成在基板上的氧化物层，形成在氧化物层上并且平行于基板的表面设置以跨越下部室的加热器，与该加热器电连接的引线以及设置在喷嘴层在加热器上配置墨水通道与下部腔室并且在喷嘴层的上部具有喷嘴。喷墨打印头能够通过使用加热器的两个表面加热墨水来提高热效率，因为加热器设置在墨水室的中心，并且通过使电流密度和电流流动均匀地提高加热器的特性由于加热器形成为直线而没有任何弯曲或弯曲部分。

3. 发明申请

US20060262157A1 Method of manufacturing inkjet printhead using crosslinked polymer 审中-公开
标题翻译：使用交联聚合物制造喷墨打印头的方法
公开(公告)号：US20060262157A1
公开(公告)日：2006-11-23
申请号：US11415198
申请日：2006-05-02
申请人： Byung-ha Park , Young-ung Ha , Sung-joon Park , Jae-sik Min , Kyong-il Kim
发明人： Byung-ha Park , Young-ung Ha , Sung-joon Park , Jae-sik Min , Kyong-il Kim
IPC分类号： B41J2/015 , G01D15/00
CPC分类号： B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49401
摘要： A method of manufacturing an inkjet printhead includes preparing a substrate having a heater to hear ink and an electrode to supply current to the heater, applying a crosslinked polymer resist composition to the substrate having the heater and the electrode and patterning the same, and forming a passage forming layer that surrounds an ink passage, patterning the substrate having the passage forming layer by photolithography at least twice, and forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer, applying the crosslinked polymer resist composition to the passage forming layer and the sacrificial layer and patterning the same, and forming a nozzle layer having a nozzle, etching the substrate from the bottom surface thereof to be perforated, and forming an ink supply hole, and removing the sacrificial layer, wherein the crosslinked polymer resist composition comprises a precursor polymer that is a phenolic novolak resin having glycidyl ether functional groups on repeating monomer units.
摘要翻译：一种制造喷墨打印头的方法包括：制备具有加热器以吸收油墨的基板和向加热器供应电流的电极，将交联聚合物抗蚀剂组合物施加到具有加热器和电极的基板上，并对其进行图案化，包围油墨通道的通道形成层，通过光刻法将具有通道形成层的基板图案化至少两次，并且在由通道形成层包围的空间中形成具有平坦化顶表面的牺牲层，将交联聚合物抗蚀剂组合物施加到通道形成层和牺牲层并对其进行图案化，并形成具有喷嘴的喷嘴层，从其底面蚀刻基板以进行穿孔，形成供墨孔，并除去牺牲层，其中交联聚合物抗蚀剂组合物包含具有gly的酚醛清漆树脂的前体聚合物重复单体单元上的椰子醚官能团。

4. 发明申请

US20060044347A1 Inkjet printer head and method of fabricating the same 审中-公开
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US20060044347A1
公开(公告)日：2006-03-02
申请号：US11071363
申请日：2005-03-04
申请人： Myong-jong Kwon , Kyong-il Kim , Kwang-ryul Kim , Nam-kyun Kim , Byung-ha Park , Yong-shik Park , Eun-bong Han , Young-ung Ha , Sung-joon Park , Jae-sik Min
发明人： Myong-jong Kwon , Kyong-il Kim , Kwang-ryul Kim , Nam-kyun Kim , Byung-ha Park , Yong-shik Park , Eun-bong Han , Young-ung Ha , Sung-joon Park , Jae-sik Min
IPC分类号： B41J2/135
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1645
摘要： An inkjet printer head includes a substrate having an ink-feed hole to supply ink stored in a cartridge to an ink chamber and a restrictor in fluid communication with the ink chamber, an oxide layer formed on the substrate, a heater disposed on the oxide layer above the restrictor and having fixed parts disposed on the oxide layer, slopes extending upward and away from the restrictor at an incline, and a parallel part extending between the slopes parallel to the substrate, a lead formed to be in electrical contact with the heater, a chamber layer formed to cover the lead and to define the ink chamber, and a nozzle layer formed on the chamber layer and having a nozzle. In the inkjet printer head, the lifespan of the heater may be extended since the heater is supported by the slopes, which function as a shock absorbing member when ink supply pressure or cavitation force is applied to a surface of the heater. In addition, since the heater does not have a right angle structure, the heater may be formed to have a uniform thickness even when a thin layer used for the heater is formed by a deposition method.
摘要翻译：一种喷墨打印头包括：具有供墨孔的基板，用于将存储在墨盒中的墨水供应到墨室;以及限制器，其与所述墨室流体连通;形成在所述基板上的氧化物层;设置在所述氧化物层上的加热器在限流器上方并且具有设置在氧化物层上的固定部分，倾斜在倾斜处向上延伸并远离限制器，并且平行部分在平行于衬底的斜面之间延伸，形成为与加热器电接触的引线，形成为覆盖引线并限定墨水室的室层，以及形成在室层上并具有喷嘴的喷嘴层。在喷墨打印机头中，加热器的寿命可以延长，因为加热器由斜面支撑，当墨水供应压力或空穴力施加到加热器的表面时，该斜面用作减震构件。此外，由于加热器不具有直角结构，即使当通过沉积方法形成用于加热器的薄层时，也可以将加热器形成为具有均匀的厚度。

5. 发明申请

US20060061629A1 Inkjet printer head and method of manufacturing the same 审中-公开
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US20060061629A1
公开(公告)日：2006-03-23
申请号：US11071350
申请日：2005-03-04
申请人： Sung-joon Park , Myong-jong Kwon , Kyong-il Kim , Kwang-ryul Kim , Nam-kyun Kim , Yong-shik Park , Eun-bong Han , Young-ung Ha , Jae-sik Min , Byung-ha Park
发明人： Sung-joon Park , Myong-jong Kwon , Kyong-il Kim , Kwang-ryul Kim , Nam-kyun Kim , Yong-shik Park , Eun-bong Han , Young-ung Ha , Jae-sik Min , Byung-ha Park
IPC分类号： B41J2/05
CPC分类号： B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1634 , B41J2/1639 , B41J2/1642 , B41J2/1646
摘要： An inkjet printer head includes a substrate having a manifold and an ink channel to supply ink, a nozzle plate formed on the substrate, a chamber formed between the substrate and the nozzle plate and extending toward the substrate and the nozzle plate, an electrode formed at an interface between the substrate and the nozzle plate and around the chamber, and a heater having both ends extending in contact with the electrode to be suspended on the chamber in direct contact with the ink and to generate bubbles from both surfaces thereof. The inkjet printer head is capable of improving manufacturing process efficiency by omitting a process of separately forming a heater passivation layer, operating the heater at low electric power by omitting the heater passivation layer, improving integrity of a nozzle by lowering a working voltage, and improving reliability in manufacturing processes by locating the suspended heater to be in parallel with the substrate and the electrode.
摘要翻译：喷墨打印头包括具有歧管和用于供应墨水的墨水通道的基板，形成在基板上的喷嘴板，形成在基板和喷嘴板之间并且朝向基板和喷嘴板延伸的腔室，形成在衬底和喷嘴板之间以及围绕室的界面，以及加热器，其两端延伸成与电极接触，以悬浮在与油墨直接接触的室上并从其两个表面产生气泡。喷墨打印头能够通过省略分开形成加热器钝化层的过程来提高制造工艺效率，通过省略加热器钝化层以低功率操作加热器，通过降低工作电压来改善喷嘴的完整性，并且改进通过将悬挂的加热器定位成与基底和电极平行的方式制造过程中的可靠性。

6. 发明授权

US07607759B2 Inkjet printhead and method of manufacturing the same 失效
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US07607759B2
公开(公告)日：2009-10-27
申请号：US11379291
申请日：2006-04-19
申请人： Jae-sik Min , Byung-ha Park , Kyong-il Kim , Young-ung Ha
发明人： Jae-sik Min , Byung-ha Park , Kyong-il Kim , Young-ung Ha
IPC分类号： B41J2/05
CPC分类号： B41J2/14137 , B41J2/1603 , B41J2/1628 , B41J2/1632 , B41J2002/1437
摘要： An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.
摘要翻译：喷墨打印头及其制造方法。在喷墨打印头中，基板包括形成在顶表面中以容纳要喷射的墨的墨室，形成在底表面中以将油墨供应到墨室的墨供给孔以及形成在墨室和墨室之间的限流器墨水供墨孔连接墨水室和墨水供墨孔。在基板上形成多个钝化层。在钝化层之间形成加热器和向加热器施加电流的导体。在钝化层上形成预定形状的传热层。形成环氧喷嘴层以覆盖钝化层和传热层。环氧喷嘴层形成有连接到墨室的喷嘴。

7. 发明授权

US07513605B2 Inkjet printhead with heat generating resistor 有权
标题翻译：具有发热电阻的喷墨打印头
公开(公告)号：US07513605B2
公开(公告)日：2009-04-07
申请号：US11379126
申请日：2006-04-18
申请人： Jae-sik Min , Young-ung Ha , Byung-ha Park , Myong-jong Kwon , Kyong-il Kim , Yong-shik Park
发明人： Jae-sik Min , Young-ung Ha , Byung-ha Park , Myong-jong Kwon , Kyong-il Kim , Yong-shik Park
IPC分类号： B41J2/05
CPC分类号： B41J2/1412 , B41J2/14129
摘要： An inkjet printhead includes a substrate having an ink chamber which is filled with ink to be ejected, a nozzle plate formed on the substrate in a position corresponding to the ink chamber, and a heat generating resistor installed in the ink chamber and formed of TiNx, where x ranges from 0.2 to 0.5, to generate ink bubbles in the ink by generating heat.
摘要翻译：喷墨打印头包括具有填充有要喷射的墨水的墨水室的基板，形成在与墨水腔相对应的位置的基板上的喷嘴板，以及安装在墨水室中并由TiNx形成的发热电阻，其中x的范围为0.2至0.5，以通过产生热量在墨中产生墨泡。

8. 发明申请

US20060232635A1 INKJET PRINTHEAD WITH HEAT GENERATING RESISTOR 有权
标题翻译： INKJET PRINTHEAD与发热电阻器
公开(公告)号：US20060232635A1
公开(公告)日：2006-10-19
申请号：US11379126
申请日：2006-04-18
申请人： Jae-sik Min , Young-ung Ha , Byung-ha Park , Myong-jong Kwon , Kyong-il Kim , Yong-shik Park
发明人： Jae-sik Min , Young-ung Ha , Byung-ha Park , Myong-jong Kwon , Kyong-il Kim , Yong-shik Park
IPC分类号： B41J2/05
CPC分类号： B41J2/1412 , B41J2/14129
摘要： An inkjet printhead includes a substrate having an ink chamber which is filled with ink to be ejected, a nozzle plate formed on the substrate in a position corresponding to the ink chamber, and a heat generating resistor installed in the ink chamber and formed of TiNx, where x ranges from 0.2 to 0.5, to generate ink bubbles in the ink by generating heat.
摘要翻译：喷墨打印头包括具有填充有要喷射的墨水的墨水室的基板，形成在与墨水腔相对应的位置的基板上的喷嘴板，以及安装在墨水室中并由TiN < 其中x的范围为0.2至0.5，以通过产生热量在墨中产生墨泡。

9. 发明申请

US20070046732A1 INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME 失效
标题翻译：喷墨打印机及其制造方法
公开(公告)号：US20070046732A1
公开(公告)日：2007-03-01
申请号：US11379291
申请日：2006-04-19
申请人： Jae-sik Min , Byung-ha Park , Kyong-il Kim , Young-ung Ha
发明人： Jae-sik Min , Byung-ha Park , Kyong-il Kim , Young-ung Ha
IPC分类号： B41J2/05
CPC分类号： B41J2/14137 , B41J2/1603 , B41J2/1628 , B41J2/1632 , B41J2002/1437
摘要： An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.
摘要翻译：喷墨打印头及其制造方法。在喷墨打印头中，基板包括形成在顶表面中以容纳要喷射的墨的墨室，形成在底表面中以将油墨供应到墨室的墨供给孔以及形成在墨室和墨室之间的限流器墨水供墨孔连接墨水室和墨水供墨孔。在基板上形成多个钝化层。在钝化层之间形成加热器和向加热器施加电流的导体。在钝化层上形成预定形状的传热层。形成环氧喷嘴层以覆盖钝化层和传热层。环氧喷嘴层形成有连接到墨室的喷嘴。

10. 发明授权

US06702428B2 Ink-jet printhead 失效
标题翻译：喷墨打印头
公开(公告)号：US06702428B2
公开(公告)日：2004-03-09
申请号：US10268083
申请日：2002-10-10
申请人： Sung-joon Park , Seo-hyun Cho , Sang-cheol Ko , Jae-sik Min , Kyong-il Kim , Byung-ha Park , Tae-kyun Kim , Myung-song Jung
发明人： Sung-joon Park , Seo-hyun Cho , Sang-cheol Ko , Jae-sik Min , Kyong-il Kim , Byung-ha Park , Tae-kyun Kim , Myung-song Jung
IPC分类号： B41J205
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645
摘要： A bubble-jet type ink-jet printhead has a structure in which a base plate, a barrier wall, and a nozzle plate are stacked. The base plate includes a substrate on which a recess is formed to a predetermined depth, an adiabatic layer formed on the substrate, a heater which is formed on the adiabatic layer and generates a thermal energy, and a passivation layer which is formed on the heater and passivates the heater. The barrier wall is stacked on the base plate, defines an ink chamber, which is disposed on the recess and has a recessed bottom surface, and defines an ink passage which communicates with the ink chamber. The nozzle plate is stacked on the barrier wall, has nozzles through which ink is ejected, and is formed at a location corresponding to a center of the ink chamber. Since a height of the barrier wall surrounding the ink chamber is reduced by the recess, delamination caused by ink soaked into the barrier wall can be prevented, and print performances such as a traveling property in a straight direction of ink droplets and ejection velocity of ink droplets, are improved.
摘要翻译：气泡喷墨式喷墨打印头具有堆叠基板，阻挡壁和喷嘴板的结构。基板包括基板，其上形成有预定深度的凹部，在基板上形成的绝热层，形成在绝热层上并产生热能的加热器，以及形成在加热器上的钝化层并加热加热器。阻挡壁堆叠在基板上，限定了一个墨水室，它设置在凹槽上并具有凹入的底面，并且限定了与墨水室连通的墨水通道。喷嘴板堆叠在阻挡壁上，具有喷嘴，墨通过喷嘴喷射，并且形成在与墨水室的中心对应的位置。由于凹部围绕墨水室的阻挡壁的高度被凹部减小，因此能够防止由墨水浸透到阻挡壁中的墨分层，并且墨滴直线方向的行进特性和墨滴的喷射速度等打印性能液滴，改进。

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