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    • 7. 发明授权
    • Thin film type solar cell and method for manufacturing the same
    • 薄膜型太阳能电池及其制造方法
    • US08889470B2
    • 2014-11-18
    • US12456121
    • 2009-06-11
    • Jae Ho KimChul Ju Hwang
    • Jae Ho KimChul Ju Hwang
    • H01L21/00H01L31/00H01L27/142H01L31/05
    • H01L31/05H01L31/0463Y02E10/50
    • A thin film type solar cell and a method for manufacturing the same is disclosed, wherein the method comprises sequentially depositing a front electrode layer and a semiconductor layer on a substrate; forming a first separating channel by removing predetermined portions of the front electrode layer and the semiconductor layer; forming a contact portion and a second separating channel by removing predetermined portions of the semiconductor layer; forming a first insulating layer in the first separating channel; and forming a plurality of rear electrodes at fixed intervals by each second separating channel interposed in-between, wherein each rear electrode is electrically connected with the front electrode layer through the contact portion. The present invention needs only one cleaning process after carrying out the laser-scribing process, whereby the yield can be improved owing to the simplified manufacturing process. According to the present invention, there is no need to alternately load the substrate to the vacuum-deposition apparatus and the laser-scribing apparatus, whereby the apparatus structure is simple and the manufacturing time is decreased, thereby resulting in the improved yield.
    • 公开了一种薄膜型太阳能电池及其制造方法,其特征在于,所述方法包括在基板上依次沉积前电极层和半导体层; 通过去除前电极层和半导体层的预定部分来形成第一分离通道; 通过去除所述半导体层的预定部分来形成接触部分和第二分离通道; 在所述第一分离通道中形成第一绝缘层; 并且通过插入其间的每个第二分隔通道以固定的间隔形成多个后电极,其中每个后电极通过接触部分与前电极层电连接。 本发明在进行激光划线处理之后仅需要一次清洁处理,由于简化的制造工艺,可以提高成品率。 根据本发明,不需要将基板交替地装载到真空沉积装置和激光划线装置,由此装置结构简单并且制造时间减少,从而提高产量。