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    • 4. 发明申请
    • Nanowire electromechanical device and method of fabricating the same
    • 纳米线机电装置及其制造方法
    • US20070051970A1
    • 2007-03-08
    • US11408054
    • 2006-04-21
    • Jae-Eun JangSeung-nam ChaYong-Wan JinByong-Gwon Song
    • Jae-Eun JangSeung-nam ChaYong-Wan JinByong-Gwon Song
    • H01L29/74
    • B81C1/00111B81B3/0086B81B2201/018H01H1/0094Y10S977/762Y10T29/49105
    • A nanowire electronmechanical device with an improved structure and a method of fabricating the same prevent burning of two nanowires which are switched due to contact with each other while providing stable on-off switching characteristics. The nanowire electromechanical device comprises: an insulating substrate; first and third electrodes spaced apart from each other on the insulating substrate, wherein a negative voltage and a positive voltage, varying within a predetermined range, are applied to the first and third electrodes, respectively; a second electrode interposed between the first and third electrodes, a constant positive voltage, lower than the voltage applied to the third electrode, being applied to the second electrode; a first nanowire vertically grown on the first electrode and charged with a negative charge; a second nanowire vertically grown on the second electrode and charged with a positive charge; and a third nanowire vertically grown on the third electrode and charged with an amount of positive charge corresponding to the magnitude of the varying voltage applied to the third electrode.
    • 具有改进的结构的纳米线电子机械装置及其制造方法防止由于彼此接触而切换的两个纳米线的燃烧,同时提供稳定的开 - 关开关特性。 纳米线机电装置包括:绝缘基板; 第一和第三电极在绝缘基板上彼此间隔开,其中在预定范围内变化的负电压和正电压分别施加到第一和第三电极; 插入在第一和第三电极之间的第二电极,施加到第二电极的恒定的正电压低于施加到第三电极的电压; 在第一电极上垂直生长并带有负电荷的第一纳米线; 在第二电极上垂直生长并带有正电荷的第二纳米线; 以及在第三电极上垂直生长的第三纳米线,并充有与施加到第三电极的变化电压的幅度相对应的一定量的正电荷。