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    • 1. 发明授权
    • Method of stimulating an oscillator control for capacitive measurement of strength, acceleration and/or rotation speed
    • 激励用于电容测量强度,加速度和/或转速的振荡器控制的方法
    • US06374671B1
    • 2002-04-23
    • US09254502
    • 1999-10-26
    • Bruno RyrkoGünter SpahlingerWalter Gutmann
    • Bruno RyrkoGünter SpahlingerWalter Gutmann
    • G01P904
    • G01C19/56B06B1/0215B06B2201/40B06B2201/52B06B2201/70G05D19/02
    • For the drive excitation, the method for the capacitive drive excitation of oscillators in sensors for the capacitive measurement of force, acceleration and, in particular, rotation rates according to the Coriolis principle, provides according to the invention for the use of high-frequency constant-amplitude pulse packets with no DC component, the width or phase angle of which can be adjusted in order to keep the oscillator speed constant, for the purpose of resetting or correcting tolerances. As an alternative, the method may also be configured in such a way that, in the case of oscillators with pairwise excitation electrodes which are symmetrical with respect to the rotation axis, equal constant-amplitude HF voltages are applied, the frequency of which is chosen to be substantially higher than the natural frequency of the oscillator, in which case a particular resulting force of attraction on the oscillator is brought about by shifting the phase angle between the drive voltages and, in the case of rotation rate sensors working according to the closed-loop principle, system resetting can also be ensured. By virtue of the invention, problems with coupling the excitation signal into the read channel of a micromechanical oscillator system can be brought well under control.
    • 对于驱动激励,根据科里奥利原理,用于电容测量力,加速度,特别是转速的传感器中的振荡器的电容驱动激励方法提供了根据本发明使用的高频常数 没有直流分量的幅度脉冲数据包,为了保持振荡器速度恒定,可以对其宽度或相位角进行调整,以实现复位或修正公差。 作为替代方案,该方法还可以被配置为使得在具有成对激励电极的相对于旋转轴对称的振荡器的情况下,施加相等的恒定幅度HF电压,其频率被选择 大大高于振荡器的固有频率,在这种情况下,通过移动驱动电压之间的相位角,并且在旋转速率传感器根据闭合状态工作的情况下,引起特定的振荡器吸引力 循环原理,也可以确保系统复位。 根据本发明,可以很好地控制将激励信号耦合到微机械振荡器系统的读通道中的问题。