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1. 发明授权

US5959206A Micromechanical rotation speed sensor 失效
标题翻译：微机械转速传感器
公开(公告)号：US5959206A
公开(公告)日：1999-09-28
申请号：US952756
申请日：1997-11-18
申请人： Bruno F. Ryrko , Eberhard Handrich , Uwe Breng , Martin Hafen
发明人： Bruno F. Ryrko , Eberhard Handrich , Uwe Breng , Martin Hafen
IPC分类号： G01C19/5656 , G01C19/00
CPC分类号： G01C19/5656
摘要： A micromechanical rate-of-rotation sensor based on the coriolis principle includes two plate-like oscillators electrostatically driven to oscillate out-of-phase. The oscillators are arranged one above another in alignment to oscillate via plate-like support structures separated from one another by a very small drive capacitor gap. By suitable selection of the natural frequency of the support structure parts, due to a significantly-larger distance between the oscillators, it is possible to achieve larger amplitudes of oscillation and, hence, a high oscillation quality, unlimited by the drive capacitor gap (which is narrow for reasons of good stimulation at small excitation voltages). The two oscillator structures in each case preferably comprise two electrically mutually insulated bonded parts suspended via springs within a frame and configured so that essentially only rotational oscillator movements are possible with linear movements of the oscillators in the .+-.z spatial direction largely suppressed.
摘要翻译： PCT No.PCT / EP96 / 02333 Sec。 371日期：1997年11月18日 102（e）日期1997年11月18日PCT提交1996年5月30日PCT公布。公开号WO96 / 38710 日期1996年12月5日基于科里奥利原理的微机械转速传感器包括两个板状振荡器，静电驱动以振荡异相。振荡器被布置成一个在另一个之上以对准以通过非常小的驱动电容器间隙彼此分离的板状支撑结构振荡。通过适当选择支撑结构部件的固有频率，由于振荡器之间的距离明显更大，可以通过驱动电容器间隙获得更大的振荡振幅和因此的高振荡质量由于在小的激发电压下刺激良好的原因）是窄的。在每种情况下，两个振荡器结构优选地包括通过框架内的弹簧悬挂的两个电相互绝缘的接合部分，并且被配置为使得基本上只有旋转振荡器运动是可能的，其中振荡器在+/- z空间方向上的线性运动被大大抑制。

2. 发明授权

US06490923B1 Micromechanical rpm sensor 失效
标题翻译：微机械转速传感器
公开(公告)号：US06490923B1
公开(公告)日：2002-12-10
申请号：US09719698
申请日：2000-12-14
申请人： Uwe Breng , Martin Hafen , Eberhard Handrich , Bruno Ryrko
发明人： Uwe Breng , Martin Hafen , Eberhard Handrich , Bruno Ryrko
IPC分类号： G01C1900
CPC分类号： G01C19/5656
摘要： A micromechanical rotation rate sensor based on the Coriolis principle includes two plate-like oscillators arranged one above the other in two planes for excitation to oscillate by means of an electrostatic drive. Three elements in each case form an oscillator structure. The oscillators are in each case suspended on opposite side edges by at least one web between an associated plate-like support and an associated drive plate element. The two supports and the two drive plate elements are, in each case, arranged one above the other in layers. A fixed plate element is located between the two drive plate elements so that, in each case, an identical narrow drive gap is defined between the drive plate elements. The drive gap is considerably smaller than the distance between the plate-like oscillators. An intermediate support that fills the intermediate space is inserted between the two plate-like supports and is completely electrically isolated from the surrounding frame to further reduce the respective capacitances to be recharged. The invention reduces the electrodynamic coupling between the drive and the read-out by a factor of about 100 in comparison with known micromechanical rotation rate sensors of like design.
摘要翻译：基于科里奥利原理的微机械转速传感器包括两个板状振荡器，两个平板状振荡器在两个平面之间并排布置，用于通过静电驱动振荡。每种情况下的三个元件形成振荡器结构。振荡器在每一种情况下通过在相关联的板状支撑件和相关联的驱动板元件之间的至少一个腹板在相对侧边缘上悬挂。在每种情况下，两个支撑件和两个驱动板元件层叠在一起。固定板元件位于两个驱动板元件之间，使得在每种情况下，在驱动板元件之间限定相同的窄驱动间隙。驱动间隙远小于板状振荡器之间的距离。填充中间空间的中间支撑件插入在两个板状支撑件之间，并且与周围框架完全电绝缘，以进一步减小要再充电的相应电容。与已知的类似设计的微机械旋转速率传感器相比，本发明将驱动器和读出装置之间的电动力耦合减少了大约100倍。

3. 发明授权

US06863832B1 Method for producing a torsion spring 失效
标题翻译：扭簧的制造方法
公开(公告)号：US06863832B1
公开(公告)日：2005-03-08
申请号：US10031957
申请日：2000-07-20
申请人： Maik Wiemer , Karla Hiller , Detlef Billep , Uwe Breng , Bruno Rvrko , Eberhard Handrich
发明人： Maik Wiemer , Karla Hiller , Detlef Billep , Uwe Breng , Bruno Rvrko , Eberhard Handrich
IPC分类号： B81B3/00 , B81C1/00 , G01C19/56 , G01P15/08 , C23F1/00
CPC分类号： B81B3/0051 , B81B2201/0242 , B81C2201/0133 , G01C19/56 , G01P15/0888
摘要： A method for producing a silicon torsion spring capable, for example, of reading the rotation rate in a microstructured torsion spring/mass system. The system that is produced achieves a low torsional stiffness compared to a relatively high transverse stiffness in the lateral and vertical directions. The method proceeds from a wafer or wafer composite and, upon suitable mask coverage, a spring with a V-shaped cross section is formed by anisotropic wet-chemical etching which preferably extends over the entire wafer thickness and is laterally delimited only by [111] planes. Two of the wafers or wafer composites prepared in this way are rotated through 180° and joined to one another oriented mirrorsymmetrically with respect to one another, so that overall the desired X-shaped cross section is formed.
摘要翻译：一种制造例如在微结构扭转弹簧/质量体系中读取旋转速度的硅扭转弹簧的方法。与横向和垂直方向上相对较高的横向刚度相比，所生产的系统达到较低的扭转刚度。该方法从晶片或晶片复合材料进行，并且在合适的掩模覆盖时，通过各向异性湿化学蚀刻形成具有V形横截面的弹簧，其优选地在整个晶片厚度上延伸并且仅由[111] 飞机以这种方式制备的两个晶片或晶片复合体相对于彼此对称地旋转180°并且彼此相对地定向成反射镜，从而形成所需的X形横截面。

4. 发明授权

US4953834A Pendulum with bending spring joint 失效
标题翻译：带弯曲弹簧接头的摆锤
公开(公告)号：US4953834A
公开(公告)日：1990-09-04
申请号：US146295
申请日：1988-01-20
申请人： Wolfram Ebert , Eberhard Handrich , Martin Hafen , Bruno Ryrko
发明人： Wolfram Ebert , Eberhard Handrich , Martin Hafen , Bruno Ryrko
IPC分类号： H03H9/24 , F16C11/12 , F16F1/02 , F16F1/18 , H03H3/007
CPC分类号： F16F1/18 , F16C11/12
摘要： A micromechanical bending spring joint is formed of selectively etched wafer material. The joint includes a pair of leaf springs arranged alongside each other. Each spring is inclined at an oblique angle to the opposed surfaces of the wafer and such springs cross to define a point of intersection. The joint, selectively etched from a single wafer, is characterized by high precision of fulcrum position, bending spring constant and transverse axis rigidity.
摘要翻译：微机械弯曲弹簧接头由选择性蚀刻的晶片材料形成。接头包括一对彼此并排配置的板簧。每个弹簧与晶片的相对表面倾斜倾斜，并且这种弹簧交叉以限定交点。从单个晶片选择性地蚀刻的接头的特征在于支点位置精度高，弯曲弹簧常数和横向轴刚度。

5. 发明授权

US5614742A Micromechanical accelerometer with plate-like semiconductor wafers 失效
标题翻译：具有板状半导体晶片的微机械加速度计
公开(公告)号：US5614742A
公开(公告)日：1997-03-25
申请号：US587604
申请日：1996-01-02
申请人： Thomas Gessner , Martin Hafen , Eberhard Handrich , Peter Leinfelder , Bruno Ryrko , Egbert Vetter , Maik Wiemer
发明人： Thomas Gessner , Martin Hafen , Eberhard Handrich , Peter Leinfelder , Bruno Ryrko , Egbert Vetter , Maik Wiemer
IPC分类号： G01P15/08 , G01P15/125 , H01L21/306 , H01L29/84 , H01L29/82
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0828 , Y10S148/012 , Y10S73/01
摘要： A high precision micromechanical accelerometer comprises a layered structure of five (5) semiconductor wafers insulated from one another by thin oxide layers. The accelerometer is formed by first connecting a coverplate and a baseplate to associated insulating plates. Counter-electrodes, produced by anisotropic etching from the respective insulating plates, are fixed to the coverplate and the baseplate respectively. The counter-electrodes are contactable through the cover or baseplate via contact windows. A central wafer contains a unilaterally linked mass (pendulum) that is also produced by anisotropic etching and which serves as a movable central electrode of a differential capacitor. The layered structure is hermetically sealed by semiconductor fusion bonding. A stepped gradation from the top is formed at a wafer edge region for attaching contact pads to individual wafers to permit electrical contacting of individual wafers. The invention permits fabrication of a .mu.B device characterized by extremely small leakage capacitances and high temperature stability.
摘要翻译：高精度微机械加速度计包括由半氧化物层彼此绝缘的五（5）个半导体晶片的分层结构。通过首先将盖板和底板连接到相关联的绝缘板来形成加速度计。通过各自绝缘板的各向异性蚀刻制成的对电极分别固定在盖板和底板上。相对电极可以通过接触窗口通过盖板或底板接触。中央晶片包含单向连接的质量（摆），其也通过各向异性蚀刻产生，并且用作差分电容器的可移动中心电极。层状结构通过半导体熔融粘合而密封。在晶片边缘区域形成从顶部的阶梯状梯度，用于将接触焊盘附接到单个晶片以允许单个晶片的电接触。本发明允许制造以极小的泄漏电容和高温稳定性为特征的μB器件。

6. 发明授权

US5504032A Micromechanical accelerometer and method of manufacture thereof 失效
标题翻译：微机械加速度计及其制造方法
公开(公告)号：US5504032A
公开(公告)日：1996-04-02
申请号：US224750
申请日：1994-04-07
申请人： Thomas Gessner , Martin Hafen , Eberhard Handrich , Peter Leinfelder , Bruno Ryrko , Egbert Vetter , Maik Wiemer
发明人： Thomas Gessner , Martin Hafen , Eberhard Handrich , Peter Leinfelder , Bruno Ryrko , Egbert Vetter , Maik Wiemer
IPC分类号： G01P15/08 , G01P15/125 , H01L21/306 , H01L29/84 , H01L21/76
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0828 , Y10S148/012 , Y10S73/01
摘要： A high precision micromechanical accelerometer comprises a layered structure of five (5) semiconductor wafers insulated from one another by thin semiconductor material oxide layers. The accelerometer is formed by first connecting a coverplate and a baseplate to associated insulating plates. Counter-electrodes, produced by anisotropic etching from the respective insulating plates, are fixed to the coverplate and the baseplate respectively. The counter-electrodes are contactable through the cover or baseplate via contact windows. A central wafer contains a unilaterally linked mass (pendulum) that is also produced by anisotropic etching and which serves as a movable central electrode of a differential capacitor. The layered structure is hermetically sealed by semiconductor fusion bonding. A stepped gradation from the top is formed at a wafer edge region for attaching contact pads to individual wafers to permit electrical contacting of individual wafers. The invention permits fabrication of a .mu.B device characterized by extremely small leakage capacitances and high temperature stability.
摘要翻译：一种高精度微机械加速度计包括由薄半导体材料氧化物层彼此绝缘的五（5）个半导体晶片的分层结构。通过首先将盖板和底板连接到相关联的绝缘板来形成加速度计。通过各自绝缘板的各向异性蚀刻制成的对电极分别固定在盖板和基板上。相对电极可以通过接触窗口通过盖板或底板接触。中央晶片包含单向连接的质量（摆），其也通过各向异性蚀刻产生，并且用作差分电容器的可移动中心电极。层状结构通过半导体熔融粘合而密封。在晶片边缘区域形成从顶部的阶梯状梯度，用于将接触焊盘附接到单个晶片以允许单个晶片的电接触。本发明允许制造以极小的泄漏电容和高温稳定性为特征的μB器件。

7. 发明授权

US07481110B2 Method for quadrature-bias compensation in a Coriolis gyro, as well as a Coriolis gyro which is suitable for this purpose 有权
标题翻译：科里奥利陀螺仪中的正交偏置补偿方法以及适用于该目的的科里奥利陀螺仪
公开(公告)号：US07481110B2
公开(公告)日：2009-01-27
申请号：US10584483
申请日：2004-11-26
申请人： Eberhard Handrich , Wolfram Geiger
发明人： Eberhard Handrich , Wolfram Geiger
IPC分类号： G01P9/04 , G01C19/56
CPC分类号： G01C19/5747 , G01C19/5726 , G01C19/5762
摘要： A method for quadrature-bias compensation in a Coriolis gyro whose resonator is in the form of a coupled system comprising a first and a second linear oscillator. The quadrature bias of the Coriolis gyro is determined. An electrostatic field is produced by variation of the mutual alignment of the two oscillators with respect to one another. The alignment/strength of the electrostatic field is regulated so that the determined quadrature bias is made as small as possible.
摘要翻译：一种科里奥利陀螺仪中正交偏置补偿的方法，其谐振器是包括第一和第二线性振荡器的耦合系统的形式。确定科里奥利陀螺仪的正交偏差。通过两个振荡器相对于彼此的相互对准的变化产生静电场。调整静电场的对准/强度，使得确定的正交偏移尽可能小。

8. 发明授权

US06538746B1 Method and device for measuring absolute interferometric length 失效
标题翻译：测量绝对干涉长度的方法和装置
公开(公告)号：US06538746B1
公开(公告)日：2003-03-25
申请号：US09647025
申请日：2000-11-17
申请人： Eberhard Handrich
发明人： Eberhard Handrich
IPC分类号： G01B902
CPC分类号： G01B9/0201 , G01B9/02007 , G01B2290/45
摘要： A single laser is stabilized sequentially in time with respect to different wavelengths in conjunction with a continuous, preferably linear, wavelength transition for absolute optical interferometric measurement. During the wavelength transition, the number of the traversing interferences is counted in a measuring channel. The length of a measuring section may be measured in absolute terms to give known and stable wavelengths and phase measurements of the two wavelengths. Active integrated optics and residual phase measurement by compensation in the integrated optics make it possible to detect wavelength differences of 10−7 &lgr;.
摘要翻译：单个激光器相对于不同波长的时间在时间上被稳定地连续地连续用于绝对光学干涉测量的连续的，优选线性的波长转变。在波长转换期间，在测量通道中计数运行干扰的次数。测量部分的长度可以以绝对值来测量，以给出两个波长的已知且稳定的波长和相位测量。通过在集成光学器件中进行补偿的有源集成光学和残余相位测量，可以检测10-7羔羊的波长差异。

9. 发明授权

US4702600A Method and apparatus for measuring angular rate with a passive optical resonator 失效
标题翻译：用无源光谐振器测量角速率的方法和装置
公开(公告)号：US4702600A
公开(公告)日：1987-10-27
申请号：US757276
申请日：1985-07-19
申请人： Eberhard Handrich , Werner Schroder
发明人： Eberhard Handrich , Werner Schroder
IPC分类号： B64D11/00 , G01C19/72 , G01P3/36 , H04L12/28 , G01C19/64 , G01B9/02
CPC分类号： G01C19/727 , G01C19/721 , A63F2300/402 , B64D11/0015
摘要： A method and apparatus for reading out angular rates by means of a passive optical resonator provides for the generation of three component light beams individually tuned to distinct resonator modes. One component light beam is radiated into the resonator in the opposite direction to the two other component light beams. By means of an evaluating logic, differences are formed between the counterrotating light beams and the differences weighted and subtracted from each other to provide angular rate. The optical length of the resonator, and, thus, temperature are available as a weighted sum of the differences. Temperature drift may be eliminated from angular rate measurements by compensation according to the invention.
摘要翻译：通过无源光学谐振器读出角速率的方法和装置提供了单独调谐到不同谐振器模式的三分量光束的产生。单分量光束以与另外两个分量光束相反的方向辐射到谐振器中。通过评估逻辑，逆反射光束和彼此加权和减去的差异之间形成差异以提供角速率。谐振器的光学长度，因此温度可以作为差的加权和来获得。通过根据本发明的补偿可以从角速率测量中消除温度漂移。

10. 发明授权

US07340954B2 Method for measurement of rotation rates/accelerations using a rotation rate coriolis gyro, as well as a coriolis gyro which is suitable for this purpose 有权
标题翻译：使用旋转速率科里奥利陀螺仪测量旋转速度/加速度的方法以及适合此目的的科里奥利陀螺仪
公开(公告)号：US07340954B2
公开(公告)日：2008-03-11
申请号：US10584339
申请日：2004-11-26
申请人： Eberhard Handrich
发明人： Eberhard Handrich
IPC分类号： G01C19/56
CPC分类号： G01C19/5747 , G01C19/5726
摘要： A Coriolis gyro includes a first and a second resonator, each in the form of a coupled system comprising first and second linear oscillators. The first resonator can be caused to oscillate in antiphase with respect to the second resonator along a common oscillation axis. A system coupled in this way has the advantage that it is possible to measure rotation rate and acceleration simultaneously, with insensitivity to disturbances (e.g., externally or internally acting vibrations).
摘要翻译：科里奥利陀螺仪包括第一和第二谐振器，每个谐振器以包括第一和第二线性振荡器的耦合系统的形式。可以使第一谐振器沿共同的振荡轴相对于第二谐振器反相振荡。以这种方式耦合的系统具有以下优点：可以同时测量旋转速率和加速度，对扰动（例如，外部或内部动作的振动）不敏感。

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