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1. 发明授权

US09080944B2 Method and apparatus for surface mapping using in-plane grazing incidence diffraction 有权
$Method and apparatus for surface mapping using in-plane grazing incidence diffraction$
标题翻译：使用面内掠入射衍射的表面映射方法和装置
公开(公告)号：US09080944B2
公开(公告)日：2015-07-14
申请号：US13735509
申请日：2013-01-07
申请人： Bruker AXS, Inc.
发明人： Jonathan Giencke
IPC分类号： G01N23/207 , G01N23/201
CPC分类号： G01N23/207 , G01N23/201 , G01N2223/501 , G01N2223/61 , G01N2223/6116
摘要： An apparatus for examining the surface of a crystalline sample uses in-plane grazing incidence diffraction with a position-sensitive detector. The x-ray source illuminates an extended region of the sample and, for crystal sections having the appropriate lattice orientation, an elongated diffraction signal is produced. The relative position of the sample and the x-ray beam may then be changed to illuminate different regions of the sample so that the diffraction signal corresponds to these other regions. By scanning across the entire sample, a spatial profile of the sample surface may be generated. The system may be used to locate crystal boundaries, defects, or the presence of attenuating materials on the sample surface.
摘要翻译：用于检查结晶样品的表面的装置使用位置敏感检测器进行平面内掠入射衍射。 x射线源照射样品的延伸区域，并且对于具有适当晶格取向的晶体部分，产生细长的衍射信号。然后可以改变样品和x射线束的相对位置以照射样品的不同区域，使得衍射信号对应于这些其它区域。通过扫描整个样品，可以产生样品表面的空间分布。该系统可用于在样品表面上定位晶体边界，缺陷或衰减材料的存在。

2. 发明授权

US09864075B2 Integrated reciprocal space mapping for simultaneous lattice parameter refinement using a two-dimensional X-ray detector 有权
公开(公告)号：US09864075B2
公开(公告)日：2018-01-09
申请号：US14289336
申请日：2014-05-28
申请人： Bruker AXS, Inc.
发明人： Jonathan Giencke
IPC分类号： G01T1/29 , G01B9/10 , G01B15/00 , G01N23/20 , G01N15/02 , G01N23/207 , G01B9/02 , G01N21/84
CPC分类号： G01T1/2978 , G01B9/02018 , G01B9/02019 , G01B9/02041 , G01B9/10 , G01B15/00 , G01B2290/65 , G01N15/0211 , G01N23/20008 , G01N23/20016 , G01N23/207 , G01N2021/8477 , G01N2223/0561 , G01N2223/0566 , G01N2223/331 , G01N2223/61
摘要： A method for performing an X-ray diffraction analysis of a crystal sample using a multi-dimensional detector that integrates an X-ray diffraction signal while the position of the sample relative to an X-ray source is changed along a scan direction. The resulting image is compressed along the scan direction, but may be collected very quickly. The capture of both on-axis and off-axis reflections in a single image provides a common spatial frame of reference for comparing the reflections. This may be used in the construction of a reciprocal space map, and is useful for analyzing a sample with multiple crystal layers, such as a crystal substrate with a crystalline film deposited thereupon.

3. 发明授权

US11275039B2 Divergent beam two dimensional diffraction 有权
$Divergent beam two dimensional diffraction$
公开(公告)号：US11275039B2
公开(公告)日：2022-03-15
申请号：US16044940
申请日：2018-07-25
申请人： Bruker AXS, Inc.
发明人： Jonathan Giencke
IPC分类号： G01N23/00 , G01N23/207 , G01N23/20016
摘要： A two-dimensional X-ray diffractometer uses an X-ray source that emits a divergent beam toward a sample under test. The divergent beam has a substantially fixed width in a first direction perpendicular to its propagation direction, and a thickness in a second direction perpendicular to the propagation direction that increases proportionally to a distance from the source. An aperture may be used to block a portion of the beam in the second direction, and the sample is positioned so that the beam illuminates a two-dimensional area of the sample surface. The detector detects an X-ray signal diffracted from the sample across a two-dimensional detection area, and may use a one-dimensional detector array that collects diffracted X-ray signal at a number of different positions. The source, detector and sample may be mounted to a goniometer to maintain them in a desired relative orientation.

4. 发明申请

US20140192959A1 METHOD AND APPARATUS FOR SURFACE MAPPING USING IN-PLANE GRAZING INCIDENCE DIFFRACTION 有权
标题翻译：使用平面衍射发生衍射的表面贴图的方法和装置
公开(公告)号：US20140192959A1
公开(公告)日：2014-07-10
申请号：US13735509
申请日：2013-01-07
申请人： BRUKER AXS, INC.
发明人： Jonathan Giencke
IPC分类号： G01N23/207
CPC分类号： G01N23/207 , G01N23/201 , G01N2223/501 , G01N2223/61 , G01N2223/6116
摘要： An apparatus for examining the surface of a crystalline sample uses in-plane grazing incidence diffraction with a position-sensitive detector. The x-ray source illuminates an extended region of the sample and, for crystal sections having the appropriate lattice orientation, an elongated diffraction signal is produced. The relative position of the sample and the x-ray beam may then be changed to illuminate different regions of the sample so that the diffraction signal corresponds to these other regions. By scanning across the entire sample, a spatial profile of the sample surface may be generated. The system may be used to locate crystal boundaries, defects, or the presence of attenuating materials on the sample surface.
摘要翻译：用于检查结晶样品的表面的装置使用位置敏感检测器进行平面内掠入射衍射。 x射线源照射样品的延伸区域，并且对于具有适当晶格取向的晶体部分，产生细长的衍射信号。然后可以改变样品和x射线束的相对位置以照射样品的不同区域，使得衍射信号对应于这些其它区域。通过扫描整个样品，可以产生样品表面的空间分布。该系统可用于在样品表面上定位晶体边界，缺陷或衰减材料的存在。

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