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1. 发明授权

US07551719B2 Multifunction X-ray analysis system 有权
标题翻译：多功能X射线分析系统
公开(公告)号：US07551719B2
公开(公告)日：2009-06-23
申请号：US11200857
申请日：2005-08-10
申请人： Boris Yokhin , Alexander Krokhmal , Tzachi Rafaeli , Isaac Mazor , Amos Gvirtzman
发明人： Boris Yokhin , Alexander Krokhmal , Tzachi Rafaeli , Isaac Mazor , Amos Gvirtzman
IPC分类号： G01B15/02 , G01N23/20 , G01N23/201
CPC分类号： G01N23/20008
摘要： Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a first, converging beam of X-rays toward a surface of the sample and to direct a second, collimated beam of the X-rays toward the surface of the sample. A motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processor receives and processes output signals from the detector assembly so as to determine a characteristic of the sample.
摘要翻译：用于分析样品的装置包括辐射源，其适于将X射线的第一收敛束指向样品的表面，并将X射线的第二准直光束引向样品的表面。运动组件使辐射源在X射线以掠射角指向样品表面的第一源位置和第二源位置之间移动，在该第二源位置，X射线朝向表面样品的布拉格角附近。检测器组件在辐射源处于第一和第二源配置中的任一个中以及在第一和第二源位置中的任一个中时，感测从样品散射的X射线作为角度的函数。信号处理器接收并处理来自检测器组件的输出信号，以便确定样品的特性。

2. 发明申请

US20060062351A1 Multifunction X-ray analysis system 有权
标题翻译：多功能X射线分析系统
公开(公告)号：US20060062351A1
公开(公告)日：2006-03-23
申请号：US11200857
申请日：2005-08-10
申请人： Boris Yokhin , Alexander Krokhmal , Tzachi Rafaeli , Isaac Mazor , Amos Gvirtzman
发明人： Boris Yokhin , Alexander Krokhmal , Tzachi Rafaeli , Isaac Mazor , Amos Gvirtzman
IPC分类号： G01N23/201
CPC分类号： G01N23/20008
摘要： Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a first, converging beam of X-rays toward a surface of the sample and to direct a second, collimated beam of the X-rays toward the surface of the sample. a motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processor receives and processes output signals from the detector assembly so as to determine a characteristic of the sample.
摘要翻译：用于分析样品的装置包括辐射源，其适于将X射线的第一收敛束指向样品的表面，并将X射线的第二准直光束引向样品的表面。运动组件将辐射源移动在X射线以掠射角指向样品表面的第一源位置和X射线朝向表面的第二源位置样品的布拉格角附近。检测器组件在辐射源处于第一和第二源配置中的任一个中以及在第一和第二源位置中的任一个中时，感测从样品散射的X射线作为角度的函数。信号处理器接收并处理来自检测器组件的输出信号，以便确定样品的特性。

3. 发明授权

US06895075B2 X-ray reflectometry with small-angle scattering measurement 有权
标题翻译：具有小角度散射测量的X射线反射测量
公开(公告)号：US06895075B2
公开(公告)日：2005-05-17
申请号：US10364883
申请日：2003-02-12
申请人： Boris Yokhin , Alexander Dikopoltsev , Tzachi Rafaeli , Amos Gvirtzman
发明人： Boris Yokhin , Alexander Dikopoltsev , Tzachi Rafaeli , Amos Gvirtzman
IPC分类号： G01N23/201 , G01N23/20 , G01N23/203
CPC分类号： G01N23/20
摘要： Apparatus for inspection of a sample includes a radiation source and an array of detector elements arranged to receive radiation from the surface due to irradiation of an area of the surface by the radiation source. The array has a first operative configuration for resolving the received radiation along a first axis perpendicular to the surface, and a second operative configuration for resolving the received radiation along a second axis parallel to the surface. A signal processor processes the signal from the detector array in the two configurations so as to determine a reflectance of the surface as a function of elevation angle relative to the surface and a scattering profile of the surface as a function of azimuthal angle in a plane of the surface.
摘要翻译：用于检查样品的装置包括辐射源和检测器元件的阵列，其布置成由于辐射源对表面的区域的照射而从表面接收辐射。该阵列具有用于沿着垂直于该表面的第一轴分解接收的辐射的第一操作配置，以及用于沿着平行于该表面的第二轴分解所接收的辐射的第二操作配置。信号处理器以两种配置处理来自检测器阵列的信号，以便确定作为相对于表面的仰角的函数的表面的反射率和作为方位角的函数的表面的散射曲线作为方位角的函数表面。

4. 发明授权

US07649978B2 Automated selection of X-ray reflectometry measurement locations 有权
标题翻译：自动选择X射线反射测量位置
公开(公告)号：US07649978B2
公开(公告)日：2010-01-19
申请号：US12232259
申请日：2008-09-12
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
IPC分类号： G01B15/02
CPC分类号： G01N23/201 , G01N2223/052
摘要： The computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective location. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected location.
摘要翻译：用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布，响应于光束从表面发射，以产生相应的多个X射线光谱。分析X射线光谱以产生各自的相应的品质因数，表明在相应位置处的X射线光谱的测量质量。响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

5. 发明授权

US07245695B2 Detection of dishing and tilting using X-ray fluorescence 有权
标题翻译：使用X射线荧光检测凹陷和倾斜
公开(公告)号：US07245695B2
公开(公告)日：2007-07-17
申请号：US11103071
申请日：2005-04-11
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.
摘要翻译：用于测试施加到样品表面的材料的方法包括将具有已知束宽度和强度横截面的激发束引导到样品的区域上。测量从响应于激发光束的区域发射的X射线荧光的强度。响应于X射线荧光的测量强度和激发光束的强度横截面，估计区域内材料的分布，其空间分辨率比光束宽度更精细。

6. 发明申请

US20060227931A1 Detection of dishing and tilting using x-ray fluorescence 有权
标题翻译：使用x射线荧光检测凹陷和倾斜
公开(公告)号：US20060227931A1
公开(公告)日：2006-10-12
申请号：US11103071
申请日：2005-04-11
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alexander Tokar
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alexander Tokar
IPC分类号： G01N23/223 , G01T1/36
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.
摘要翻译：用于测试施加到样品表面的材料的方法包括将具有已知束宽度和强度横截面的激发束引导到样品的区域上。测量从响应于激发光束的区域发射的X射线荧光的强度。响应于X射线荧光的测量强度和激发光束的强度横截面，估计区域内材料的分布，其空间分辨率比光束宽度更精细。

7. 发明申请

US20090074141A1 Automated selection of x-ray reflectometry measurement locations 有权
标题翻译：自动选择x射线反射测量位置
公开(公告)号：US20090074141A1
公开(公告)日：2009-03-19
申请号：US12232259
申请日：2008-09-12
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
IPC分类号： G01N23/201 , H01L21/02 , B05C11/00
CPC分类号： G01N23/201 , G01N2223/052
摘要： A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.
摘要翻译：用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布，响应于光束从表面发射，以产生相应的多个X射线光谱。分析X射线光谱以产生各自的相应的品质指数，表示在各个位置处的X射线光谱的测量质量。响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

8. 发明授权

US07120228B2 Combined X-ray reflectometer and diffractometer 有权
$Combined X-ray reflectometer and diffractometer$
公开(公告)号：US07120228B2
公开(公告)日：2006-10-10
申请号：US10946426
申请日：2004-09-21
申请人： Boris Yokhin , Isaac Mazor , Tzachi Rafaeli
发明人： Boris Yokhin , Isaac Mazor , Tzachi Rafaeli
IPC分类号： G01B15/02
CPC分类号： G01N23/20008
摘要： Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample. At least one detector array is arranged to sense the X-rays scattered from the sample as a function of elevation angle over a range of elevation angles simultaneously, and to generate output signals responsively to the scattered X-rays. The detector array has a first configuration in which the detector array senses the X-rays that are reflected from the surface of the sample at a grazing angle, and a second configuration in which the detector array senses the X-rays that are diffracted from the surface in a vicinity of a Bragg angle of the sample. A signal processor processes the output signals so as to determine a characteristic of the surface layer of the sample.

9. 发明申请

US20070274447A1 Automated selection of X-ray reflectometry measurement locations 审中-公开
标题翻译：自动选择X射线反射测量位置
公开(公告)号：US20070274447A1
公开(公告)日：2007-11-29
申请号：US11798617
申请日：2007-05-15
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
IPC分类号： G01N23/20
CPC分类号： G01N23/201 , G01N2223/052
摘要： A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.
摘要翻译：用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布，响应于光束从表面发射，以产生相应的多个X射线光谱。分析X射线光谱以产生各自的相应的品质指数，表示在各个位置处的X射线光谱的测量质量。响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

10. 发明申请

US20060062350A1 Combined X-ray reflectometer and diffractometer 有权
$Combined X-ray reflectometer and diffractometer$
标题翻译：组合X射线反射计和衍射仪
公开(公告)号：US20060062350A1
公开(公告)日：2006-03-23
申请号：US10946426
申请日：2004-09-21
申请人： Boris Yokhin , Isaac Mazor , Tzachi Rafaeli
发明人： Boris Yokhin , Isaac Mazor , Tzachi Rafaeli
IPC分类号： G01N23/201
CPC分类号： G01N23/20008
摘要： Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample. At least one detector array is arranged to sense the X-rays scattered from the sample as a function of elevation angle over a range of elevation angles simultaneously, and to generate output signals responsively to the scattered X-rays. The detector array has a first configuration in which the detector array senses the X-rays that are reflected from the surface of the sample at a grazing angle, and a second configuration in which the detector array senses the X-rays that are diffracted from the surface in a vicinity of a Bragg angle of the sample. A signal processor processes the output signals so as to determine a characteristic of the surface layer of the sample.
摘要翻译：用于分析样品的装置包括辐射源，其适于将X射线的会聚束引导到样品的表面。至少一个检测器阵列布置成同时检测从样品散射的X射线作为仰角范围上的仰角的函数，并且响应于散射的X射线产生输出信号。检测器阵列具有第一配置，其中检测器阵列以掠射角度感测从样品表面反射的X射线，以及第二配置，其中检测器阵列感测从衍射的X射线衍射的X射线表面在样品的布拉格角附近。信号处理器处理输出信号，以便确定样品的表面层的特性。

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