专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07674717B2 Method of fabricating periodic nano-structure arrays with different feature sizes 失效
标题翻译：制造具有不同特征尺寸的周期性纳米结构阵列的方法
公开(公告)号：US07674717B2
公开(公告)日：2010-03-09
申请号：US11377998
申请日：2006-03-17
申请人： Benzhong Wang , Soo Jin Chua
发明人： Benzhong Wang , Soo Jin Chua
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： B82Y20/00 , G02B1/00
摘要： A method of fabricating a two dimensional nano-structure array of features comprising the steps of providing a substrate (10); forming an intermediate layer on said substrate (20), said intermediate layer having at least two selectively located regions (21, 22) of different uniform thickness; placing at least one layer of elements (30) over said intermediate layer, said elements placed in a close-packed arrangement forming an array of voids (33) between said elements; etching the intermediate layer through said voids, and so forming the array of features (51, 52) in said intermediate layer corresponding to the voids.
摘要翻译：一种制造特征的二维纳米结构阵列的方法，包括以下步骤：提供基底（10）; 在所述衬底（20）上形成中间层，所述中间层具有不同厚度的至少两个选择性定位区域（21,22）将所述中间层上的至少一层元件（30）放置在所述元件之间形成一组空隙（33）的紧密堆积布置; 通过所述空隙蚀刻中间层，从而在对应于空隙的所述中间层中形成特征阵列（51,52）。

2. 发明申请

US20060275929A1 Method of fabricating periodic nano-structure arrays with different feature sizes 失效
标题翻译：制造具有不同特征尺寸的周期性纳米结构阵列的方法
公开(公告)号：US20060275929A1
公开(公告)日：2006-12-07
申请号：US11377998
申请日：2006-03-17
申请人： Benzhong Wang , Soo Jin Chua
发明人： Benzhong Wang , Soo Jin Chua
IPC分类号： H01L21/00
CPC分类号： B82Y20/00 , G02B1/00
摘要： A method of fabricating a two dimensional nano-structure array of features comprising the steps of providing a substrate (10); forming an intermediate layer on said substrate (20), said intermediate layer having at least two selectively located regions (21, 22) of different uniform thickness; placing at least one layer of elements (30) over said intermediate layer, said elements placed in a close-packed arrangement forming an array of voids (33) between said elements; etching the intermediate layer through said voids, and so forming the array of features (51, 52) in said intermediate layer corresponding to the voids.
摘要翻译：一种制造特征的二维纳米结构阵列的方法，包括以下步骤：提供基底（10）; 在所述衬底（20）上形成中间层，所述中间层具有不同厚度的至少两个选择性定位区域（21,22）将所述中间层上的至少一层元件（30）放置在所述元件之间形成一组空隙（33）的紧密堆积布置; 通过所述空隙蚀刻中间层，从而在对应于空隙的所述中间层中形成特征阵列（51,52）。

3. 发明申请

US20100227437A1 SEMICONDUCTOR DEVICES GROWN IN SPHERICAL CAVITY ARRAYS AND ITS PREPARATION METHOD 有权
标题翻译：球形阵列中的半导体器件及其制备方法
公开(公告)号：US20100227437A1
公开(公告)日：2010-09-09
申请号：US11385528
申请日：2006-03-21
申请人： Benzhong Wang , Soo Jin Chua
发明人： Benzhong Wang , Soo Jin Chua
IPC分类号： H01L21/56
CPC分类号： B81C1/00047 , B81B2207/056 , B81C2201/0109 , H01L33/18 , H01S5/1042 , H01S5/1071
摘要： A method for fabricating an array of semiconductor devices comprising the steps of providing a non-metallic substrate, placing a layer of spheres on said substrate, reducing diameter of the spheres, encapsulating the spheres in a matrix of rigid material, finishing an upper surface of said matrix to expose a portion of said spheres, removing the spheres to form an array of cavities within said matrix, and forming features in said cavities in contact with said substrate so as to form the device.
摘要翻译：一种用于制造半导体器件阵列的方法，包括以下步骤：提供非金属基底，将一层球体放置在所述基底上，减小所述球体的直径，将所述球体包封在刚性材料的基体中，所述基体暴露所述球体的一部分，去除所述球体以在所述基体内形成空腔阵列，以及在与所述基底接触的所述空腔中形成特征以形成所述装置。

4. 发明授权

US08211321B2 Method for fabricating micro and nano structures 失效
标题翻译：制造微结构和纳米结构的方法
公开(公告)号：US08211321B2
公开(公告)日：2012-07-03
申请号：US12938973
申请日：2010-11-03
申请人： Benzhong Wang , Soo Jin Chua
发明人： Benzhong Wang , Soo Jin Chua
IPC分类号： B29D11/00
CPC分类号： B29D11/00365 , B82Y20/00 , B82Y30/00 , G02B3/0012 , G02B3/0056 , Y10S977/888 , Y10T428/24165 , Y10T428/24893 , Y10T428/24909
摘要： A method of forming an array of selectively shaped optical elements on a substrate, the method including the steps of providing the substrate, the substrate having an optical layer placed thereon; placing a layer of particles on the optical layer; performing an etching cycle. The cycle includes the steps of: etching the layer of particles, using a first etching process so as to reduce the size of the particles within the layer, then; simultaneously etching the optical layer and the layer of particles, using a second etching process, the further reducing particles forming a mask over areas of the optical layer to create discrete optical elements from the optical layer.
摘要翻译：一种在衬底上形成选择性地成形的光学元件的阵列的方法，所述方法包括以下步骤：提供衬底，所述衬底具有放置在其上的光学层; 在光学层上放置一层颗粒; 执行蚀刻循环。该循环包括以下步骤：使用第一蚀刻工艺蚀刻颗粒层，以减小层内的颗粒的尺寸，然后; 使用第二蚀刻工艺同时蚀刻光学层和颗粒层，在光学层的区域上形成进一步的还原颗粒形成掩模以从光学层产生离散的光学元件。

5. 发明授权

US07833425B2 Method for fabricating micro and nano structures 失效
标题翻译：制造微结构和纳米结构的方法
公开(公告)号：US07833425B2
公开(公告)日：2010-11-16
申请号：US11843401
申请日：2007-08-22
申请人： Benzhong Wang , Soo Jin Chua
发明人： Benzhong Wang , Soo Jin Chua
IPC分类号： B29D11/00
CPC分类号： B29D11/00365 , B82Y20/00 , B82Y30/00 , G02B3/0012 , G02B3/0056 , Y10S977/888 , Y10T428/24165 , Y10T428/24893 , Y10T428/24909
摘要： A method of forming an array of selectively shaped optical elements on a substrate, the method including the steps of providing the substrate, the substrate having an optical layer placed thereon; placing a layer of particles on the optical layer; performing an etching cycle. The cycle includes the steps of: etching the layer of particles, using a first etching process so as to reduce the size of the particles within the layer, then; simultaneously etching the optical layer and the layer of particles, using a second etching process, the further reducing particles forming a mask over areas of the optical layer to create discrete optical elements from the optical layer.
摘要翻译：一种在衬底上形成选择性地成形的光学元件的阵列的方法，所述方法包括以下步骤：提供衬底，所述衬底具有放置在其上的光学层; 在光学层上放置一层颗粒; 执行蚀刻循环。该循环包括以下步骤：使用第一蚀刻工艺蚀刻颗粒层，以减小层内的颗粒的尺寸，然后; 使用第二蚀刻工艺同时蚀刻光学层和颗粒层，在光学层的区域上形成进一步的还原颗粒形成掩模以从光学层产生离散的光学元件。

6. 发明授权

US07811846B2 Semiconductor devices grown in spherical cavity arrays and its preparation method 有权
标题翻译：球形阵列中生长的半导体器件及其制备方法
公开(公告)号：US07811846B2
公开(公告)日：2010-10-12
申请号：US11385528
申请日：2006-03-21
申请人： Benzhong Wang , Soo Jin Chua
发明人： Benzhong Wang , Soo Jin Chua
IPC分类号： H01L21/00
CPC分类号： B81C1/00047 , B81B2207/056 , B81C2201/0109 , H01L33/18 , H01S5/1042 , H01S5/1071
摘要： A method for fabricating an array of semiconductor devices comprising the steps of providing a non-metallic substrate, placing a layer of spheres on said substrate, reducing diameter of the spheres, encapsulating the spheres in a matrix of rigid material, finishing an upper surface of said matrix to expose a portion of said spheres, removing the spheres to form an array of cavities within said matrix, and forming features in said cavities in contact with said substrate so as to form the device.
摘要翻译：一种用于制造半导体器件阵列的方法，包括以下步骤：提供非金属基底，将一层球体放置在所述基底上，减小所述球体的直径，将所述球体包封在刚性材料的基体中，所述基体暴露所述球体的一部分，去除所述球体以在所述基体内形成空腔阵列，以及在与所述基底接触的所述空腔中形成特征以形成所述装置。

7. 发明授权

US06696372B2 Method of fabricating a semiconductor structure having quantum wires and a semiconductor device including such structure 失效
标题翻译：制造具有量子线的半导体结构的方法和包括这种结构的半导体器件
公开(公告)号：US06696372B2
公开(公告)日：2004-02-24
申请号：US10014257
申请日：2001-12-07
申请人： Benzhong Wang , Soo Jin Chua
发明人： Benzhong Wang , Soo Jin Chua
IPC分类号： H01L2100
CPC分类号： B82Y20/00 , B82Y10/00 , C30B23/002 , C30B23/02 , C30B25/02 , C30B29/605 , H01L21/02395 , H01L21/0243 , H01L21/02433 , H01L21/02463 , H01L21/02507 , H01L21/02513 , H01L21/02546 , H01L21/0259 , H01L21/0262 , H01L29/125 , H01L33/06 , H01S5/3203 , H01S5/3403 , H01S5/341
摘要： A method for the production of a semiconductor structure having self-organized quantum wires is described. The process includes the formation of multi-atomic steps on a (001) oriented semiconductor substrate inclined at an angle toward the [110] direction. Quantum wires are then spontaneously formed in situ along edges of the multi-atomic steps during epitaxial growth of a semiconductor with a larger or smaller lattice constant than the substrate but with a band gap narrower than that of the underlying material. Further deposition of a layer of semiconductor with a lattice constant within 1% of the substrate but with a band gap wider than that of the wire material then buries the quantum wires between this layer and the substrate layers. These layers are free of defects. Crystal and energy level structures of the quantum wire such as linear density, lateral and vertical dimension, and emission wavelength of photoluminescence can be easily controlled by selecting the angle of inclination of the substrate, lattice mismatch and different combinations of materials. A semiconductor laser with the active layer comprising quantum wires made by this method is also disclosed.
摘要翻译：描述了一种制造具有自组织量子线的半导体结构的方法。该方法包括在朝向[110]方向倾斜的（001）取向的半导体衬底上形成多原子台阶。然后，在具有比衬底更大或更小的晶格常数的半导体的外延生长中，但是具有比下面的材料窄的带隙的带隙，在多原子步骤的边缘上原位自发形成量子线。晶格常数在衬底的1％内但具有比线材宽的带隙的半导体层的进一步沉积然后将量子线埋在该层和衬底层之间。这些层没有缺陷。量子线的晶体和能级结构如线密度，横向和垂直尺寸以及光致发光的发射波长可以通过选择衬底的倾斜角度，晶格失配和材料的不同组合来容易地控制。还公开了一种具有由该方法制成的量子线的有源层的半导体激光器。

8. 发明申请

US20120286250A1 MANUFACTURING METHOD FOR SUBSTRATE WITH ELECTRODE ATTACHED 审中-公开
标题翻译：带电极的基板的制造方法
公开(公告)号：US20120286250A1
公开(公告)日：2012-11-15
申请号：US13391123
申请日：2010-08-11
申请人： Kyoko Yamamoto , Hong Yee Low , Feng Xiang Zhang , Benzhong Wang
发明人： Kyoko Yamamoto , Hong Yee Low , Feng Xiang Zhang , Benzhong Wang
IPC分类号： H01L51/56 , H01L27/32 , H01L51/52
CPC分类号： H01L51/0096 , H01L51/5268 , H01L51/5275 , H05B33/02 , H05B33/10 , Y02E10/549 , Y02P70/521
摘要： A process for producing a substrate with electrode for an organic electroluminescent device comprising a low-refractive index layer, a functional layer, and a transparent electrode that are laminated in this order, the substrate being for an organic electroluminescent device wherein the refractive index n1 of the electrode, the refractive index n2 of the functional layer, and the refractive index n3 of the low-refractive index layer satisfy the following formula (1): { 0.3 ≧ ( n   1 - n   2 ) ≧ 0 n   1 ≧ n   2 > n   3 ( 1 ) , the process comprising the step of forming the low-refractive index layer by forming raised and depressed portions on the surface of the low-refractive index layer by means of imprinting that uses a mold wherein multiple particles having an average particle size of 1.0 μm to 200 μm are laid on the surface of the base substrate of the mold, the step of forming the functional layer by applying a coating solution containing a material that will become the functional layer onto the surface of the low-refractive index layer wherein the raised and depressed portions have been formed and curing the coating, and the step of forming the electrode on the functional layer.
摘要翻译：一种用于生产具有用于有机电致发光器件的电极的衬底的方法，该有机电致发光器件包括依次层叠的低折射率层，功能层和透明电极，该衬底用于有机电致发光器件，其中折射率n1 电极，功能层的折射率n2和低折射率层的折射率n3满足下式（1）：{0.3≥（n）1〜n 2} 2≥0n （1），该方法包括通过在低折射率层的表面上形成凸起和凹陷部分的方式形成低折射率层的步骤，通过印迹使用其中平均粒径为1.0μm至200μm的多个颗粒被放置在模具的基底基材的表面上的模具，通过涂布含有材料的涂布溶液形成功能层的步骤这将成为在低折射率层的表面上的功能层，其中已经形成凸起和凹陷部分并固化涂层，以及在功能层上形成电极的步骤。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式