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    • 3. 发明申请
    • Fine droplet atomizer for liquid precursor vaporization
    • 用于液体前体蒸发的细微雾化器
    • US20110192909A1
    • 2011-08-11
    • US13018689
    • 2011-02-01
    • Benjamin Y.H. LiuThuc M. DinhYamin Ma
    • Benjamin Y.H. LiuThuc M. DinhYamin Ma
    • B05B17/04B01F3/04
    • B05B17/04C23C16/4486
    • The present disclosure relates to an apparatus and a method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The apparatus includes a mechanism to control the rate of liquid flow through the apparatus, the mechanism including a piezoelectric actuator to adjust the rate of liquid flow and an atomizing mechanism drawing gas from a compressed gas source such that when the gas source conjoins with the liquid, the liquid is atomized to form droplets suspended in the gas thereby forming a droplet aerosol suitable for subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to faun droplets suitable for vaporization and subsequent thin film deposition on a substrate.
    • 本公开涉及一种用于形成用于蒸发并随后在基板上的薄膜沉积的液滴气溶胶的装置和方法。 该装置包括一个控制流过该装置的液体流速的机构,该机构包括用于调节液体流速的压电致动器和从压缩气体源引出气体的雾化机构,使得当气体源与液体结合时 ,液体被雾化以形成悬浮在气体中的液滴,从而形成适用于随后的薄膜沉积在基底上的液滴气溶胶。 该方法包括从压缩气体源抽取气体并从液体源抽取液体。 液体和气体以同轴流动关系或径向流动关系或径向和同轴流动之间的角度关系结合,其中气体将液体接合以适应蒸发和随后的薄膜沉积在基底上的液滴。
    • 5. 发明授权
    • Method and apparatus for vapor and gas filtration
    • 蒸汽和气体过滤的方法和装置
    • US09089800B2
    • 2015-07-28
    • US13570364
    • 2012-08-09
    • Benjamin Y.H. LiuYamin MaThuc M. Dinh
    • Benjamin Y.H. LiuYamin MaThuc M. Dinh
    • B01D46/00B01D39/20B01D46/24C23C16/448
    • B01D39/2044B01D46/0021B01D46/2403C23C16/448
    • A gas filtration apparatus and method comprises a housing with an inlet for gas to enter and an outlet for the gas to exit. The housing contains a filter comprised of sintered metal fibers having an active filtration area through which the gas flows to remove suspended particles from the gas. The filter is substantially uniform in thickness and porosity through the active filtration area. The filter media being sealed to a metal structure in the housing with the metal structure having an opening to permit gas to flow through. A method of making a vapor/gas mixture includes the steps of producing a vapor in a gas to form the vapor/gas mixture passing the vapor/gas mixture through an opening in a housing containing a filter comprised of sintered metal fibers through which the vapor/gas mixture flows.
    • 一种气体过滤装置和方法包括具有用于进入气体的入口和用于气体排出的出口的壳体。 壳体包含由具有活性过滤区域的烧结金属纤维组成的过滤器,气体通过该过滤区域流动以从气体中除去悬浮颗粒。 过滤器通过活性过滤区域的厚度和孔隙率基本上是均匀的。 过滤介质被密封到壳体中的金属结构,金属结构具有开口以允许气体流过。 制备蒸汽/气体混合物的方法包括以下步骤:在气体中产生蒸汽,以形成通过蒸气/气体混合物的蒸气/气体混合物通过包含烧结金属纤维的过滤器的开口的气体/气体混合物,蒸气/ /气体混合物流。
    • 10. 发明申请
    • Method and apparatus for liquid precursor atomization
    • 液体前体雾化的方法和装置
    • US20120132723A1
    • 2012-05-31
    • US13364854
    • 2012-02-02
    • Benjamin Y.H. Liu
    • Benjamin Y.H. Liu
    • C23C16/00
    • B05B7/168B05B7/0475B05B7/066B05B7/1686Y10S261/65
    • An apparatus for atomizing a precursor liquid for vapor generation and thin film deposition on a substrate. The precursor liquid is atomized by a carrier gas to form a droplet aerosol comprised of small precursor liquid droplets suspended in the carrier gas. The droplet aerosol is then heated to form vapor, producing a gas/vapor mixture that can be introduced into a deposition chamber to form thin films on a substrate. The liquid is introduced into the atomizing apparatus in such a manner as to avoid excessive heating that can occur or lead to the formation of undesirable by-products due to material degradation as result of thermal decomposition. The apparatus is particularly suited for vaporizing high molecular weight substances with a low vapor pressure that requires a high vaporization temperature for the liquid to vaporize. The apparatus can also be used to vaporize solid precursors dissolved in a solvent for vaporization.
    • 一种用于在衬底上雾化用于蒸气产生和薄膜沉积的前体液体的装置。 前体液体被载气雾化以形成由悬浮在载气中的小前体液滴组成的液滴气溶胶。 然后将液滴气雾剂加热以形成蒸气,产生气体/蒸气混合物,其可以引入沉积室以在基底上形成薄膜。 以这样的方式将液体引入雾化装置中,以避免可能发生的过度加热或导致由于热分解导致的材料劣化而形成不期望的副产物。 该装置特别适用于蒸发具有低蒸气压的高分子量物质,其需要高的汽化温度以使液体蒸发。 该装置也可用于蒸发溶解在溶剂中的固体前体进行蒸发。