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    • 5. 发明申请
    • Planar waveguide with patterned cladding and method for producing same
    • 具有图案包层的平面波导及其制造方法
    • US20050089298A1
    • 2005-04-28
    • US10694928
    • 2003-10-27
    • Ian MaxwellDax KukuljRobert Charters
    • Ian MaxwellDax KukuljRobert Charters
    • G02B6/122G02B6/124G02B6/138G02B6/10G02B6/00
    • G02B6/1245G02B6/1228G02B6/138
    • Integrated optical waveguides and methods for the production thereof which have a patterned upper cladding with a defined opening to allow at least one side or at least one end of a light transmissive element to be air clad. The at least one side or at least one end is, for preference, a lens structure unitary with the waveguide or a bend. Also provided is a method of fabricating an optical waveguide with a patterned cladding which comprises forming a patterned blocking layer opaque to a predetermined wavelength on a portion of a substrate transparent to the predetermined wavelength; depositing a core layer on said patterned blocking layer and/or on an uncovered portion of the substrate; patterning the core layer from above to provide a light transmissive element; depositing an upper cladding layer, which comprises a material curable by exposure to light of the predetermined wavelength, on the light transmissive element, and/or on the patterned blocking layer and/or on an uncovered portion of the substrate; irradiating said upper cladding layer from below with light of the predetermined wavelength, to cure those portions of said upper cladding layer not positioned above said patterned blocking layer; and removing non-cured portions of said upper cladding layer.
    • 集成光波导及其制造方法,其具有带有限定开口的图案化上包层,以允许透光元件的至少一侧或至少一端为空气包层。 优选地,至少一个侧面或至少一个端部是与波导或弯曲部一体的透镜结构。 还提供了一种制造具有图案化包层的光波导的方法,其包括在对预定波长透明的基板的一部分上形成对预定波长不透明的图案化阻挡层; 在所述图案化的阻挡层上和/或在所述衬底的未覆盖部分上沉积芯层; 从上方构图芯层以提供透光元件; 沉积上部包层,其包括通过暴露于预定波长的光可固化的材料在光透射元件上和/或图案化阻挡层上和/或在衬底的未覆盖部分上; 用预定波长的光从下方照射所述上包层,以固化不位于所述图案化阻挡层上方的所述上覆层的部分; 以及去除所述上包层的未固化部分。