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    • 5. 发明授权
    • Electro-chemical deposition system and method
    • 电化学沉积系统及方法
    • US06254760B1
    • 2001-07-03
    • US09263649
    • 1999-03-05
    • Ben ShenYezdi DordiGeorge Birkmaier
    • Ben ShenYezdi DordiGeorge Birkmaier
    • G01F164
    • C25D7/12C25D17/001H01L21/2885H05K3/241
    • The present invention generally provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs rules and gap fill requirements and provides satisfactory throughput to meet the demands of other processing systems. The electro-chemical deposition system generally comprises a front-end loading station, a mainframe including one or more processing cells, and an electrolyte replenishing system fluidly connected to the one or more electrical processing cells. The electrolyte replenishing system comprises a main electrolyte supply tank and an analyzer module and dosing module coupled thereto. The analyzer module includes one or more chemical analyzers to monitor the concentrations of various chemicals in the main electrolyte supply tank. Information provided by the analyzer module is transmitted via a central control system to the dosing module. Source tanks in the dosing module communicate with the main supply tank to deliver the desired proportions of chemicals thereto. Preferably, the electrolyte analysis is performed continuously during processing to provide real-time data and electrolyte adjustments.
    • 本发明通常提供一种电化学沉积系统,其被设计成具有可扩展以适应未来设计规则和间隙填充要求的柔性结构,并提供令人满意的吞吐量以满足其它处理系统的需求。 电化学沉积系统通常包括前端加载站,包括一个或多个处理单元的主框架和与该一个或多个电处理单元流体连接的电解质补充系统。 电解质补充系统包括主要电解质供应罐和与其耦合的分析器模块和计量模块。 分析仪模块包括一个或多个化学分析仪,用于监测主要电解质供应罐中各种化学物质的浓度。 由分析器模块提供的信息经由中央控制系统传送到计量模块。 计量模块中的来源罐与主供应罐连通,以将所需比例的化学品运送到其上。 优选地,在处理期间连续执行电解质分析以提供实时数据和电解质调节。