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    • 4. 发明申请
    • APPARATUS FOR FILM DEPOSITION ON A CONTINUOUS FLEXIBLE WEB
    • 在连续灵活网络上进行薄膜沉积的装置
    • US20090014317A1
    • 2009-01-15
    • US11926310
    • 2007-10-29
    • Chia-Yuan CHANGChia-Hung Hsu
    • Chia-Yuan CHANGChia-Hung Hsu
    • C23C14/34
    • C23C14/562C23C14/022
    • An apparatus for film deposition on a continuous flexible web includes: a deposition chamber; a web-supporting drum disposed rotatably in the deposition chamber and having an outer surface for supporting the flexible web thereon; a web-conveying unit including a web-supplying roller and a web-take-up roller for conveying the continuous flexible web from the web-supplying roller onto the outer surface of the web-supporting drum and then to the web-take-up roller; and a plurality of sputtering guns disposed around the outer surface of the web-supporting drum for depositing a film on the first surface of the flexible web on the outer surface of the web-supporting drum.
    • 用于在连续柔性幅材上沉积膜的设备包括:沉积室; 卷筒纸支撑鼓可旋转地设置在沉积室中,并具有用于在其上支撑柔性幅材的外表面; 纸幅输送单元,其包括幅材供给辊和幅材卷取辊,用于将连续的柔性幅材从幅材供给辊输送到幅材支撑鼓的外表面上,然后到幅材卷取 滚筒; 以及多个溅射枪,其设置在所述幅材支撑滚筒的外表面周围,用于在所述幅材支撑滚筒的外表面上的柔性幅材的第一表面上沉积薄膜。