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    • 1. 发明授权
    • Method for preparing an N+PP+ or P+NN+ structure on silicon wafers
    • 在硅晶片上制备N + PP +或P + NN +结构的方法
    • US09082924B2
    • 2015-07-14
    • US13643641
    • 2011-04-26
    • Barbara Bazer-BachiMustapha LemitiNam Le QuangYvon Pellegrin
    • Barbara Bazer-BachiMustapha LemitiNam Le QuangYvon Pellegrin
    • H01L21/00H01L21/22H01L21/38H01L31/18H01L21/225H01L31/0224H01L31/068H01L29/12H01L31/0232
    • H01L31/18H01L21/225H01L21/2255H01L29/12H01L31/022425H01L31/02327H01L31/068H01L31/1804Y02E10/547Y02P70/521
    • The present invention relates to a method for preparing, on a silicon wafer, an n+pp+ or p+nn+ structure which includes the following consecutive steps: a) on a p or n silicon wafer (1), which includes a front surface (8) and a rear surface (9), a layer of boron-doped silicon oxide (BSG) (2) is formed on the rear surface (9) by PECVD, followed by a SiOx diffusion barrier (3); b) a source of phosphorus is diffused such that the phosphorus and the boron co-diffuse and in order also to form: on the front surface (8) of the wafer obtained at the end of step a), a layer of phosphorus-doped silicon oxide (PSG) (4) and an n+ doped area (5); and on the rear surface of the wafer obtained at the end of step a), a boron-rich area (BRL) (6), as well as a p+ doped area (7); c) the layers of BSG (2) and PSG (4) oxides and SiOx (3) are removed, the BRL (6) is oxidized and the layer resulting from said oxidation is removed. The invention also relates to a silicon wafer having an n+pp+ or p+nn+ structure, which can be obtained by said preparation method, as well as to a photovoltaic panel manufactured from such a silicon wafer.
    • 本发明涉及一种在硅晶片上制备n + pp +或p + nn +结构的方法,其包括以下连续步骤:a)在一个或多个硅晶片(1)上,其包括前表面(8) )和后表面(9),通过PECVD在后表面(9)上形成硼掺杂氧化硅层(BSG)(2),随后是SiO x扩散阻挡层(3); b)磷源扩散,使得磷和硼共扩散,并且还可以在步骤a)末端获得的晶片的前表面(8)上形成磷掺杂层 氧化硅(PSG)(4)和n +掺杂区域(5); 并且在步骤a)结束时获得的晶片的背面,富硼区(BRL)(6)以及p +掺杂区(7)上; c)除去BSG(2)和PSG(4)氧化物和SiO x(3)的层,BRL(6)被氧化,并且除去由所述氧化产生的层。 本发明还涉及可以通过所述制备方法获得的具有n + pp +或p + nn +结构的硅晶片以及由这种硅晶片制造的光伏面板。
    • 2. 发明申请
    • METHOD FOR PREPARING AN N+PP+ OR P+NN+ STRUCTURE ON SILICON WAFERS
    • 用于制备N + PP +或P + NN +硅基结构的方法
    • US20130112260A1
    • 2013-05-09
    • US13643641
    • 2011-04-26
    • Barbara Bazer-BachiMustapha LemitiNam Le QuangYvon Pellegrin
    • Barbara Bazer-BachiMustapha LemitiNam Le QuangYvon Pellegrin
    • H01L31/18H01L29/12H01L31/0232H01L21/225
    • H01L31/18H01L21/225H01L21/2255H01L29/12H01L31/022425H01L31/02327H01L31/068H01L31/1804Y02E10/547Y02P70/521
    • The present invention relates to a method for preparing, on a silicon wafer, an n+pp+ or p+nn+ structure which includes the following consecutive steps: a) on a p or n silicon wafer (1), which includes a front surface (8) and a rear surface (9), a layer of boron-doped silicon oxide (BSG) (2) is formed on the rear surface (9) by PECVD, followed by a SiOx diffusion barrier (3); b) a source of phosphorus is diffused such that the phosphorus and the boron co-diffuse and in order also to form: on the front surface (8) of the wafer obtained at the end of step a), a layer of phosphorus-doped silicon oxide (PSG) (4) and an n+ doped area (5); and on the rear surface of the wafer obtained at the end of step a), a boron-rich area (BRL) (6), as well as a p+ doped area (7); c) the layers of BSG (2) and PSG (4) oxides and SiOx (3) are removed, the BRL (6) is oxidised and the layer resulting from said oxidation is removed. The invention also relates to a silicon wafer having an n+pp+ or p+nn+ structure, which can be obtained by said preparation method, as well as to a photovoltaic panel manufactured from such a silicon wafer.
    • 本发明涉及一种在硅晶片上制备n + pp +或p + nn +结构的方法,其包括以下连续步骤:a)在一个或多个硅晶片(1)上,其包括前表面(8) )和后表面(9),通过PECVD在后表面(9)上形成硼掺杂氧化硅层(BSG)(2),随后是SiO x扩散阻挡层(3); b)磷源扩散,使得磷和硼共扩散,并且还可以在步骤a)末端获得的晶片的前表面(8)上形成磷掺杂层 氧化硅(PSG)(4)和n +掺杂区域(5); 并且在步骤a)结束时获得的晶片的背面,富硼区(BRL)(6)以及p +掺杂区(7)上; c)除去BSG(2)和PSG(4)氧化物和SiO x(3)的层,将BRL(6)氧化并除去由所述氧化产生的层。 本发明还涉及可以通过所述制备方法获得的具有n + pp +或p + nn +结构的硅晶片以及由这种硅晶片制造的光伏面板。